# US 12,000,059 B2 · Apparatus and methods for controlled electrochemical surface modification

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- Number: US 12,000,059 B2
- Document ID: US12000059B2
- Status: Granted
- Kind: B2
- Application number: 16/467,392
- Filed: 2017-12-11
- Published: 2020-03-19
- Granted: 2024-06-04
- Earliest claimed: 2016-12-09
- Assignees: Manufacturing Systems Limited
- Applicants: Manufacturing Systems Limited
- Inventors: Ali Hosseini; Ashton Partridge
- Web page: https://patentgrep.com/patent/US12000059B2

## CPC

- C25D 5/02: Electroplating of selected surface areas
- C25D 3/50: of platinum group metals
- C25D 7/00: Electroplating characterised by the article coated
- G01N 27/30: Electrodes, e.g. test electrodes; Half-cells (G01N27/414 takes precedence)
- G01N 27/3275: {Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction}
- G01N 27/3278: {involving nanosized elements, e.g. nanogaps or nanoparticles (nanopores G01N33/48721; magnetic beads G01N27/745)}
- G01N 27/27: Association of two or more measuring systems or cells, each measuring a different parameter, where the measurement results may be either used independently, the systems or cells being physically associated, or combined to produce a value for a further parameter
- G01N 27/327: Biochemical electrodes {, e.g. electrical or mechanical details for in vitro measurements}
- Y02E 60/50: Fuel cells
- C25D: PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

## Abstract

Disclosed are electrode arrays and methods of focusing charge density (voltage or current) at a functional surface on electrode arrays. An example method comprises: a. providing an electrode array comprising: i. a support substrate; ii. at least one surface structure protruding from an upper surface of the support substrate wherein the surface structure includes an electrode layer; iii. a functional surface on the electrode layer, wherein the functional surface is on an upper portion of the at least one surface structure and wherein the functional surface is adapted to contact an active species in a conductive solution; b. exposing the surface structure to the conductive solution comprising an active species, in which a counter electrode is positioned; c. establishing a current or voltage between the functional surface on the electrode layer and the counter electrode such that the charge density is focussed at the functional surface on the electrode layer.

## Claims

### Claim 1

A method of focusing charge density at a functional surface on an electrode array and electrochemically modifying an active species in a conductive solution exposed to the electrode array, the method comprising the steps of:
a. providing an electrode array, wherein:
i. the electrode array comprises a support substrate;
ii. the electrode array comprises a plurality of surface structures protruding from an upper surface of the support substrate, wherein the plurality of surface structures include an electrode layer; and
iii. the plurality of surface structures have a plurality of functional surfaces, each of the plurality of surface structures having a functional surface on the electrode layer, wherein each functional surface is on an upper portion of a surface structure of the plurality of surface structures, wherein each functional surface is adapted to contact an active species in a conductive solution, and wherein the plurality of functional surfaces are electrically connected via the electrode layer to form a functional grouping;
b. exposing the plurality of surface structures to the conductive solution comprising an active species, in which a counter electrode is positioned; and
c. establishing a current or voltage between the plurality of functional surfaces on the electrode layer and the counter electrode such that the charge density is focussed at the plurality of functional surfaces on the electrode layer and the active species is electrochemically modified following contact with the plurality of functional surfaces;
wherein the active species comprises a species and wherein the species is selectively attached to the plurality of functional surfaces following the electrochemical modification, the size of each functional surface being variable depending upon the focussed charge density, and each functional surface being a region where attachment occurs at a faster kinetic rate when compared to another surface on the electrode array at which charge density is not focused; and
wherein the electrode array comprises a first binding layer covering the functional surface and at least part of the plurality of surface structures and the support substrate of the electrode array, wherein the step of establishing the current or voltage between the electrode layer and the counter electrode results in selective removal of the first binding layer from the functional surface compared to the plurality of surface structures and the support substrate of the electrode array.

### Claim 2 (depends on 1)

The method of claim 1, wherein the functional surface is at or about an apex of each of the plurality of surface structures.

### Claim 3 (depends on 1)

The method of claim 1, wherein the functional surface is at or about an apex of each of the plurality of surface structures, and wherein the width of the apex of each surface structure is between about 1 nm to about 50 μm and the width of each surface structure where it joins the support substrate is between about 20 nm to about 5000 μm and wherein the width at the apex of each surface structure is less than the width of that surface structure where it joins the support substrate.

