# US 12,000,882 B2 · Sampling measurement method, system, computer device and storage medium > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,000,882 B2 - Document ID: US12000882B2 - Status: Granted - Kind: B2 - Application number: 17/506,767 - Filed: 2021-10-21 - Published: 2022-09-15 - Granted: 2024-06-04 - Earliest claimed: 2021-03-10 - Assignees: Changxin Memory Technologies, Inc. - Applicants: Changxin Memory Technologies, Inc. - Inventors: Xianfeng Ming; Jinguang Li - Web page: https://patentgrep.com/patent/US12000882B2 ## CPC - G01R 31/2601: {Apparatus or methods therefor (G01R31/2607, G01R31/2642 take precedence)} - G01R 31/2894: {Aspects of quality control [QC] (G01R31/31718 takes precedence; program control for QC G05B19/41875)} - H10P 74/00: Testing or measuring during manufacture or treatment of wafers, substrates or devices - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract Provided are a sampling measurement method and system, computer device and storage medium. The sampling measurement method includes: acquiring a preset measurement ratio of each process element in a process station; acquiring an actual measurement ratio of a process element associated with a lot of products to be measured that arrive at the measurement station in the process station; and, when the actual measurement ratio of the associated process element is less than the corresponding preset measurement ratio, controlling a measurement machine at the measurement station to measure the lot of products to be measured. ## Claims ### Claim 1 A sampling measurement method, comprising: acquiring a preset measurement ratio of each process element in a process station; acquiring an actual measurement ratio of a process element associated with a lot of products to be measured that arrive at a measurement station in the process station; in a case where the actual measurement ratio of the process element associated with the lot of products to be measured is less than a corresponding preset measurement ratio, controlling a measurement machine at the measurement station to measure the lot of products to be measured; acquiring an idle ratio of the measurement machine at the measurement station; and in a case where the idle ratio of the measurement machine at the measurement station is greater than 0, determining a process element associated with the lot of products whose previous measurement time is furthest from a current moment, and increasing the preset measurement ratio of the process element associated with the lot of products whose previous measurement time is furthest from the current moment by a first preset value. ### Claim 2 (depends on 1) The sampling measurement method according to claim 1, wherein acquiring the actual measurement ratio of the process element associated with the lot of products to be measured that arrive at the measurement station in the process station comprises: determining the process element associated with the lot of products to be measured according to process flow information on the lot of products to be measured; acquiring a first lot number of the lot of products that are associated with the process element associated with the lot of products to be measured, passed through the measurement station and have been measured; acquiring a second lot number of the lot of products that are associated with the process element associated with the lot of products to be measured, passed through the measurement station and remain unmeasured; and determining the actual measurement ratio of the process element associated with the lot of products to be measured according to the first lot number and the second lot number. ### Claim 3 (depends on 2) The sampling measurement method according to claim 2, wherein the actual measurement ratio of the process element associated with the lot of products to be measured satisfies a following relational formula: CR=M/(M+N); wherein CR represents the actual measurement ratio of the process element associated with the lot of products to be measured, M represents the first lot number, and N represents the second lot number. ### Claim 4 (depends on 1) The sampling measurement method according to claim 1, further comprising: in a case where the actual measurement ratio of the process element associated with the lot of products to be measured is greater than or equal to the corresponding preset measurement ratio, controlling the measurement machine at the measurement station not to measure the lot of products to be measured. ### Claim 5 (depends on 1) The sampling measurement method according to claim 1, further comprising: in a case where the actual measurement ratio of the process element associated with the lot of products to be measured is greater than or equal to the corresponding preset measurement ratio, acquiring the idle ratio of the measurement machine at the measurement station; and in a case where the idle ratio of the measurement machine at the measurement station is greater than 0, controlling the measurement machine at the measurement station to measure the lot of products to be measured. ### Claim 6 (depends on 1) The sampling measurement method according to claim 1, further comprising: acquiring an insufficient ratio of the measurement machine at the measurement station; and in a case where the insufficient ratio of the measurement machine at the measurement station is greater than 0, determining the process element associated with the lot of products whose previous measurement time is closest to the current moment, and reducing the preset measurement ratio of the process element associated with the lot of products whose previous measurement time is closest to the current moment by a second preset value. ### Claim 7 (depends on 1) The sampling measurement method according to claim 1, wherein the each process element in the process station