# US 12,000,884 B2 · Integrated circuit testing device with coupled control of thermal system

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- Number: US 12,000,884 B2
- Document ID: US12000884B2
- Status: Granted
- Kind: B2
- Application number: 17/566,071
- Filed: 2021-12-30
- Published: 2022-06-30
- Granted: 2024-06-04
- Earliest claimed: 2020-12-31
- Assignees: Delta Design, Inc.
- Applicants: Delta Design, Inc.
- Inventors: Jerry Ihor Tustaniwskyj
- Web page: https://patentgrep.com/patent/US12000884B2

## CPC

- G01R 31/2875: {related to heating}
- G05D 23/1934: {each space being provided with one sensor acting on one or more control means}
- G01K 1/026: {arrangements for monitoring a plurality of temperatures, e.g. by multiplexing}
- G01R 31/2874: {related to temperature}
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)
- G05D: SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G01K: MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR (radiation pyrometry G01J5/00)

## Abstract

A system includes a plurality of thermally-coupled zones and a plurality of thermal control devices, each controllable to thermally control one of the plurality of zones, and a plurality of temperature sensors, each configured to measure temperature of one of the plurality of zones. The system includes a control circuit configured to receive a temperature measurement for each of the plurality of zones, collect the temperature measurements in a temperature vector in a real coordinate system, and transform the temperature vector to a normal coordinate system that provides a plurality of uncoupled equations. The control circuit is configured to determine, based on the plurality of uncoupled equations and a desired temperature gradient, a desired power vector in the normal coordinate system, transform the desired power vector to the real coordinate system to generate a power vector, and control the plurality of heaters in accordance with the power vector.

## Claims

### Claim 1

A system comprising:
a plurality of thermal control devices, each of the thermal control devices controllable to control a temperature of one of a plurality of thermally-coupled zones;
a plurality of temperature sensors, each of the temperature sensors configured to measure the temperature of one of the thermally-coupled zones; and
a control circuit configured to:
receive, from the temperature sensors, a temperature measurement for each of the thermally-coupled zones,
collect the temperature measurements in a temperature vector in a real coordinate system,
transform the temperature vector to a normal coordinate system, the normal coordinate system providing a plurality of uncoupled equations, each of the uncoupled equations associated with operation of the thermal control devices,
determine, based on the uncoupled equations and a desired temperature gradient across the thermally-coupled zones, a desired power vector in the normal coordinate system, the desired power vector associated with operation of the thermal control devices,
transform the desired power vector in the normal coordinate system to the real coordinate system to generate a power vector, and
control the thermal control devices in accordance with the power vector to substantially achieve the desired temperature gradient across the thermally-coupled zones.

### Claim 2 (depends on 1)

The system of claim 1, wherein the desired temperature gradient is a zero gradient.

### Claim 3 (depends on 1)

The system of claim 1, wherein the control circuit is configured to transform the temperature vector to the normal coordinate system by multiplying the temperature vector by a multiple of a transpose of a modal matrix and a thermal capacity matrix, the modal matrix defined using eigenvectors for the system, the thermal capacity matrix defined based on a thermal capacity of each of the thermally-coupled zones.

### Claim 4 (depends on 1)

The system of claim 1, wherein the control circuit is configured to transform the desired power vector in the normal coordinate system to the power vector in the real coordinate system by multiplying a multiple of a thermal capacity matrix and a modal matrix by the desired power vector, the modal matrix defined using eigenvectors for the system, the thermal capacity matrix defined based on a thermal capacity of each of the thermally-coupled zones.

### Claim 5 (depends on 1)

The system of claim 1, further comprising a plurality of fans, each of the fans configured to provide airflow at one of the thermally-coupled zones; and
wherein the control circuit is configured to control the fans in accordance with the power vector to substantially achieve the desired temperature gradient across the thermally-coupled zones.

### Claim 6 (depends on 1)

The system of claim 1, wherein each of the thermal control devices is a heater.

### Claim 7 (depends on 1)

The system of claim 1, wherein:
each of the thermal control devices is a heater; and
the desired temperature gradient is a zero gradient.