### Claim 4 (depends on 1)

The method of claim 1, wherein the functional surface is at or about an apex of each of the plurality of surface structures and wherein the apexes of the surface structures are separated from each other by about 50 nm to about 1000 μm apex to apex.

### Claim 5 (depends on 1)

The method of claim 1, wherein the surface structures are pyramidical, conical, ridges, or combinations thereof.

### Claim 6 (depends on 1)

The method of claim 1, wherein the counter electrode structure is flat, pyramidical, conical, or ridged.

### Claim 7 (depends on 1)

The method of claim 1, wherein the functional surface and the upper surface of the support substrate are formed from the same material and, wherein when electrochemical activity of the electrochemical modification is focussed at the functional surface, the charge density is differentiated between the functional surface and the upper surface of the support substrate.

### Claim 8 (depends on 1)

The method of claim 1, wherein the functional surface is formed of a catalytic material which is activated via electrochemical modification via the current or voltage between the electrode layer and the counter electrode.

### Claim 9 (depends on 8)

The method of claim 8, wherein the catalytic material is Pt, Au, Ni, or a mixture of any two or more thereof.

### Claim 10 (depends on 1)

The method of claim 1, wherein the active species in the conductive solution comprises a catalyst, wherein the catalyst is activated via electrochemical modification following contact with the functional surface to yield an activated catalyst.

### Claim 11 (depends on 10)

The method of claim 10, wherein the catalyst is selected from metallic and/or organometallic materials.

### Claim 12 (depends on 11)

The method of claim 11, wherein the metallic materials are one or more of Pt, Au and Ni, and wherein the organometallic material is one or more of ferrocene or phenanthroline, porphyrin, imidazole, tris pyridyl amine, or triazole, with a transition metal.

### Claim 13 (depends on 12)

The method of claim 12, wherein the transition metal is Ru, Fe, Mn, Mg, Cu, Ir, Co, Pt, Pd, Au, Ag, Mg, or a mixture of any two or more thereof.

### Claim 14 (depends on 1)

The method of claim 1, further comprising a step of selective deposition of a further binding layer on the functional surface which has undergone selective removal of the first binding layer.

### Claim 15 (depends on 1)

The method of claim 1, wherein the active species is a charged particle.

### Claim 16 (depends on 15)

The method of claim 15, wherein the charged particle is one or more metal ion(s).

### Claim 17 (depends on 1)

The method of claim 1, wherein the electrode array comprises a passivating layer between the plurality of surface structures selected from the group consisting of a cross-linked polymer, a photo-resist, a self-assembled mono-layer (SAM), an epoxy-based negative photoresist, and SU-8.

### Claim 18 (depends on 1)

The method of claim 1, wherein the counter electrode is in a fixed orientation with respect to the plurality of surface structures.

### Claim 19 (depends on 1)

The method of claim 1, wherein the counter electrode is oriented above an upper surface of the electrode array such that a distance from the counter electrode to an apex of each of the plurality of surface structures is substantially equidistant.

### Claim 20 (depends on 1)

The method of claim 1, further comprising pulsing the current or voltage established between the electrode layer and the counter electrode between an activating potential and an inactivating potential, wherein the activating potential is a first voltage that initiates a reaction, and wherein the inactivating potential is a second voltage that stops the reaction.

### Claim 21

A method of focusing charge density at a functional surface on an electrode array and electrochemically modifying an active species in a conductive solution exposed to the electrode array, the method comprising the steps of:
a. providing an electrode array, wherein:
i. the electrode array comprises a support substrate;
ii. the electrode array comprises a plurality of surface structures protruding from an upper surface of the support substrate, wherein the plurality of surface structures include an electrode layer; and
iii. the plurality of surface structures have a plurality of functional surfaces, each of the plurality of surface structures having a functional surface on the electrode layer, wherein each functional surface is on an upper portion of a surface structure of the plurality of surface structures, wherein each functional surface is adapted to contact an active species in a conductive solution, and wherein the plurality of functional surfaces are electrically connected via the electrode layer to form a functional grouping;
b. exposing the plurality of surface structures to the conductive solution comprising an active species, in which a counter electrode is positioned; and
c. establishing a current or voltage between the plurality of functional surfaces on the electrode layer and the counter electrode such that the charge density is focussed at the plurality of functional surfaces on the electrode layer and the active species is electrochemically modified following contact with the plurality of functional surfaces;
wherein the active species comprises a species and wherein the species is selectively attached to the plurality of functional surfaces following the electrochemical modification, the size of each functional surface being variable depending upon the focussed charge density, and each functional surface being a region where attachment occurs at a faster kinetic rate when compared to another surface on the electrode array at which charge density is not focused; and
wherein the electrode array comprises a binding layer and wherein the binding layer is either present on the functional surface on the surface structure at an increased density than at a non-functional surface on the electrode array; or present on a non-functional surface of the electrode array at a significantly increased density than at a position on the functional surface on the surface structure; as a result of the selective attachment of the species of the functional surface.

