Membrane-based nano-electromechanical systems device and methods to make and use same
AssigneeBrane Audio, LLC
InventorsAlexander Joseph Pinkerton, Joseph F. Pinkerton
Life of this patent
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Abstract
Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions. The NEMS devices have a serpentine shape arrangement of the electrically conductive membrane. The electrically conductive membrane can be controllably wicked down on the edge of the oxide cavity to increase sensitivity of the NEMS device.
Claims22
A nano-electromechanical systems device comprising a magnetic field sensor that comprises an electrically conductive membrane trough chip section that is oriented along a first plane, wherein the electrically conductive membrane trough section comprises
- (a) a thin, electrically conductive membrane in a serpentine shape arrangement having a first end and a second end,
- (b) a substrate having a non-conductive layer oriented parallel to the first plane, wherein
- (i) the non-conductive layer comprises a plurality of cavities exposing one or more metal traces on the substrate,
- (ii) the thin, electrically conductive membrane is on the non-conductive layer parallel to the first plane such that, due to the serpentine shape arrangement, the thin, electrically conductive membrane bounds the plurality of cavities and provides for a plurality of portions of the thin, electrically conductive membrane to face the one or more metal traces in the plurality of cavities, and
- (iii) the thin, electrically conductive membrane is wicked down on the edge of each of the plurality of cavities;
- (c) a first connector electrically connected to the first end of the serpentine shape arrangement;
- and
- (d) a second connector electrically connected to the second end of the serpentine shape arrangement, such that current is operable to flow through the thin, electrically conductive membrane between the first connector and the second connector causing each of the portions of the thin, electrically conductive membrane facing the plurality of cavities to deflect in a direction perpendicular to the first plane in the presence of a magnetic field, wherein
- (i) the magnetic field sensor is operable for sensing the magnetic field based upon sensing of changes of capacitance between the membrane and the one or traces in each of the plurality of cavities due to the deflection of the membrane facing the plurality of cavities.
Dependencies are inferred from the claim text.