# US 12,000,039 B1 · Cleaning anti-reflective coating process chamber parts

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- Number: US 12,000,039 B1
- Document ID: US12000039B1
- Status: Granted
- Kind: B1
- Application number: 18/486,746
- Filed: 2023-10-13
- Granted: 2024-06-04
- Earliest claimed: 2023-10-13
- Applicants: Michael Walach; Gregory Boruta
- Inventors: Michael Walach; Gregory Boruta
- Web page: https://patentgrep.com/patent/US12000039B1

## CPC

- C23C 16/4401: {Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber}
- A47L 7/0071: {with containers for ash, soot, contaminant or harmful materials (suction devices for removing ashes F23J1/02)}
- B08B 5/04: Cleaning by suction, with or without auxiliary action
- B08B 7/02: by distortion, beating, or vibration of the surface to be cleaned {(B08B7/0007 takes precedence)}
- B08B 13/00: Accessories or details of general applicability for machines or apparatus for cleaning
- B08B 15/023: {Fume cabinets or cupboards, e.g. for laboratories}
- C23C 16/4407: {Cleaning of reactor or reactor parts by using wet or mechanical methods}
- B29D 11/00009: {Production of simple or compound lenses}
- B29D 11/00865: {Applying coatings; tinting; colouring (printing, marking or copying processes B41M; identification in general G09F3/00; producing decorative effects in general B44C; positioning or marking of lenses B24B13/0055)}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- A47L: DOMESTIC WASHING OR CLEANING (brushes A46B; cleaning quantities of bottles or of other hollow articles of one kind B08B9/00; laundry D06F); SUCTION CLEANERS IN GENERAL (cleaning in general B08)
- B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B29D: PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE (making granules B29B9/00; making preforms B29B11/00)

## Abstract

A cleaning booth has a handheld blaster, which emits a pulsed electromagnetic wave that is produced by a wave source. A fiber-optic cable feeds the wave from the source to the blaster. An operator can aim the blaster toward a part that rests on a movable table in the booth. When the operator actuates the wave source, a radiation beam from the blaster ablates anti-reflective coating residue from the part. The cleaning operation can be performed in a same room as the anti-reflective coating process equipment.

## Claims

### Claim 1

A system for coating ophthalmic lenses with anti-reflective coating, the system comprising:
a room that contains at least:
an anti-reflective coating process chamber; and
apparatus for removing anti-reflective coating residue from anti-reflective coating process chamber parts, the apparatus comprising:
an enclosure;
an electromagnetic wave source;
a trigger operable to actuate the electromagnetic wave source;
a blaster connected to the electromagnetic wave source by a fiber-optic cable for feeding electromagnetic radiation from the electromagnetic wave source through the blaster;
a table movably mounted within the enclosure;
one or more motors operable for moving the table; and
one or more control panels configured to control the electromagnetic wave source and/or the motors.

### Claim 2 (depends on 1)

The system of claim 1, wherein the one or more control panels are operable to actuate the one or more motors to move the table into and out of the enclosure.

### Claim 3 (depends on 1)

The system of claim 1, wherein the one or more control panels are operable to actuate the one or more motors to rotate the table inside the enclosure.

### Claim 4 (depends on 1)

The system of claim 1, wherein the one or more control panels are operable to adjust one or more of beam width, intensity, or pulse length of the electromagnetic wave source.

### Claim 5 (depends on 1)

The system of claim 1, further comprising a protective fabric lining at least a portion of the enclosure.

### Claim 6 (depends on 5)

The system of claim 5, wherein the protective fabric is non-reflective and fire retardant.

### Claim 7 (depends on 6)

The system of claim 6, wherein the protective fabric is welding cloth.

### Claim 8 (depends on 1)

The system of claim 1, further comprising a movable eye-protective shutter at the front of the enclosure, wherein the shutter can be opened for loading parts into the enclosure.

### Claim 9 (depends on 8)

The system of claim 8, further comprising an interlock that prevents actuating the electromagnetic wave source while the shutter is opened.

### Claim 10 (depends on 1)

The system of claim 1, further comprising a vacuum for removing ash from the enclosure.

### Claim 11 (depends on 1)

The system of claim 1, further comprising an exhaust system for removing smoke from the enclosure.