# US 12,000,728 B2 · Asymmetrical ultrasound transducer array

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- Number: US 12,000,728 B2
- Document ID: US12000728B2
- Status: Granted
- Kind: B2
- Application number: 17/395,171
- Filed: 2021-08-05
- Published: 2021-11-25
- Granted: 2024-06-04
- Earliest claimed: 2018-04-11
- Assignees: Exo Imaging, Inc.
- Applicants: Exo Imaging, Inc.
- Inventors: Sandeep Akkaraju; Haesung Kwon; Brian Bircumshaw
- Web page: https://patentgrep.com/patent/US12000728B2

## CPC

- G01H 11/08: using piezoelectric devices
- B06B 1/0292: {Electrostatic transducers, e.g. electret-type}
- B06B 1/0603: {using a piezoelectric bender, e.g. bimorph}
- B06B 1/0622: {on one surface}
- G01N 29/07: by measuring propagation velocity or propagation time of acoustic waves
- G01S 7/5208: {with integration of processing functions inside probe or scanhead}
- G01S 15/02: using reflection of acoustic waves (G01S15/66 takes precedence)
- G01S 15/8925: {the array being a two-dimensional transducer configuration, i.e. matrix or orthogonal linear arrays}
- H10N 30/302: {Sensors}
- H10N 30/852: {Composite materials, e.g. having 1-3 or 2-2 type connectivity}
- A61B 2562/028: Microscale sensors, e.g. electromechanical sensors [MEMS]
- A61B 2562/125: characterised by the manufacture of electrodes
- B81B 3/0021: {Transducers for transforming electrical into mechanical energy or vice versa (dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00)}
- G01H: MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- B06B: METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, {e.g.} FOR PERFORMING MECHANICAL WORK IN GENERAL (for particular applications, see the relevant subclasses, e.g. B07B1/40, B23Q17/12, B24B31/06; measurement of mechanical vibrations G01H; in direction finding, locating, distance or velocity measuring G01S; {generating seismic energy G01V1/02}; control of mechanical vibrations in general G05D; sound-producing devices, e.g. bells, sirens, whistles G10K, {e.g. methods or devices for transmitting, conducting, or directing sound in general G10K11/00}; generation of electrical oscillations H03B; electromechanical resonators in general H03H; electromechanical transducers {for communication techniques, e.g. microphones, speakers} H04R)
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D)
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)

## Abstract

An array of micromachined ultrasonic transducers (MUTs). The array has first and second rows, the MUTs in the first row being equally spaced by a horizontal pitch in a horizontal direction, the MUTs in the second row being equally spaced by the horizontal pitch in the horizontal direction. The MUTs in the second row are shifted along the horizontal direction by a first horizontal distance relative to the MUTs in the first row and shifted along a vertical direction by a first vertical distance relative to the MUTs in the first row. The first horizontal distance is greater than zero and less than the horizontal pitch. The first vertical distance ranges from one tenth of a horizontal width of a MUT to a half of a vertical height of a MUT.

## Claims

### Claim 1

A transducer array, comprising:
a plurality of micromachined ultrasonic transducers (MUTs) in a staggered arrangement, wherein a perimeter of each micromachined ultrasonic transducer (MUT) comprises at least one straight edge, and wherein the straight edges of the MUTs are oriented at a plurality of orientations relative to a vertical axis.

### Claim 2 (depends on 1)

The transducer array of claim 1, wherein a dimension of a MUT in one direction is larger than a dimension of the MUT in another direction.

### Claim 3 (depends on 1)

The transducer array of claim 1, wherein a center-to-center distance between the plurality of MUTs in one direction is different from a center-to-center distance between the plurality of MUTs in another direction.

### Claim 4 (depends on 1)

The transducer array of claim 1, wherein the plurality of MUTs has a smaller mutual impedance than a separate plurality of MUTs in a symmetric arrangement.

### Claim 5 (depends on 1)

The transducer array of claim 1, wherein the plurality of MUTs has one or more additional vibrational modes, compared to a separate plurality of MUTs in a symmetric arrangement.

### Claim 6 (depends on 1)

The transducer array of claim 1, wherein each MUT of the plurality of MUTs has an elongated shape that supports one or more modes of vibration in a flexural mode of operation.

### Claim 7 (depends on 1)

The transducer array of claim 1, wherein sidelobe amplitudes of a beam generated by the plurality of MUTs are lower than sidelobe amplitudes of a beam generated by a plurality of MUTs in a symmetric arrangement.

### Claim 8 (depends on 1)

The transducer array of claim 1, wherein a bandwidth of the plurality of MUTs is wider than a bandwidth of a plurality of MUTs in a non-staggered arrangement.

### Claim 9 (depends on 1)

The transducer array of claim 1, wherein each of the plurality of MUTs performs at least one of transmitting an ultrasonic wave and receiving an ultrasonic wave.

### Claim 10 (depends on 1)

The transducer array of claim 1, wherein each of the plurality of MUTs operates in at least one of a symmetric vibrational mode and an asymmetric vibrational mode.

### Claim 11 (depends on 1)

The transducer array of claim 1, wherein the perimeter of each MUT comprises a pair of straight edges.

### Claim 12 (depends on 11)

The transducer array of claim 11, wherein the pair of straight edges are parallel relative to each other.

### Claim 13 (depends on 1)

The transducer array of claim 1, wherein the perimeter of each MUT comprises a first pair of straight edges and a second pair of straight edges.

### Claim 14 (depends on 13)

The transducer array of claim 13, wherein the first pair of straight edges are parallel relative to each other, and wherein the second pair of straight edges are parallel relative to each other.

### Claim 15 (depends on 14)

The transducer array of claim 14, wherein the first pair of straight edges and the second pair of straight edges intersect at right-angles.

### Claim 16 (depends on 13)

The transducer array of claim 13, wherein a pair of straight edges of a first transducer are parallel relative to a pair of straight edges of a second transducer in the transducer array.

### Claim 17 (depends on 16)

The transducer array of claim 16, wherein the first transducer is adjacent to the second transducer.

### Claim 18 (depends on 13)

The transducer array of claim 13, wherein a pair of straight edges of a first transducer are skew relative to a pair of straight edges of another transducer in the transducer array.

### Claim 19

A transducer array, comprising:
a plurality of micromachined ultrasonic transducers (MUTs) in a staggered arrangement, wherein each MUT of a first row of MUTs comprises a first straight edge extending substantially in a vertical direction, and wherein each MUT of a second row of MUTs comprises a second straight edge extending substantially in the vertical direction, the first straight edges being rotated with respect to the vertical direction relative to the second straight edges.

### Claim 20 (depends on 19)

The transducer array of claim 19, wherein a dimension of a MUT in a first direction is larger than a dimension of the MUT in a second direction.

### Claim 21 (depends on 19)

The transducer array of claim 19, wherein each of the plurality of MUTs has a uniform width along a transverse axis, and wherein the transverse axis is oriented lengthwise through the MUT and passes through a midpoint of the MUT.

### Claim 22 (depends on 19)

The transducer array of claim 19, wherein each MUT comprises at least one set of straight edges that are parallel relative to each other.

### Claim 23 (depends on 22)

The transducer array of claim 22, wherein the at least one set of straight edges of a first MUT of the array extends at an angle relative to the at least one set of straight edges of a second MUT of the array.
