# US 12,002,851 B2 · Semiconductor structure and method of fabricating the same

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- Number: US 12,002,851 B2
- Document ID: US12002851B2
- Status: Granted
- Kind: B2
- Application number: 17/690,842
- Filed: 2022-03-09
- Published: 2023-07-27
- Granted: 2024-06-04
- Earliest claimed: 2022-01-27
- Assignees: Diodes Incorporated
- Applicants: Diodes Incorporated
- Inventors: Tao Long; Pin-Hao Huang; Ze Rui Chen
- Web page: https://patentgrep.com/patent/US12002851B2

## CPC

- H10D 8/422: {PN diodes having the PN junctions in mesas}
- H10D 62/124: {Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions}
- H10D 8/041: {of multilayer diodes}
- H10D 8/043: {of planar diodes}
- H10D 62/10: Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D 62/126: {Top-view geometrical layouts of the regions or the junctions}
- H10D 62/40: Crystalline structures
- H10W 74/134: {the encapsulations being in grooves in the semiconductor body}
- H10W 74/137: {the encapsulations being directly on the semiconductor body (H10W74/134 takes precedence)}
- H10W 74/141: {the encapsulations being on at least the sidewalls of the semiconductor body}
- H10W 74/147: {the encapsulations being multilayered}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A semiconductor structure includes a substrate having a first surface and a second surface opposite to the first surface. The semiconductor structure also includes a first diffusion layer disposed in the substrate and adjacent to the first surface, and a first electrode layer disposed on the first diffusion layer. The semiconductor structure further includes a second diffusion layer disposed in the substrate and adjacent to the second surface, and a plurality of diffusion regions disposed in the second diffusion layer. The semiconductor structure further includes a second electrode layer disposed on the second diffusion layer and in contact with the plurality of diffusion regions. The second diffusion layer is coupled to the plurality of diffusion regions through the second electrode layer. The substrate is sandwiched between the first electrode layer and the second electrode layer.

## Claims

### Claim 1

A semiconductor structure comprising:
a substrate having a first conductivity type, and having a first surface and a second surface opposite to the first surface;
a first diffusion layer having the first conductivity type, wherein the first diffusion layer is disposed in the substrate and adjacent to the first surface;
a first electrode layer disposed on the first diffusion layer;
a second diffusion layer having a second conductivity type, wherein the second diffusion layer is disposed in the substrate and adjacent to the second surface;
a plurality of diffusion regions having the first conductivity type and disposed in the second diffusion layer, wherein a first conductivity type impurity concentration of the plurality of diffusion regions is higher than a second conductivity type impurity concentration of the second diffusion layer; and
a second electrode layer disposed on the second diffusion layer and in contact with the plurality of diffusion regions, wherein:
the second diffusion layer is coupled to the plurality of diffusion regions through the second electrode layer; and
the substrate is between the first electrode layer and the second electrode layer.

### Claim 2 (depends on 1)

The semiconductor structure of claim 1, wherein:
the first conductivity type impurity concentration of the first diffusion layer is higher than the first conductivity type impurity concentration of the substrate.

### Claim 3 (depends on 1)

The semiconductor structure of claim 1, wherein:
the plurality of diffusion regions is exposed from the second surface of the substrate; and
the plurality of diffusion regions is covered by the second electrode layer.

### Claim 4 (depends on 1)

The semiconductor structure of claim 1, wherein:
each of the plurality of diffusion regions has a surface coplanar with the second surface of the substrate; and
the plurality of diffusion regions does not extend to a diffusion boundary of the second diffusion layer, and wherein a distance between the plurality of diffusion regions and the diffusion boundary of the second diffusion layer is greater than about 15 microns.

### Claim 5 (depends on 1)

The semiconductor structure of claim 1, wherein:
the plurality of diffusion regions comprise a first diffusion region and a second diffusion region separated from the first diffusion region.

