# US 12,002,818 B2 · Semiconductor device and manufacturing method thereof

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- Number: US 12,002,818 B2
- Document ID: US12002818B2
- Status: Granted
- Kind: B2
- Application number: 18/215,987
- Filed: 2023-06-29
- Published: 2024-01-11
- Granted: 2024-06-04
- Earliest claimed: 2009-09-04
- Assignees: Semiconductor Energy Laboratory Co., Ltd.
- Applicants: Semiconductor Energy Laboratory Co., Ltd.
- Inventors: Masayuki Sakakura; Yoshiaki Oikawa; Shunpei Yamazaki; Junichiro Sakata; Masashi Tsubuku; Kengo Akimoto; Miyuki Hosoba
- Web page: https://patentgrep.com/patent/US12002818B2

## CPC

- H10D 86/60: wherein the TFTs are in active matrices
- G02F 1/134309: {characterised by their geometrical arrangement}
- G02F 1/13454: {Drivers integrated on the active matrix substrate (G02F1/136277 takes precedence)}
- G02F 1/1368: in which the switching element is a three-electrode device {(G02F1/136277 takes precedence)}
- H10D 86/423: {comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO}
- H10D 86/441: {Interconnections, e.g. scanning lines}
- H10D 86/481: {integrated with passive devices, e.g. auxiliary capacitors}
- G02F 2202/10: semiconductor
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS

## Abstract

The semiconductor device includes a driver circuit portion including a driver circuit and a pixel portion including a pixel. The pixel includes a gate electrode layer having a light-transmitting property, a gate insulating layer, a source electrode layer and a drain electrode layer each having a light-transmitting property provided over the gate insulating layer, an oxide semiconductor layer covering top surfaces and side surfaces of the source electrode layer and the drain electrode layer and provided over the gate electrode layer with the gate insulating layer therebetween, a conductive layer provided over part of the oxide semiconductor layer and having a lower resistance than the source electrode layer and the drain electrode layer, and an oxide insulating layer in contact with part of the oxide semiconductor layer.

## Claims

### Claim 1

A semiconductor device comprising:
a pixel portion comprising a first transistor and a capacitor; and
a driver circuit portion comprising a second transistor,
wherein the first transistor comprises:
a first gate electrode layer;
a first oxide semiconductor layer, a region of the first oxide semiconductor layer and the first gate electrode layer overlapping with each other; and
a first source electrode layer and a first drain electrode layer each provided under and in contact with the first oxide semiconductor layer,
wherein the capacitor comprises a first conductive layer and a second conductive layer,
wherein the first conductive layer is a same layer as the first gate electrode layer and comprises a same material as the first gate electrode layer,
wherein the second conductive layer is a same layer as the first source electrode layer and the first drain electrode layer and comprises a same material as the first source electrode layer and the first drain electrode layer,
wherein the second transistor comprises:
a second gate electrode layer;
a second oxide semiconductor layer provided over the second gate electrode layer;
a third gate electrode layer provided over the second oxide semiconductor layer; and
a second source electrode layer and a second drain electrode layer each being in contact with the second oxide semiconductor layer, and
wherein the second gate electrode layer and the third gate electrode layer overlap with each other with the second oxide semiconductor layer located therebetween.

### Claim 2 (depends on 1)

The semiconductor device according to claim 1, wherein the second gate electrode layer is electrically connected to the third gate electrode layer.

### Claim 3 (depends on 1)

The semiconductor device according to claim 1, wherein each of the second source electrode layer and the second drain electrode layer comprises a single layer comprising an element selected from molybdenum, titanium, chromium, tantalum, tungsten, aluminum, copper, neodymium, and scandium.

### Claim 4 (depends on 1)

A mobile phone equipped with the semiconductor device according to claim 1.

### Claim 5

A semiconductor device comprising:
a pixel portion comprising a first transistor and a capacitor; and
a driver circuit portion comprising a second transistor,
wherein the first transistor comprises:
a first gate electrode layer;
a first oxide semiconductor layer, a region of the first oxide semiconductor layer and the first gate electrode layer overlapping with each other; and
a first source electrode layer and a first drain electrode layer each provided under and in contact with the first oxide semiconductor layer,
wherein the capacitor comprises a first conductive layer and a second conductive layer,
wherein the first conductive layer is a same layer as the first gate electrode layer and comprises a same material as the first gate electrode layer,
wherein the second conductive layer is a same layer as the first source electrode layer and the first drain electrode layer and comprises a same material as the first source electrode layer and the first drain electrode layer,
wherein the second transistor comprises:
a second gate electrode layer;
a second oxide semiconductor layer provided over the second gate electrode layer;
a third gate electrode layer provided over the second oxide semiconductor layer; and
a second source electrode layer and a second drain electrode layer each being in contact with the second oxide semiconductor layer,
wherein the second gate electrode layer and the third gate electrode layer overlap with each other with the second oxide semiconductor layer located therebetween, and
wherein each of the first oxide semiconductor layer and the second oxide semiconductor layer comprises In, Ga, and Zn.

### Claim 6 (depends on 5)

The semiconductor device according to claim 5, wherein the second gate electrode layer is electrically connected to the third gate electrode layer.

### Claim 7 (depends on 5)

The semiconductor device according to claim 5, wherein each of the second source electrode layer and the second drain electrode layer comprises a single layer comprising an element selected from molybdenum, titanium, chromium, tantalum, tungsten, aluminum, copper, neodymium, and scandium.

### Claim 8 (depends on 5)

A mobile phone equipped with the semiconductor device according to claim 5.