Apparatus for environmental control of dies and substrates for hybrid bonding

An apparatus for extending a queue time of a die or a substrate for hybrid bonding, comprising:

• an environmentally controllable space with a support for holding at least one substrate, wherein the environmentally controllable space is part of a cluster tool or a hybrid bonder chamber;
• an environmentally sealable port of the environmentally controllable space which is configured to receive at least one die or substrate from a plasma activation process chamber;
• a gas velocity accelerator configured to recirculate one or more gases laterally across the support at a velocity of approximately 60 feet per minute to approximately 120 feet per minute;
• a filter which impedes on the one or more gases prior to the one or more gases flowing laterally across the support;
• a humidifier apparatus that is fluidly connected to the environmentally controllable space, wherein the humidifier apparatus enables controllable humidity levels within the environmentally controllable space;
• a pressurizing apparatus fluidly connected to the humidifier apparatus on an output and fluidly connected to at least one gas supply on an input;
• a relative humidity (RH) sensor positioned within the environmentally controllable space;
• and
• an environment controller in communication with at least the humidifier apparatus and the RH sensor, wherein the environment controller is configured to maintain an RH level of approximately 80% to approximately 95%.

An apparatus for extending a queue time of a die or a substrate for hybrid bonding, comprising:

• an environmentally controllable space with a support for holding at least one die or substrate, wherein the environmentally controllable space is a standalone storage space or a substrate carrier;
• an environmentally sealable port of the environmentally controllable space which is configured to receive at least one plasma activated die or substrate;
• a gas velocity accelerator configured to recirculate one or more gases laterally across the support at a velocity of approximately 60 feet per minute to approximately 120 feet per minute;
• a filter which impedes on the one or more gases prior to the one or more gases flowing laterally across the support;
• a humidifier apparatus that is fluidly connected to the environmentally controllable space, wherein the humidifier apparatus enables controllable humidity levels within the environmentally controllable space;
• a pressurizing apparatus fluidly connected to the humidifier apparatus on an output and fluidly connected to at least one gas supply on an input;
• a relative humidity (RH) sensor positioned within the environmentally controllable space;
• and
• an environment controller in communication with at least the humidifier apparatus and the RH sensor, wherein the environment controller is configured to maintain an RH level of approximately 80% to approximately 95%.