# US 12,002,611 B2 · High power low frequency coils

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- Number: US 12,002,611 B2
- Document ID: US12002611B2
- Status: Granted
- Kind: B2
- Application number: 17/006,693
- Filed: 2020-08-28
- Published: 2021-03-04
- Granted: 2024-06-04
- Earliest claimed: 2019-08-28
- Assignees: Comet Technologies USA, Inc.
- Applicants: Comet Technologies USA, Inc.
- Inventors: Kirkwood Rough; Aaron Cuttino
- Web page: https://patentgrep.com/patent/US12002611B2

## CPC

- H01F 27/006: {with special arrangement or spacing of turns of the winding(s), e.g. to produce desired self-resonance}
- H01F 27/2828: {Construction of conductive connections, of leads}
- H01F 27/325: {Coil bobbins (formers for coils in general H01F5/02)}
- H01F 37/005: {without magnetic core}
- H01F 41/064: Winding non-flat conductive wires, e.g. rods, cables or cords
- H01J 37/321: {the radio frequency energy being inductively coupled to the plasma}
- H01J 37/3211: {Antennas, e.g. particular shapes of coils}
- H01J 37/32183: {Matching circuits}
- H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A coil having a coil body and a plurality of concentric cross-section windings of wire disposed around the coil body, the wire having a spacing between adjacent turns of about 0.25 to 1.0 of the radius of the wire. Also, a coil for a plasma processing device, the coil having a coil body and a plurality of concentric cylindrical cross-section windings of wire disposed around the coil body, the wire having a spacing between adjacent turns of about 0.25 to 1.0 of the radius of the wire and a diameter to length ratio of between about 2:1 and about 3:1.

## Claims

### Claim 1

A multi-layer inductor coil, comprising:
a coil form comprising:
a coil form center, and
a plurality of coil form extensions radially extending from the coil form center, each coil form extension elongated in an axial direction; and
a continuous wire filament wound on the coil form extensions, the continuous wire filament thereby forming a plurality of radially spaced apart concentric winding layers;
wherein each winding layer comprises a plurality of turns extending in the axial direction; and
wherein a cross-section of the plurality of radially spaced apart concentric winding layers forms a triangle in the disposition of the continuous wire filament.

### Claim 2 (depends on 1)

The multi-layer inductor coil of claim 1, wherein:
a first winding layer continues to a finish-turn and returns axially to a starting end of a second winding layer; and
the second winding layer continues to a finish-turn and returns axially to a starting end of a third winding layer.

### Claim 3 (depends on 2)

The multi-layer inductor coil of claim 2, wherein:
the third winding layer is radially further from the coil form center than the second winding layer and extends further in the axial direction than the second winding layer; and
the second winding layer is radially further from the coil form center than the first winding layer and extends further in the axial direction than the first winding layer.

### Claim 4 (depends on 3)

The multi-layer inductor coil of claim 3, wherein a first radial spacing between the first winding layer and the second winding layer is substantially equal to a second radial spacing between the second winding layer and the third winding layer.

### Claim 5 (depends on 1)

The multi-layer inductor coil of claim 1, wherein an outer circumferential surface of a radial cross-section of the multi-layer winding is substantially round or polygonal.

### Claim 6 (depends on 1)

The multi-layer inductor coil of claim 1, wherein:
the wire filament defines a wire radius, and
each winding layer defines a spacing between adjacent turns of 0.25 to 1.0 of the wire radius.

### Claim 7 (depends on 1)

The multi-layer inductor coil of claim 1, wherein each winding layer has a diameter to length ratio of between 2:1 and 3:1.

### Claim 8 (depends on 1)

The multi-layer inductor coil of claim 1, wherein each winding layer has a diameter to length ratio of between 2.4:1 and 2.5:1.

### Claim 9 (depends on 1)

The multi-layer inductor coil of claim 1, wherein each winding layer has a diameter to length ratio of 2.46:1.

### Claim 10 (depends on 1)

The multi-layer inductor coil of claim 1, wherein the winding layers extend progressively in the axial direction.

### Claim 11 (depends on 1)

The multi-layer inductor coil of claim 1, wherein each coil form extension comprises a plurality of holes and the wire filament is routed through the holes.

### Claim 12 (depends on 1)

The multi-layer inductor coil of claim 1, wherein the winding layers comprise a progression of winding turn count of 1 turn per layer.

### Claim 13 (depends on 1)

The multi-layer inductor coil of claim 1, operatively connected in at least one of an impedance matching network, a filter, and a resonator of a radio frequency plasma processing system.

### Claim 14 (depends on 1)

The multi-layer inductor of claim 1, operatively connected in a radio frequency plasma processing system.

### Claim 15 (depends on 14)

The multi-layer inductor coil of claim 14, wherein each winding layer has a diameter to length ratio of between 2.4:1 and 2.5:1.

### Claim 16 (depends on 14)

The multi-layer inductor coil of claim 14, wherein each winding layer has a diameter to length ratio of 2.46:1.

### Claim 17 (depends on 1)

The multi-layer inductor coil of claim 1, fabricated by a method comprising:
feeding the wire filament onto the coil form at an axial end of the coil form;
winding the wire filament on the coil form extensions through multiple turns to form a first winding layer extending in the axial direction;
returning the wire to the axial end of the coil form;
winding the wire filament on the coil form extensions through multiple turns to form a second winding layer extending in the axial direction that is radially further from the coil form center than the first winding layer;
returning the wire filament to the axial end of the coil form-coil form center; and
winding the wire filament on the coil form extensions through multiple turns to form a third winding layer that is radially further from the coil form center than the second winding layer.

### Claim 18 (depends on 17)

The multi-layer inductor coil of claim 17, wherein each coil form extension comprises:
a first portion extending from the coil form center to the first winding layer,
a first spacer extending from the first winding layer to the second winding layer, and
a third space extending from the first second winding layer to the third winding layer.

### Claim 19 (depends on 17)

The multi-layer inductor coil of claim 17, wherein:
the third winding layer overlies and extends in the axial further than the second winding layer; and
the second winding layer overlies and extends in the axial further than the first winding layer.

### Claim 20 (depends on 1)

The multi-layer inductor coil of claim 1, wherein the spacing between any adjacent turns in the plurality of radially spaced apart concentric winding layers is equal and on the order of 0.25 to 1 radius of the wire used.