# US 12,002,661 B2 · Susceptor having cooling device

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- Number: US 12,002,661 B2
- Document ID: US12002661B2
- Status: Granted
- Kind: B2
- Application number: 17/113,392
- Filed: 2020-12-07
- Published: 2021-03-25
- Granted: 2024-06-04
- Earliest claimed: 2015-08-17
- Assignees: ASM IP Holding B.V.
- Applicants: ASM IP Holding B.V.
- Inventors: Yukihiro Mori; Melvin Verbaas
- Web page: https://patentgrep.com/patent/US12002661B2

## CPC

- H01J 37/32724: {Temperature}
- C23C 16/45544: {characterized by the apparatus}
- C23C 16/4583: {the substrate being supported substantially horizontally}
- C23C 16/4586: {Elements in the interior of the support, e.g. electrodes, heating or cooling devices}
- C23C 16/46: characterised by the method used for heating the substrate (C23C16/48, C23C16/50 take precedence)
- C23C 16/463: {Cooling of the substrate}
- C23C 16/50: using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)}
- C23C 16/509: using internal electrodes
- C23C 16/52: Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)}
- H01J 37/32009: {Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources (plasma generation in general H05H1/24)}
- H01J 37/3244: {Gas supply means}
- H01J 37/32715: {Workpiece holder}
- H10P 72/0432: {mainly by conduction}
- H10P 72/0434: {mainly by convection}
- H10P 72/0462: {characterised by the construction of the processing chambers, e.g. modular processing chambers}
- H10P 72/0602: {Temperature monitoring}
- C23C 16/4412: {Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps}
- H01J 2237/3321: CVD [Chemical Vapor Deposition]
- H01J 2237/334: Etching
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A susceptor includes a plate part, a first heater for heating a first portion of the plate part, a second heater for heating a second portion of the plate part, and a heat insulating portion for thermally insulating the first portion and the second portion from each other on an upper surface side of the plate part.

## Claims

### Claim 1

A susceptor comprising:
a plate part;
a first heater configured to heat a first portion of the plate part, wherein the first heater is disposed in the first portion;
a second heater configured to heat a second portion of the plate part, the second portion being different from the first portion, wherein the second heater is disposed in the second portion;
a heat insulating portion configured to thermally insulate the first portion and the second portion from each other on an upper surface side of the plate part, the heat insulating portion including a grooved portion provided in the plate part on the upper surface side, wherein the grooved portion is located between the first heater and the second heater;
a cooling device configured to cool the plate part right below the grooved portion, at least a part of the cooling device extends below the grooved portion;
a first closing part provided on the first portion and a part of the grooved portion to narrow a groove in the grooved portion without contacting the second portion; and
a second closing part provided on the second portion and a part of the grooved portion to narrow the groove in the grooved portion without contacting the first portion and the first closing part.

### Claim 2 (depends on 1)

The susceptor according to claim 1, wherein the cooling device is attached to the plate part right below the grooved portion.

### Claim 3 (depends on 1)

The susceptor according to claim 1, wherein the cooling device is embedded in the plate part right below a groove in the grooved portion.

### Claim 4 (depends on 3)

The susceptor according to claim 3, wherein the second portion surrounds the first portion as viewed in plan, and the cooling device extends along the grooved portion in a plan view.

### Claim 5 (depends on 1)

The susceptor according to claim 1, wherein the cooling device is embedded in the plate part at positions on opposite sides of a portion of the plate part below a groove in the grooved portion.

### Claim 6 (depends on 5)

The susceptor according to claim 5, wherein the second portion surrounds the first portion in a plan view, and the cooling device extends along the grooved portion in a plan view.

### Claim 7 (depends on 1)

The susceptor according to claim 1, wherein the cooling device is embedded in the plate part at positions on opposite sides of the grooved portion.

### Claim 8 (depends on 1)

The susceptor according to claim 1, wherein the first heater and the second heater are thin-film heat generating member provided on the plate part.

### Claim 9 (depends on 1)

The susceptor according to claim 1, wherein the cooling device has a cooling medium passage through which a cooling medium flows;
the cooling medium passage includes a first cooling medium passage passing through the first portion, and a second cooling medium passage connecting to the first cooling medium passage and passing through a portion of the plate part right below a groove in the grooved portion;
a heat transfer inhibiting part for hindering heat transfer between the cooling medium and the plate part is provided in the first cooling medium passage; and
the cooling medium and the plate part contact each other in the second cooling medium passage.

### Claim 10 (depends on 9)

The susceptor according to claim 9, wherein the grooved portion is provided in annular form in a plan view;
at least two sets of the first cooling medium passage and the second cooling medium passage are provided; and
positions at which the cooling medium enters the second cooling medium passage from the first cooling medium passage are provided generally at equal intervals along the grooved portion.

### Claim 11 (depends on 1)

The susceptor according to claim 1, wherein the grooved portion separates the first portion from the second portion.

### Claim 12 (depends on 1)

The susceptor according to claim 1, wherein the first heater is in annular form in the first portion.

### Claim 13 (depends on 1)

The susceptor according to claim 1, further comprising a third heater configured to heat a third portion of the plate part, the third portion being different from the first portion and the second portion, wherein the third heater is disposed in the third portion.

### Claim 14 (depends on 13)

The susceptor according to claim 13, wherein the third portion comprises an outer edge of the plate part.

### Claim 15 (depends on 1)

The susceptor according to claim 1, wherein the susceptor is configured to produce a temperature difference on the upper side surface of the first portion from the upper side surface of the second portion.