# US 12,002,647 B2 · Adjustable support for arc chamber of ion source > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,002,647 B2 - Document ID: US12002647B2 - Status: Granted - Kind: B2 - Application number: 17/376,208 - Filed: 2021-07-15 - Published: 2022-10-20 - Granted: 2024-06-04 - Earliest claimed: 2021-04-15 - Assignees: Taiwan Semiconductor Manufacturing Company, Ltd. - Applicants: Taiwan Semiconductor Manufacturing Company, Ltd. - Inventors: Po-Tang Tseng; Ching-Heng Yen; Tai-Kun Kao; Sheng-Tai Peng - Web page: https://patentgrep.com/patent/US12002647B2 ## CPC - H01J 27/08: using arc discharge - H01J 27/022: {Details} - H01J 37/08: Ion sources; Ion guns - H01J 37/15: External mechanical adjustment of electron or ion optical components (H01J37/067, H01J37/20 take precedence) - H01J 37/3171: {for ion implantation} - H10P 34/00: Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices - H01J 2237/061: Construction - H01J 2237/082: Electron beam - H01J 2237/31701: Ion implantation - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract An assembly present in an ion source for supporting an arc chamber upon a base plate includes a first arc support plate, a first screw, and a second screw. The first screw passes through a smooth through-hole in an arm of the first arc support plate and extends into a bore in the base plate. The second (or adjustable) screw passes through a threaded through-hole in an arm of the first arc support plate and engages an upper surface of the base plate itself, and can be used to change the altitude and angle of the first arc support plate relative to the base plate. This adjustment ability improves the beam quality of the ion source. ## Claims ### Claim 1 An ion source for an ion implanter, comprising: an arc chamber supported by an arc support plate; wherein the arc support plate comprises a main portion having a front face and at least one arm, the at least one arm extending beyond the front face, and the main portion includes an upper end above the at least one arm and a lower end below the at least one arm. ### Claim 2 (depends on 1) The ion source of claim 1, wherein the arc support plate has two arms located on opposite sides of the arc support plate, the front face being located between the two arms. ### Claim 3 (depends on 1) The ion source of claim 1, wherein the at least one arm contains a plurality of through-holes. ### Claim 4 (depends on 3) The ion source of claim 3, wherein at least one through-hole in the plurality of through-holes is located in the at least one arm beyond the front face. ### Claim 5 (depends on 3) The ion source of claim 3, wherein the plurality of through-holes includes a threaded through-hole and a smooth through-hole. ### Claim 6 (depends on 3) The ion source of claim 3, wherein the plurality of through-holes includes one threaded through-hole and two smooth through-holes. ### Claim 7 (depends on 1) The ion source of claim 1, wherein the main portion further comprises two shoulders, such that a length of the upper end is shorter than a length of the lower end. ### Claim 8 (depends on 7) The ion source of claim 7, further comprising a leg extending downwards from the lower end of the main portion, wherein the leg is offset to one side. ### Claim 9 An assembly for supporting an arc chamber, comprising: a first arc support plate, a base plate, a first screw, and a second screw; wherein the first arc support plate comprises at least one arm, the at least one arm extending beyond the front face and containing a smooth through-hole; wherein the base plate comprises a bore extending into an upper surface; wherein the first screw passes through the smooth through-hole and into the bore of the base plate; and wherein the second screw can adjust an angle between the first arc support plate and the base plate. ### Claim 10 (depends on 9) The assembly of claim 9, wherein the at least one arm of the first arc support plate also contains a threaded through-hole; and wherein the second screw passes through the threaded through-hole and engages an upper surface of the base plate. ### Claim 11 (depends on 10) The assembly of claim 10, wherein the threaded through-hole is located in the at least one arm beyond the front face of the first arc support plate. ### Claim 12 (depends on 9) The assembly of claim 9, wherein the base plate also contains a threaded through-hole; and wherein the second screw passes through the threaded through-hole and engages a lower surface of the at least one arm of the first arc support plate. ### Claim 13 (depends on 9) The assembly of claim 9, wherein the first screw and the second screw are of different lengths, and optionally wherein the first screw and the second screw differ in length by at least 0.5 mm. ### Claim 14 (depends on 9) The assembly of claim 9, wherein the first arc support plate has two arms located on opposite sides of the first arc support plate and extending forward beyond a front face of the first arc support plate, with a front face of the first arc support plate being located between the two arms. ### Claim 15 (depends on 9) The assembly of claim 9, further comprising: a second arc support plate; and an arc chamber supported on opposite sides by the first arc support plate and the second arc support plate. ### Claim 16 (depends on 15) The assembly of claim 15, wherein the second arc support plate has a different shape from the first arc support plate. ### Claim 17 A method of adjusting an angle of an arc chamber, comprising: adjusting an alignment screw so as to change an angle of at least one arc support plate that supports the arc chamber, relative to a base plate to which the arc support plate is attached. ### Claim 18 (depends on 17) The method of claim 17, wherein the arc chamber is supported by two arc support plates that engage the base plate. ### Claim 19 (depends on 17) The method of claim 17, wherein the alignment screw passes through an arm of the at least one support plate and pushes against an upper surface of the base plate; or wherein the alignment screw passes through the base plate and pushes against a lower surface of an arm of the at least one support plate. ### Claim 20 (depends on 17) The method of claim 17, wherein the base plate further comprises at least one alignment pin for engaging a smooth through-hole on an arm of the at least one support plate.