comprise a process machine, a process chamber, or a process type. ### Claim 8 A computer device, comprising: a memory storing a computer program; and a processor configured to execute the computer program stored in the memory, wherein when executing the computer program, the processor is configured to: acquire a preset measurement ratio of each process element in a process station; acquire an actual measurement ratio of a process element associated with a lot of products to be measured that arrive at a measurement station in the process station; in a case where the actual measurement ratio of the process element associated with the lot of products to be measured is less than a corresponding preset measurement ratio, control a measurement machine at the measurement station to measure the lot of products to be measured; acquire an idle ratio of the measurement machine at the measurement station; and in a case where the idle ratio of the measurement machine at the measurement station is greater than 0, determine a process element associated with the lot of products whose previous measurement time is furthest from a current moment, and increase the preset measurement ratio of the process element associated with the lot of products whose previous measurement time is furthest from the current moment by a first preset value. ### Claim 9 (depends on 8) The computer device according to claim 8, wherein when acquiring the actual measurement ratio of the process element associated with the lot of products to be measured that arrive at the measurement station in the process station, the processor is configured to: determine the process element associated with the lot of products to be measured according to process flow information on the lot of products to be measured; acquire a first lot number of the lot of products that are associated with the process element associated with the lot of products to be measured, passed through the measurement station and have been measured; acquire a second lot number of the lot of products that are associated with the process element associated with the lot of products to be measured, passed through the measurement station and remain unmeasured; and determine the actual measurement ratio of the process element associated with the lot of products to be measured according to the first lot number and the second lot number. ### Claim 10 (depends on 9) The computer device according to claim 9, wherein the actual measurement ratio of the process element associated with the lot of products to be measured satisfies a following relational formula: CR=M/(M+N); wherein CR represents the actual measurement ratio of the process element associated with the lot of products to be measured, M represents the first lot number, and N represents the second lot number. ### Claim 11 (depends on 8) The computer device according to claim 8, wherein the processor is further configured to: in a case where the actual measurement ratio of the process element associated with the lot of products to be measured is greater than or equal to the corresponding preset measurement ratio, control the measurement machine at the measurement station not to measure the lot of products to be measured. ### Claim 12 (depends on 8) The computer device according to claim 8, wherein the processor is further configured to: in a case where the actual measurement ratio of the process element associated with the lot of products to be measured is greater than or equal to the corresponding preset measurement ratio, acquire the idle ratio of the measurement machine at the measurement station; and in a case where the idle ratio of the measurement machine at the measurement station is greater than 0, control the measurement machine at the measurement station to measure the lot of products to be measured. ### Claim 13 (depends on 8) The computer device according to claim 8, wherein the processor is further configured to: acquire an insufficient ratio of the measurement machine at the measurement station; and in a case where the insufficient ratio of the measurement machine at the measurement station is greater than 0, determine the process element associated with the lot of products whose previous measurement time is closest to the current moment, and reduce the preset measurement ratio of the process element associated with the lot of products whose previous measurement time is closest to the current moment by a second preset value. ### Claim 14 (depends on 8) The computer device according to claim 8, wherein the each process element in the process station comprise a process machine, a process chamber, or a process type. ### Claim 15 A non-transitory computer-readable storage medium having a computer program stored thereon, wherein when the computer program is executed by a processor, the computer program causes the processor to: acquire a preset measurement ratio of each process element in a process station; acquire an actual measurement ratio of a process element associated with a lot of products to be measured that arrive at a measurement station in the process station; in a case where the actual measurement ratio associated with the lot of products to be measured is less than a corresponding preset measurement ratio, control a measurement machine at the measurement station to measure the lot of products to be measured; acquire an idle ratio of the measurement machine at the measurement station; and in a case where the idle ratio of the measurement machine at the measurement station is greater than 0, determine a process element associated with the lot of products whose previous measurement time is furthest from a current moment, and increase the preset measurement ratio of the process element associated with the lot of products whose previous measurement time is furthest from the current moment by a first preset value.