# US 12,002,662 B2 · Electrostatic attraction device and neutralization method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,002,662 B2 - Document ID: US12002662B2 - Status: Granted - Kind: B2 - Application number: 17/598,191 - Filed: 2020-03-13 - Published: 2022-06-02 - Granted: 2024-06-04 - Earliest claimed: 2019-03-26 - Assignees: Tokyo Electron Limited - Applicants: Tokyo Electron Limited - Inventors: Takahiro Kawawa; Hideomi Hosaka - Web page: https://patentgrep.com/patent/US12002662B2 ## CPC - H01J 37/32724: {Temperature} - H02N 13/00: Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect - H05F 3/00: Carrying-off electrostatic charges ({from shoes A43B7/36}; from living beings A61N1/14; {from tyres B60C19/08; from vehicles B60R16/06; from aircraft B64D45/02; from large containers B65D90/46}) - H10P 50/242: {of Group IV materials} - H10P 72/722: {Details of electrostatic chucks} - H01J 2237/2007: Holding mechanisms - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR - H05F: STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract There is provided an electrostatic attraction device having an electrostatic chuck in which an electrode and a heater are embedded in a dielectric. The device comprises: a DC power source unit having a DC power source configured to supply a DC power to the electrode; a first neutralizing circuit connected to a power supply path between the DC power source and the electrode; and a second neutralizing circuit connected to a power supply path between the first neutralizing circuit and the electrode. The first neutralizing circuit has a first ground relay that connects and disconnects the electrode and the ground via a voltage-drop resistance member, and the second neutralizing circuit has an isolation relay that connects and disconnects the first neutralizing circuit and the second neutralizing circuit, and a second ground relay that is connected to a power supply path between the isolation relay and the electrode and connects and disconnects the electrode and the ground side without going through a resistance member. ## Claims ### Claim 1 An electrostatic attraction device having an electrostatic chuck in which an electrode and a heater are embedded in a dielectric, comprising: a DC power source unit having a DC power source configured to supply a DC power to the electrode; a first neutralizing circuit connected to a power supply path between the DC power source and the electrode; and a second neutralizing circuit connected to a power supply path between the first neutralizing circuit and the electrode, wherein the first neutralizing circuit has a first ground relay that connects and disconnects the electrode and the ground via a voltage-drop resistance member, and the second neutralizing circuit has an isolation relay that connects and disconnects the first neutralizing circuit and the second neutralizing circuit, and a second ground relay that is connected to a power supply path between the isolation relay and the electrode and connects and disconnects the electrode and the ground side without going through a resistance member. ### Claim 2 (depends on 1) The electrostatic attraction device of claim 1, wherein the first neutralizing circuit is disposed in the DC power source unit. ### Claim 3 (depends on 1) The electrostatic attraction device of claim 1, wherein the second neutralizing circuit is disposed in an intermediate grounding device between the DC power source unit and the electrode. ### Claim 4 (depends on 1) The electrostatic attraction device of claim 1, further comprising: a controller configured to control connection and disconnection of the first ground relay, the second ground relay, and the isolation relay. ### Claim 5 (depends on 1) A neutralization method for an electrostatic chuck using the electrostatic attraction device recited in claim 1, comprising: a first neutralization step of neutralizing charges of the electrostatic chuck using the first neutralizing circuit at the same time with or after stopping supply of a DC power to the electrode; and a second neutralization step of separating the first neutralizing circuit from the power supply path after the first neutralizing step, and neutralizing charges of the electrostatic chuck using the second neutralizing circuit, at the same time with or after a predetermined period of time from the separating. ### Claim 6 (depends on 2) A neutralization method for an electrostatic chuck using the electrostatic attraction device recited in claim 2, comprising: a first neutralization step of neutralizing charges of the electrostatic chuck using the first neutralizing circuit at the same time with or after stopping supply of a DC power to the electrode; and a second neutralization step of separating the first neutralizing circuit from the power supply path after the first neutralizing step, and neutralizing charges of the electrostatic chuck using the second neutralizing circuit, at the same time with or after a predetermined period of time from the separating. ### Claim 7 (depends on 3) A neutralization method for an electrostatic chuck using the electrostatic attraction device recited in claim 3, comprising: a first neutralization step of neutralizing charges of the electrostatic chuck using the first neutralizing circuit at the same time with or after stopping supply of a DC power to the electrode; and a second neutralization step of separating the first neutralizing circuit from the power supply path after the first neutralizing step, and neutralizing charges of the electrostatic chuck using the second neutralizing circuit, at the same time with or after a predetermined period of time from the separating. ### Claim 8 (depends on 4) A neutralization method for an electrostatic chuck using the electrostatic attraction device recited in claim 4, comprising: a first neutralization step of neutralizing charges of the electrostatic chuck using the first neutralizing circuit at the same time with or after stopping supply of a DC power to the electrode; and a second neutralization step of separating the first neutralizing circuit from the power supply path after the first neutralizing step, and neutralizing charges of the electrostatic chuck using the second neutralizing circuit, at the same time with or after a predetermined period of time from the separating.