### Claim 6 (depends on 5)

The semiconductor structure of claim 5, wherein:
the first diffusion region surrounds the second diffusion region.

### Claim 7 (depends on 1)

The semiconductor structure of claim 1, wherein:
the plurality of diffusion regions is arranged in a matrix.

### Claim 8 (depends on 1)

The semiconductor structure of claim 1, further comprising:
a square groove ring formed in the substrate.

### Claim 9 (depends on 8)

The semiconductor structure of claim 8, wherein:
the square groove ring extends downwardly from the second surface of the substrate beyond a diffusion boundary of the first diffusion layer.

### Claim 10 (depends on 8)

The semiconductor structure of claim 8, further comprising:
a glass layer disposed on the square groove ring.

### Claim 11 (depends on 10)

The semiconductor structure of claim 10, wherein:
the glass layer covers a portion of the second surface and surrounds the second electrode layer.

### Claim 12 (depends on 10)

The semiconductor structure of claim 10, further comprising:
a polysilicon layer disposed between the glass layer and the square groove ring.

### Claim 13 (depends on 12)

The semiconductor structure of claim 12, wherein:
the polysilicon layer extends toward the second electrode layer and contacts an edge of the second electrode layer; and
the polysilicon layer partially covers at least one of the plurality of diffusion regions.

### Claim 14

An apparatus comprising:
a first diffusion layer formed on a first electrode layer;
a core layer formed over the first diffusion layer;
a second diffusion layer formed over the core layer;
a plurality of diffusion regions formed in the second diffusion layer;
a second electrode layer formed over the second diffusion layer and in contact with the plurality of diffusion regions;
a square groove ring extending from the second electrode layer down to a diffusion boundary of the first diffusion layer;
a glass layer formed over the square groove ring; and
a polysilicon layer formed between the glass layer and the square groove ring.

### Claim 15 (depends on 14)

The apparatus of claim 14, wherein:
the second diffusion layer is coupled to the plurality of diffusion regions through the second electrode layer.

### Claim 16 (depends on 14)

The apparatus of claim 14, wherein:
the plurality of diffusion regions comprise a first diffusion region and a second diffusion region separated from the first diffusion region, and wherein:
the second diffusion region is rectangular in shape; and
the first diffusion region surrounds the second diffusion region.

### Claim 17

An apparatus comprising:
a substrate having a first surface, a first diffusion layer, a core layer over the first diffusion layer, a second diffusion layer over the core layer and a second surface opposite to the first surface, wherein the first diffusion layer and the core layer have a first conductivity type, and the second diffusion layer has a second conductivity type;
a plurality of diffusion regions having the first conductivity type in the second diffusion layer;
a first electrode layer on the first diffusion layer;
a second electrode layer on the second diffusion layer, wherein the second electrode layer is in contact with the plurality of diffusion regions;
a groove ring formed in the substrate;
a glass layer disposed on the square groove ring; and
a polysilicon layer disposed between the glass layer and the groove ring.

### Claim 18 (depends on 17)

The apparatus of claim 17, wherein:
the first diffusion layer is a collector of a transistor;
the second diffusion layer is a base of the transistor; and
the plurality of diffusion regions is an emitter of the transistor, and wherein the second diffusion layer and the plurality of diffusion region are short-circuited to each other to achieve a diode element through short-circuiting the base and the emitter of the transistor.

### Claim 19 (depends on 17)

The apparatus of claim 17, wherein:
the first electrode layer is in direct contact with the first diffusion layer, and the second electrode layer is in direct contact with the second diffusion layer, and wherein a width of the first electrode layer is greater than a width of the second electrode layer;
the groove ring has an arc surface when viewed in a cross-sectional view, and a rectangular shape when viewed from a top view, and wherein the groove ring extends from the second surface of the substrate down beyond a diffusion boundary between the first diffusion layer and the core layer; and
the polysilicon layer covers an edge portion of the second surface of the substrate and partially covers at least one diffusion region.