# US 12,000,962 B2 · Optical module and distance measurement device

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- Number: US 12,000,962 B2
- Document ID: US12000962B2
- Status: Granted
- Kind: B2
- Application number: 18/090,746
- Filed: 2022-12-29
- Published: 2023-06-01
- Granted: 2024-06-04
- Earliest claimed: 2017-02-28
- Assignees: Hamamatsu Photonics K.K.
- Applicants: Hamamatsu Photonics K.K.
- Inventors: Yuki Morinaga; Daiki Suzuki
- Web page: https://patentgrep.com/patent/US12000962B2

## CPC

- G01S 7/4817: {relating to scanning}
- G01S 7/497: Means for monitoring or calibrating
- G01S 17/42: Simultaneous measurement of distance and other co-ordinates (indirect measurement G01S17/46)
- G02B 26/085: {the reflecting means being moved or deformed by electromagnetic means}
- G02B 26/101: {with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129)}
- G01S 17/931: of land vehicles
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

An optical module includes a support, a movable part supported by the support so as to be swingable about an axis, a mirror provided to the movable part, a drive coil provided to the movable part, a temperature monitoring element provided to the support, and a magnet that generates a magnetic field acting on the drive coil. The support is thermally connected to the magnet.

## Claims

### Claim 1

An optical module comprising:
a support;
a movable part;
a connecting part connecting the movable part to the support so that the movable part is swingable about an axis;
a mirror provided to the movable part;
a drive coil provided to the movable part;
a temperature monitoring element; and
a magnet that generates a magnetic field acting on the drive coil, wherein
the support is thermally connected to the magnet,
a thermal conductivity of the support is 100 or more times higher than a thermal conductivity of air, and
the entire temperature monitoring element is disposed at a part other than the movable part and the connecting part.

### Claim 2 (depends on 1)

The optical module according to claim 1,
wherein the temperature monitoring element is provided to the support, and
a distance between the temperature monitoring element and an outer edge of the support is shorter than a distance between the temperature monitoring element and an inner edge of the support.

### Claim 3 (depends on 1)

The optical module according to claim 1,
wherein the support is formed in a rectangular frame shape when viewed in an optical axis direction of the mirror, and
at least part of the temperature monitoring element is provided at a corner of the support.

### Claim 4 (depends on 1)

The optical module according to claim 1,
wherein the connecting part extends meanderingly when viewed in an optical axis direction of the mirror.

### Claim 5 (depends on 1)

The optical module according to claim 1,
wherein a thickness of the support is 1 mm or less.

### Claim 6 (depends on 1)

The optical module according to claim 1, further comprising a base,
wherein the support is mounted on a surface of the base on one side and the magnet is mounted on a surface of the base on the other side.

### Claim 7 (depends on 1)

The optical module according to claim 1,
wherein a width of an end portion of the connecting part close to the movable part increases as approaching the movable part.

### Claim 8 (depends on 1)

The optical module according to claim 1,
wherein the movable part includes a first movable part and a second movable part, and
the connecting part includes a first connecting part that connects the first movable part to the second movable part so that the first movable part is swingable about a first axis and a second connecting part that connects the second movable part to the support so the second movable part is swingable about a second axis.

### Claim 9 (depends on 8)

The optical module according to claim 8,
wherein the drive coil includes a first drive coil for driving the first movable part and a second drive coil for driving the second movable part, and
the first drive coil and the second drive coil are provided at the second movable part.

### Claim 10 (depends on 8)

The optical module according to claim 8,
wherein the first movable part includes a first portion to which the mirror is provided, a second portion surrounding the first part when viewed in an optical axis direction of the mirror, and a plurality of connection portions connecting the first portion and the second portion to each other, and
gaps are formed between the first portion and the second portion except for the plurality of connection portions.

### Claim 11

An optical module comprising:
a support;
a movable part;
a connecting part connecting the movable part to the support so that the movable part is swingable about an axis;
a mirror provided to the movable part;
a drive coil provided to the movable part;
a temperature monitoring element; and
a magnet that generates a magnetic field acting on the drive coil, wherein
the support is thermally connected to the magnet, and
the entire temperature monitoring element is disposed at a part other than the movable part and the connecting part.

### Claim 12 (depends on 11)

The optical module according to claim 11,
wherein the temperature monitoring element is provided to the support, and
a distance between the temperature monitoring element and an outer edge of the support is shorter than a distance between the temperature monitoring element and an inner edge of the support.

### Claim 13 (depends on 11)

The optical module according to claim 11,
wherein the support is formed in a rectangular frame shape when viewed in an optical axis direction of the mirror, and
at least part of the temperature monitoring element is provided at a corner of the support.

### Claim 14 (depends on 11)

The optical module according to claim 11,
wherein the connecting part extends meanderingly when viewed in an optical axis direction of the mirror.

### Claim 15 (depends on 11)

The optical module according to claim 11,
wherein a thickness of the support is 1 mm or less.

### Claim 16 (depends on 11)

The optical module according to claim 11, further comprising a base,
wherein the support is mounted on a surface of the base on one side and the magnet is mounted on a surface of the base on the other side.

### Claim 17 (depends on 11)

The optical module according to claim 11,
wherein a width of an end portion of the connecting part close to the movable part increases as approaching the movable part.

### Claim 18 (depends on 11)

The optical module according to claim 11,
wherein the movable part includes a first movable part and a second movable part, and
the connecting part includes a first connecting part that connects the first movable part to the second movable part so that the first movable part is swingable about a first axis and a second connecting part that connects the second movable part to the support so the second movable part is swingable about a second axis.

### Claim 19 (depends on 18)

The optical module according to claim 18,
wherein the drive coil includes a first drive coil for driving the first movable part and a second drive coil for driving the second movable part, and
the first drive coil and the second drive coil are provided at the second movable part.

### Claim 20 (depends on 18)

The optical module according to claim 18,
wherein the first movable part includes a first portion to which the mirror is provided, a second portion surrounding the first part when viewed in an optical axis direction of the mirror, and a plurality of connection portions connecting the first portion and the second portion to each other, and
gaps are formed between the first portion and the second portion except for the plurality of connection portions.
