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US 12,000,772 B2Granted
Detector cell for a photoacoustic gas sensor and photoacoustic gas sensor
AssigneeInfineon Technologies AG
InventorsTobias Mittereder, Christoph Glacer
Life of this patent
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Abstract
A detector cell for a photoacoustic gas sensor comprises a first layer structure, a second layer structure arranged at the first layer structure and comprising a membrane structure, and a third layer structure arranged at the second layer structure. The first layer structure and the third layer structure hermetically enclose a cavity, wherein the membrane structure is arranged in the cavity.
Claims26
A detector cell for a photoacoustic gas sensor comprising:
- a first layer structure having a continuous planar top surface and a continuous planar bottom surface parallel to each other;
- a second layer structure arranged at the first layer structure and comprising a membrane structure;
- and
- a third layer structure arranged at the second layer structure;
- wherein the first layer structure and the third layer structure hermetically enclose a cavity and wherein the membrane structure is arranged in the cavity, and wherein the cavity is formed by voids located in the second layer structure and the third layer structure and the continuous planar top surface forms an interior surface of the cavity, and
- wherein a surface reflective for electromagnetic radiation is arranged at a surface of the first layer structure facing the membrane structure or at a surface of the third layer structure facing the membrane structure.
3 more elements
A chip-scaled packaged photoacoustic gas sensor comprising:
- a detector cell having a membrane structure inside a detector cell cavity;
- a first sub-cavity of the detector cell cavity at a first side of the membrane structure;
- a second sub-cavity of the detector cell cavity at a second, opposing side of the membrane structure;
- and
- an electromagnetic source configured for emitting an electromagnetic radiation so as to excite a movement of the membrane structure based on an asymmetric energy absorption of an electromagnetic radiation in the first sub-cavity and the second sub-cavity, wherein the detector cell comprises:
- a first layer structure having a continuous planar top surface and a continuous planar bottom surface parallel to each other;
- a second layer structure arranged at the first layer structure and comprising a membrane structure;
- and
- a third layer structure arranged at the second layer structure;
- wherein the first layer structure and the third layer structure hermetically enclose the detector cell cavity, and wherein the first sub-cavity and the second sub-cavity are formed by voids located in the second layer structure and the third layer structure and the continuous planar top surface forms an interior surface of the detector cell cavity;
- and
- wherein a surface reflective for electromagnetic radiation is arranged at a surface of the first layer structure facing the membrane structure or at a surface of the third layer structure facing the membrane structure.
9 more elements
A method for manufacturing a detector cell, the method comprising:
- providing a first layer structure having a continuous planar top surface and a continuous planar bottom surface parallel to each other;
- attaching a second layer structure having a membrane structure at the first layer structure;
- and
- attaching a third layer structure at the second layer structure,
- wherein the first layer structure and the third layer structure hermetically enclose a cavity, wherein the membrane structure is arranged in the cavity, and wherein the cavity is formed by voids located in the second layer structure and the third layer structure and the continuous planar top surface forms an interior surface of the cavity, and
- wherein a surface reflective for electromagnetic radiation is arranged at a surface of the first layer structure facing the membrane structure or at a surface of the third layer structure facing the membrane structure.
3 more elements
Dependencies are inferred from the claim text.