### Claim 22 (depends on 21)

The method of claim 21, wherein the functional surface is at or about an apex of each of the plurality of surface structures.

### Claim 23 (depends on 21)

The method of claim 21, wherein the functional surface is at or about an apex of each of the plurality of surface structures, and wherein the width of the apex of each surface structure is between about 1 nm to about 50 μm and the width of each surface structure where it joins the support substrate is between about 20 nm to about 5000 μm and wherein the width at the apex of each surface structure is less than the width of that surface structure where it joins the support substrate.

### Claim 24 (depends on 21)

The method of claim 21, wherein the functional surface is at or about an apex of each of the plurality of surface structures and wherein the apexes of the surface structures are separated from each other by about 50 nm to about 1000 μm apex to apex.

### Claim 25 (depends on 21)

The method of claim 21, wherein the surface structures are pyramidical, conical, ridges, or combinations thereof.

### Claim 26 (depends on 21)

The method of claim 21, wherein the counter electrode structure is flat, pyramidical, conical, or ridged.

### Claim 27 (depends on 21)

The method of claim 21, wherein the functional surface and the upper surface of the support substrate are formed from the same material and, wherein when electrochemical activity of the electrochemical modification is focussed at the functional surface, the charge density is differentiated between the functional surface and the upper surface of the support substrate.

### Claim 28 (depends on 21)

The method of claim 21, wherein the functional surface is formed of a catalytic material which is activated via electrochemical modification via the current or voltage between the electrode layer and the counter electrode.

### Claim 29 (depends on 28)

The method of claim 28, wherein the catalytic material is Pt, Au, Ni, or a mixture of any two or more thereof.

### Claim 30 (depends on 21)

The method of claim 21, wherein the active species in the conductive solution comprises a catalyst, wherein the catalyst is activated via electrochemical modification following contact with the functional surface to yield an activated catalyst.

### Claim 31 (depends on 30)

The method of claim 30, wherein the catalyst is selected from metallic and/or organometallic materials.

### Claim 32 (depends on 31)

The method of claim 31, wherein the metallic materials are one or more of Pt, Au and Ni, and wherein the organometallic material is one or more of ferrocene or phenanthroline, porphyrin, imidazole, tris pyridyl amine, or triazole, with a transition metal.

### Claim 33 (depends on 32)

The method of claim 32, wherein the transition metal is Ru, Fe, Mn, Mg, Cu, Ir, Co, Pt, Pd, Au, Ag, Mg, or a mixture of any two or more thereof.

### Claim 34 (depends on 21)

The method of claim 21, further comprising a step of selective deposition of a further binding layer on the functional surface which has undergone selective removal of the first binding layer.

### Claim 35 (depends on 21)

The method of claim 21, wherein the active species is a charged particle.

### Claim 36 (depends on 35)

The method of claim 35, wherein the charged particle is one or more metal ion(s).

### Claim 37 (depends on 21)

The method of claim 21, wherein the electrode array comprises a passivating layer between the plurality of surface structures selected from the group consisting of a cross-linked polymer, a photo-resist, a self-assembled mono-layer (SAM), an epoxy-based negative photoresist, and SU-8.

### Claim 38 (depends on 21)

The method of claim 21, wherein the counter electrode is in a fixed orientation with respect to the plurality of surface structures.

### Claim 39 (depends on 21)

The method of claim 21, wherein the counter electrode is oriented above an upper surface of the electrode array such that a distance from the counter electrode to the apex of each of the plurality of surface structures is substantially equidistant.

### Claim 40 (depends on 21)

The method of claim 21, further comprising pulsing the current or voltage established between the electrode layer and the counter electrode between an activating potential and an inactivating potential, wherein the activating potential is a first voltage that initiates a reaction, and wherein the inactivating potential is a second voltage that stops the reaction.