Compact proximity focused image sensor
AssigneeEOTech, LLC
InventorsKenneth Costello, Kevin Roderick, Verle Aebi
Life of this patent
Estimating the term…
Abstract
An image sensor has a photocathode window assembly, an anode assembly, and a malleable metal seal. The photocathode window assembly has a photocathode layer. The anode assembly includes a silicon substrate that has an electron sensitive surface. The malleable metal seal bonds the photocathode window assembly and the silicon substrate to each other. A vacuum gap separates the photocathode layer from the electron sensitive surface. A first electrical connection and a second electrical connection are for a voltage bias of the photocathode layer relative to the electron sensitive surface.
Claims20
An image sensor comprising:
- a photocathode window assembly having a photocathode layer;
- an anode assembly comprising a silicon substrate having an electron sensitive surface;
- a malleable metal seal bonding the photocathode window assembly and the silicon substrate to each other, forming a vacuum gap that separates the photocathode layer of the photocathode window assembly and the electron sensitive surface of the silicon substrate of the anode assembly;
- a first electrical connection to the photocathode layer, a first end of the first electrical connection is at the photocathode layer and a second end of the first electrical connection is outside the vacuum gap;
- and
- a second electrical connection to the electron sensitive surface, a first end of the second electrical connection is at the electron sensitive surface and a second end of the second electrical connection is outside the vacuum gap;
- wherein the first electrical connection and the second electrical connection are for voltage bias of the photocathode layer and the electron sensitive surface.
A vacuum proximity focused image sensor comprising:
- a photocathode window assembly having a photocathode layer and a first coefficient of thermal expansion (CTE);
- an anode assembly comprising a silicon substrate having an electron sensitive surface and a second CTE, the second CTE being different from the first CTE;
- a seal stack disposed between and joining the photocathode window assembly to the anode assembly, the seal stack comprising
- a malleable metal seal, forming a vacuum gap that separates the photocathode layer of the photocathode window assembly and the electron sensitive surface of the silicon substrate of the anode assembly;
- a structural layer of a material having a third CTE, the third CTE being between the first CTE and the second CTE;
- a first electrical connection to the photocathode layer, for a voltage bias;
- and
- a second electrical connection to the electron sensitive surface, for the voltage bias.
Dependencies are inferred from the claim text.