# US 12,000,487 B2 · System and apparatus having a seal member for sealing of a device under test > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,000,487 B2 - Document ID: US12000487B2 - Status: Granted - Kind: B2 - Application number: 17/895,104 - Filed: 2022-08-25 - Published: 2024-02-29 - Granted: 2024-06-04 - Earliest claimed: 2022-08-25 - Assignees: Intel Corporation - Applicants: Intel Corporation - Inventors: Paul Diglio; Craig Yost; Christopher Wade Ackerman - Web page: https://patentgrep.com/patent/US12000487B2 ## CPC - F16J 15/18: with stuffing-boxes for elastic or plastic packings - F16J 15/328: Manufacturing methods specially adapted for elastic sealings (moulding B29C) - F16J 15/106: {homogeneous} - G01R 31/2874: {related to temperature} - F16J: PISTONS {(specially adapted for dampers F16F9/32)}; CYLINDERS; SEALINGS - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract The present disclosure is directed to a system having a first loading component and a second loading component for applying load to a device during a test of the device, the first loading component is configured to be moveable with respect to the second loading component. The system includes a seal member arranged between the first loading component and the second loading component, the seal member is adapted to engage the device during testing so as to apply a load against the device during testing and provide sealing around a cavity positioned below the first loading component and above the device. ## Claims ### Claim 1 A system, comprising: a thermal head comprising a first loading component and a second loading component for applying load to a device during a test of the device, wherein the first loading component and second loading component are each positioned above the device and configured to be moveable with respect to the device and to one another; and a seal member arranged between the first loading component and the second loading component, the seal member is adapted to directly engage the device, the first loading component, and the second loading component during testing so as to apply a load against the device during testing and to provide sealing around a cavity positioned below the first loading component and above the device. ### Claim 2 (depends on 1) The system of claim 1, wherein the seal member comprises first and second opposing surfaces, the second surface is slanted at an angle, with respect to a longitudinal axis extending between the first and second surfaces, and directly engages with a surface of the second loading component, and the first surface of the seal member is adapted to directly engage the device during testing. ### Claim 3 (depends on 2) The system of claim 2, wherein the seal member comprises first and second opposing sidewalls, the first sidewall comprises a substantially planar first side portion to facilitate vertical movement of the first loading component with respect to a top surface of the device during testing, and the second sidewall comprises a slanted side portion with respect to the planar first side portion of the first sidewall. ### Claim 4 (depends on 3) The system of claim 3, wherein the seal member comprises a lip portion adapted to mate with a mechanical retention portion in the second loading component to enable the seal member to be retained in place between the first loading component and the second loading component when the first loading component moves. ### Claim 5 (depends on 4) The system of claim 4, wherein the slanted side portion of the second sidewall adjoins the first surface to form the lip portion of the seal member. ### Claim 6 (depends on 4) The system of claim 4, wherein the seal member comprises a lower section beneath an upper section, wherein the first surface is positioned at the lower section and the lip portion is positioned at the upper section, the lower section has a width that is smaller than a maximum width of the upper section to facilitate expansion and retention of the seal member. ### Claim 7 (depends on 3) The system of claim 3, wherein the first side portion of the first sidewall is substantially co-planar with a first sidewall of the second loading component to facilitate movement of the first loading component. ### Claim 8 (depends on 1) The system of claim 1, wherein the seal member is configured as a ring surrounding the first loading component and is at least partially integrated with the second loading component. ### Claim 9 (depends on 1) The system of claim 1, wherein the seal member is an elastomeric seal, and is formed of silicon rubber, nitrile, polyurethane, polytetrafluoroethylene, or combinations thereof. ### Claim 10 (depends on 1) The system of claim 1, wherein the device comprises a die mounted on a package, and the seal member extends from the second loading component to contact the device during testing along one of package surfaces, including the die, a stiffener, a substrate, an underfill or other components of the device. ### Claim 11 (depends on 10) The system of claim 10, wherein the first loading component is an inner loading mechanism for loading of the die and the second loading component is an outer loading mechanism for loading of the package of the device during testing. ### Claim 12 A device test apparatus, comprising: a thermal head comprising first and second loading components for applying load to a device during a test of the device, wherein the first loading component and second loading component are each positioned above the device and configured to be moveable with respect to the device and to each other loading component; one or more fluid channels extending through the first loading component to permit flow of fluid from an external source to a cavity positioned below the first loading component and above the device; a seal member arranged between the first loading component and the second loading component, the seal member engaging the first loading component and the second loading component, the seal member is adapted to directly engage the device, the first loading component and the second loading component during testing so as to apply a load against the device during testing and provide sealing around the cavity; a test socket adapted to connect to a die of the device during testing; and a controller adapted to drive the testing of the die through the test socket. ### Claim 13 (depends on 12) The device test apparatus of claim 12, wherein the seal member comprises first and second opposing surfaces, the second surface is slanted at an angle with respect to a longitudinal axis extending between the first and second surfaces, and directly engages with a surface of the second loading component, and the first surface of the seal member is adapted to directly engage the device during testing. ### Claim 14 (depends on 13) The device test apparatus of claim 13, wherein the seal member comprises first and second opposing sidewalls, the first sidewall comprises a substantially planar first side portion to facilitate vertical movement of the first loading component with respect to a top surface of the device during testing, and the second sidewall comprises a slanted side portion with respect to the planar first side portion of the first sidewall. ### Claim 15 (depends on 14) The device test apparatus of claim 14, wherein the seal member comprises a lip portion adapted to mate with a mechanical retention portion in the second loading component to enable the seal member to be retained in place between the first loading component and the second loading component when the first loading component moves. ### Claim 16 (depends on 15) The device test apparatus of claim 15, wherein the slanted portion of the second sidewall adjoins the first surface to form the lip portion of the seal member. ### Claim 17 A method, comprising: positioning a seal member against a device under test to provide sealing around a cavity below a first loading component and above the device, wherein the seal member is arranged between the first loading component and a second loading component, wherein the first loading component and the second loading component are each arranged above the device and movable with respect to the device and to one another; moving the second loading component with respect to the first loading component at a time while the first loading component is stationary over the device under test; contacting directly with the seal member the device, the first loading component and the second loading component by the moving of the second loading component; and performing, during the contacting, a test operation on the device. ### Claim 18 (depends on 17) The method of claim 17, wherein the movement of the second loading component is towards the device under test in a vertical direction relative to the device under test, wherein the movement also causes the seal member to directly engage a surface of the first loading component along the vertical direction to provide part of the sealing around the cavity. ### Claim 19 (depends on 17) The method of claim 17, wherein the seal member comprises first and second opposing surfaces, the second surface is slanted at an angle with respect to a longitudinal axis extending between the first and second surfaces, and directly engages with a surface of the second loading component, and the first surface of the seal member is adapted to directly engage the device during testing. ### Claim 20 (depends on 19) The method of claim 19, wherein the seal member comprises first and second opposing sidewalls, the first sidewall comprises a substantially planar first side portion to facilitate vertical movement of the first loading component with respect to a top surface of the device during testing, and the second sidewall comprises a slanted side portion with respect to the planar first side portion of the first sidewall.