Dielectric copolymer materials
AssigneeMerck Patent GmbH
InventorsGregor Larbig, Pawel Miskiewicz
Life of this patent
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Abstract
A polymerizable mixture which can be used to form a dielectric material for the preparation of passivation layers in electronic devices comprises a first monomer and a second monomer which may react to form a copolymer providing excellent film forming capability, excellent thermal properties, and excellent mechanical properties. The polymerizable mixture can be used in a method for forming copolymers and the copolymers can be used in an electronic device as dielectric material. The copolymers can also be used in a manufacturing method for preparing a packaged microelectronic structure and microelectronic devices comprising the packaged microelectronic structure.
Claims16
A polymerizable mixture comprising:
- a first monomer and a second monomer,
- wherein the first monomer is one or more selected from formulae M1 to M31:
- wherein:
- m is an integer from 1 to 60;
- P1 denotes
- Sp1 denotes at each occurrence a spacer group Sp;
- Z21 and Z22 are independently and at each occurrence independently from each other, —O—, —S—, —CO—, —COO—, —OCO—, —S—CO—, —CO—S—, —O—COO—, —CO—NR01—, —NR01CO—, —NR01—CO—NR02, —NR01—CO—O, —O—CO—NR01, —O—CO—NR01, —OCH2—, —CH2O—, —SCH2—, —CH2S—, —CH2CH2—, —(CH2)4—, —CH═N—, —N═CH—, —N═N—, —CH═CR01—, —CY01═CY02—, —C≡C—, —CH═CH—COO—, —OCO—CH═CH—, or a single bond;
- R01 and R02 each, independently of one another, denote H or alkyl having 1 to 12 C atoms;
- L is Cl, Br, I, —CN, —NO2, —NCO, —NCS, —OCN, —SCN, —C(═O)NRxxRyy, —C(═O)ORxx, —C(═O)Rxx, —NRxxRyy, —OH, −SF5, straight chain alkyl or alkoxy having 1 to 20 C atoms, branched chain alkyl or alkoxy having 3 to 20 C atoms, straight chain alkylcarbonyl, alkoxycarbonyl, alkylcarbonyloxy, or alkoxycarbonyloxy with 2 to 20 C atoms, or branched chain alkylcarbonyl, alkoxycarbonyl, alkylcarbonyloxy, or alkoxycarbonyloxy having 4 to 20 C atoms wherein, in said alkyl, alkoxy, alkylcarbonyl, alkoxycarbonyl, alkylcarbonyloxy, or alkoxycarbonyloxy groups, one or more H atoms are each optionally replaced by F, Cl, —CN, straight chain alkyl or alkoxy having 1 to 6 C atoms, branched chain alkyl or alkoxy having 3 to 6 C atoms, straight chain alkylcarbonyl, alkoxycarbonyl, alkylcarbonyloxy, or alkoxycarbonyloxy with 2 to 6 C atoms, or branched chain alkylcarbonyl, alkoxycarbonyl, alkylcarbonyloxy, or alkoxycarbonyloxy with 4 to 6 C atoms;
- Rxx and Ryy independently of each other denote H or alkyl with 1 to 12 C-atoms;
- Y01 and Y02 each, independently of one another, denote H, alkyl having 1 to 12 C atoms, aryl, Cl, or CN;
- r is 0, 1, 2, 3 or 4;
- s is 0, 1, 2 or 3;
- and
- t is 0, 1 or 2;
- wherein the second monomer is one or more bi- or multifunctional compounds capable of reacting with the first monomer to give a copolymer, wherein the second monomer is one or more bi- or multifunctional compounds comprising two or more polymerizable groups, P, which are selected from groups containing a C═C double bond, groups containing two conjugated C═C double bonds, nucleophilic groups, and 1,3-dipolar groups.
Dependencies are inferred from the claim text.