# US 12,002,699 B2 · Wafer pod transfer assembly

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- Number: US 12,002,699 B2
- Document ID: US12002699B2
- Status: Granted
- Kind: B2
- Application number: 18/117,593
- Filed: 2023-03-06
- Published: 2023-06-29
- Granted: 2024-06-04
- Earliest claimed: 2021-04-23
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Company Limited
- Inventors: Chih-Wei Chou; Sheng-Yuan Lin; Yuan-Hsin Chi; Yin-Tun Chou; Hung-Chih Wang; Yu-Chi Liu
- Web page: https://patentgrep.com/patent/US12002699B2

## CPC

- H10P 72/3402: {Mechanical parts of transfer devices}
- H10P 72/7602: {the wafers being placed on a robot blade or gripped by a gripper for conveyance}
- B65G 47/90: Devices for picking-up and depositing articles or materials
- H10P 72/12: {Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements}
- H10P 72/14: {Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls}
- H10P 72/3218: {Conveying cassettes, containers or carriers}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS (packaging B65B; handling thin or filamentary materials, e.g. paper sheets or thread, B65H; cranes B66C; portable mobile or lifting or hauling appliances, e.g. hoists, B66D; devices for lifting or lowering goods for loading or unloading purposes, e.g. fork-lift trucks, B66F9/00; emptying bottles, jars, casks, barrels or similar containers, not otherwise provided for, B67C9/00; delivering or transferring liquids B67D; filling or discharging vessels for liquefied, solidified or compressed gases F17C; pipe-line systems for fluids F17D)

## Abstract

A wafer pod transfer assembly includes a wafer pod port to receive a wafer pod, a transfer axle coupled to the wafer pod port, a shaft receiver, a shaft coupled to the transfer axle and to the shaft receiver, a pin through the shaft receiver and through the shaft, wherein the pin comprises a first end and a second end, opposite the first end, and a pin buckle including a first loop and a second loop. The pin buckle is coupled to the pin, the first loop encircles the first end of the pin, and the second loop encircles the second end of the pin.

## Claims

### Claim 1

A wafer pod transfer assembly, comprising:
a wafer pod port to receive a wafer pod;
a transfer axle coupled to the wafer pod port;
a shaft receiver;
a shaft coupled to the transfer axle and to the shaft receiver;
a pin through the shaft receiver and through the shaft, wherein the pin comprises a first end and a second end opposite the first end;
a pin screw through the shaft receiver and through the shaft, wherein the pin screw abuts a side surface of the pin; and
a pin buckle comprising a first loop and a second loop, wherein:
the pin buckle is coupled to the pin,
the first loop encircles the first end of the pin, and
the second loop encircles the second end of the pin.

### Claim 2 (depends on 1)

The wafer pod transfer assembly of claim 1, wherein the pin buckle is a C-type pin buckle.

### Claim 3 (depends on 1)

The wafer pod transfer assembly of claim 1, wherein the shaft is within the shaft receiver.

### Claim 4 (depends on 1)

The wafer pod transfer assembly of claim 1, comprising:
a gear coupled to the shaft receiver.

### Claim 5 (depends on 4)

The wafer pod transfer assembly of claim 4, wherein the gear comprises the shaft receiver.

### Claim 6 (depends on 1)

The wafer pod transfer assembly of claim 1, wherein the wafer pod port comprises wafer pod carrying arms configured to rotate to engage with the wafer pod.

### Claim 7 (depends on 1)

The wafer pod transfer assembly of claim 1, wherein a diameter of the pin buckle is less than a length of the pin.

### Claim 8

A wafer pod transfer assembly, comprising:
a wafer pod port to receive a wafer pod;
a shaft receiver;
a shaft coupled to the shaft receiver, wherein the wafer pod port is coupled to the shaft receiver through the shaft;
a pin through the shaft receiver and through the shaft; and
a pin screw through the shaft receiver and through the shaft, wherein the pin screw abuts a side surface of the pin.

### Claim 9 (depends on 8)

The wafer pod transfer assembly of claim 8, comprising:
a pin buckle, wherein the pin screw is between a first end of the pin buckle and a second end of the pin buckle.

### Claim 10 (depends on 8)

The wafer pod transfer assembly of claim 8, comprising:
a gear coupled to the shaft receiver, wherein the pin screw extends through the gear.

### Claim 11 (depends on 8)

The wafer pod transfer assembly of claim 8, wherein an interior surface of the shaft receiver defines a cavity configured to receive a portion of the shaft.

### Claim 12 (depends on 8)

The wafer pod transfer assembly of claim 8, comprising:
a belt, wherein the wafer pod port is coupled to the shaft through the belt.

### Claim 13 (depends on 8)

The wafer pod transfer assembly of claim 8, comprising:
a transfer axle coupled to the wafer pod port; and
a belt coupled to the transfer axle and to the shaft.

### Claim 14 (depends on 13)

The wafer pod transfer assembly of claim 13, comprising:
a drive assembly, wherein the transfer axle is coupled to the belt through the drive assembly.

### Claim 15

A wafer pod transfer assembly, comprising:
a wafer pod port to receive a wafer pod;
a transfer axle coupled to the wafer pod port;
a belt coupled to the transfer axle;
a shaft coupled to the belt, wherein rotation of the shaft causes rotation of the transfer axle through the belt;
a pin through the shaft;
a shaft receiver coupled to the shaft; and
a pin buckle coupled to the pin and extending around the shaft receiver.

### Claim 16 (depends on 15)

The wafer pod transfer assembly of claim 15, wherein the shaft is within the shaft receiver.

### Claim 17 (depends on 15)

The wafer pod transfer assembly of claim 15, wherein the pin extends through the shaft receiver.

### Claim 18 (depends on 17)

The wafer pod transfer assembly of claim 17, comprising:
a pin screw through the shaft receiver and through the shaft, wherein the pin screw abuts a side surface of the pin.

### Claim 19 (depends on 15)

The wafer pod transfer assembly of claim 15, wherein the wafer pod port comprises wafer pod carrying arms configured to rotate to engage with the wafer pod.

### Claim 20 (depends on 15)

The wafer pod transfer assembly of claim 15, comprising:
a gear coupled to the shaft receiver.