Vibration rectification error correction device, sensor module, and vibration rectification error correction method
AssigneeSeiko Epson Corporation
InventorMasayoshi Todorokihara
Life of this patent
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Abstract
A vibration rectification error correction device includes a first filter that operates in synchronization with the measured signal, and a second filter that operates in synchronization with the reference signal, in which the first filter generates a third signal based on a first signal having a first group delay amount and a second signal having a second group delay amount, the second filter receives a signal based on the third signal and outputs a fourth signal, and a first vibration rectification error and a second vibration rectification error have different polarities.
Claims11
A vibration rectification error correction device comprising:
- a reference signal generation circuit that outputs a reference signal;
- a frequency delta-sigma modulation circuit that performs frequency delta-sigma modulation on the reference signal by using a measured signal to generate a frequency delta-sigma modulated signal;
- a first filter that operates in synchronization with the measured signal;
- and
- a second filter that operates in synchronization with the reference signal, wherein
- the first filter generates a third signal based on a first signal having a first group delay amount based on the frequency delta-sigma modulated signal and a second signal having a second group delay amount different from the first group delay amount based on the frequency delta-sigma modulated signal,
- the second filter receives a signal based on the third signal and outputs a fourth signal, and
- a first vibration rectification error included in a fifth signal output from the second filter when the first signal is input to the second filter and a second vibration rectification error included in a sixth signal output from the second filter when the second signal is input to the second filter have different polarities.
A vibration rectification error correction method comprising:
- performing frequency delta-sigma modulation on a reference signal by using a measured signal to generate a frequency delta-sigma modulated signal;
- performing a first filtering process on a signal based on the frequency delta-sigma modulated signal in synchronization with the measured signal to generate a third signal based on a first signal having a first group delay amount based on the frequency delta-sigma modulated signal, and a second signal having a second group delay amount different from the first group delay amount based on the frequency delta-sigma modulated signal;
- and
- performing a second filtering process on a signal based on the third signal in synchronization with the reference signal to generate a fourth signal, wherein
- a first vibration rectification error included in a fifth signal generated when the second filtering process is performed on the first signal and a second vibration rectification error included in a sixth signal generated when the second filtering process is performed on the second signal have different polarities.
Dependencies are inferred from the claim text.