Fabrication methods for electronic devices integrating magnetic nanostructures
AssigneeUchicago Argonne, LLC
InventorsYuepeng Zhang, John N. Hryn, Yunsong Xie
Life of this patent
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Abstract
Magnetic nanowire components may be used in passive radio-frequency device allowing for smaller size devices, lower power consumption, and on-chip packaging potential across a wide range of technologies. A method for fabricating magnetic nanowire component electronic devices include depositing a conductive device pattern and transmission lines onto a substrate, aligning and securing a magnetic nanowire component to the device pattern, packaging the device with an insulation layer. Alternatively, the conductive device pattern and transmission lines may be deposited on the magnetic nanowire component, and the magnetic nanowire component may then be attached to a substrate.
Claims8
A method for fabricating magnetic nanowire composite electronic devices the method comprising:
- providing a substrate;
- depositing an electrically conductive device pattern onto the substrate;
- depositing at least one electrically conductive transmission line onto the substrate;
- securing a magnetic nanowire component to the electrically conductive device pattern, the magnetic nanowire component being aligned to the electrically conductive device pattern;
- applying a first mask on top of the magnetic nanowire component, transmission lines and the substrate;
- depositing an insulation layer on top of the transmission lines;
- removing the first mask;
- depositing a ground layer on top of the magnetic nanowire component and the substrate;
- and
- depositing an insulating or dielectric layer on top of the ground layer.
Dependencies are inferred from the claim text.