### Claim 8 (depends on 7)

The system of claim 7, wherein the control circuit is configured to transform the temperature vector to the normal coordinate system by multiplying the temperature vector by a multiple of a transpose of a modal matrix and a thermal capacity matrix, the modal matrix defined using eigenvectors for the system, the thermal capacity matrix defined based on a thermal capacity of each of the thermally-coupled zones.

### Claim 9 (depends on 7)

The system of claim 7, wherein the control circuit is configured to transform the desired power vector in the normal coordinate system to the power vector in the real coordinate system by multiplying a multiple of a thermal capacity matrix and a modal matrix by the desired power vector.

### Claim 10 (depends on 7)

The system of claim 7, further comprising a plurality of fans, each of the fans configured to provide airflow at one of the thermally-coupled zones; and
wherein the control circuit is configured to control the fans in accordance with the power vector to substantially achieve the desired temperature gradient across the thermally-coupled zones.

### Claim 11 (depends on 1)

The system of claim 1, wherein:
each of the thermal control devices is a heater; and
the control circuit is configured to transform the temperature vector to the normal coordinate system by multiplying the temperature vector by a multiple of a transpose of a modal matrix and a thermal capacity matrix, the modal matrix defined using eigenvectors for the system, the thermal capacity matrix defined based on a thermal capacity of each of the thermally-coupled zones.

### Claim 12 (depends on 11)

The system of claim 11, further comprising a plurality of fans, each of the fans configured to provide airflow at one of the thermally-coupled zones; and
wherein the control circuit is configured to control the fans in accordance with the power vector to substantially achieve the desired temperature gradient across the thermally-coupled zones.

### Claim 13 (depends on 1)

The system of claim 1, wherein:
each of the thermal control devices is a heater; and
the control circuit is configured to transform the desired power vector in the normal coordinate system to the power vector in the real coordinate system by multiplying a multiple of a thermal capacity matrix and a modal matrix by the desired power vector, the modal matrix defined using eigenvectors for the system, the thermal capacity matrix defined based on a thermal capacity of each of the thermally-coupled zones.

### Claim 14 (depends on 13)

The system of claim 13, further comprising a plurality of fans, each of the fans configured to provide airflow at one of the thermally-coupled zones; and
wherein the control circuit is configured to control the fans in accordance with the power vector to substantially achieve the desired temperature gradient across the thermally-coupled zones.

### Claim 15 (depends on 1)

The system of claim 1, further comprising a plurality of fans, each of the fans configured to provide airflow at one of the thermally-coupled zones;
wherein each of the thermal control devices is a heater;
wherein the control circuit is configured to transform the desired power vector in the normal coordinate system to the power vector in the real coordinate system by multiplying a multiple of a thermal capacity matrix and a modal matrix by the desired power vector, the modal matrix defined using eigenvectors for the system, the thermal capacity matrix defined based on a thermal capacity of each of the thermally-coupled zones; and
wherein the control circuit is configured to control the plurality of fans in accordance with the power vector to substantially achieve the desired temperature gradient across the thermally-coupled zones.

### Claim 16 (depends on 1)

The system of claim 1, wherein:
the desired temperature gradient is a zero gradient; and
the control circuit is configured to transform the temperature vector to the normal coordinate system by multiplying the temperature vector by a multiple of a transpose of a modal matrix and a thermal capacity matrix, the modal matrix defined using eigenvectors for the system, the thermal capacity matrix defined based on a thermal capacity of each of the thermally-coupled zones.

### Claim 17 (depends on 16)

The system of claim 16, further comprising a plurality of fans, each of the fans configured to provide airflow at one of the thermally-coupled zones; and
wherein the control circuit is configured to control the fans in accordance with the power vector to substantially achieve the desired temperature gradient across the thermally-coupled zones.

### Claim 18 (depends on 1)

The system of claim 1, further comprising a block having a top surface configured to support one or more integrated circuit devices for testing;
wherein each of the temperature sensors is mounted at the top surface.

### Claim 19 (depends on 18)

The system of claim 18, wherein each of the thermal control devices is configured to heat a zone of the block.

### Claim 20 (depends on 19)

The system of claim 19, further comprising a fans coupled to the block, each of the fans disposed at the zone heated by one of the thermal control devices.