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US 11,999,860 B2Granted
Zirconium nitride powder coated with alumina and process for producing the same
AssigneeMitsubishi Materials Electronic Chemicals Co., Ltd.
InventorsKensuke Kageyama, Naoyuki Aiba
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Abstract
A zirconium nitride powder coated with alumina has a volume resistivity is 1×106 Ω·cm or higher. Also, an coating amount with alumina is 1.5% by mass to 9% by mass with respect to 100% by mass of the zirconium nitride. Furthermore, an isoelectric point of the zirconium nitride powder coated with alumina is 5.7 or higher.
Claims4
A zirconium nitride powder coated with alumina, wherein
- a volume resistivity is 1×106 Ω·cm or higher, an coating amount with alumina is 1.5% by mass to 9% by mass with respect to 100% by mass of the zirconium nitride, and an isoelectric point of the zirconium nitride is 5.7 or higher.
A process for producing a zirconium nitride powder coated with alumina, comprising:
- grinding a zirconium nitride powder in water to prepare a zirconium nitride slurry,
- dissolving an aluminum compound in a solvent to prepare an aluminum compound solution,
- adding the aluminum compound solution to the zirconium nitride slurry so that zirconium nitride powder:alumina has a mass ratio of (100:1.5) to (100:15),
- coating the zirconium nitride powder with the aluminum compound by adding an acid to the zirconium nitride slurry to which the aluminum compound solution has been added, so as to adjust a pH of the zirconium nitride slurry and deposit the aluminum compound on a surface of the zirconium nitride powder,
- washing and then collecting the zirconium nitride powder coated with the aluminum compound,
- obtaining the zirconium nitride coated with alumina by calcining the collected zirconium nitride powder coated with the aluminum compound in an air or nitrogen atmosphere at a temperature of 60° C. to 200° C. for 1 hour to 24 hours.
3 more elements
A process for producing a zirconium nitride powder coated with alumina, comprising:
- dispersing a zirconium nitride powder in a solvent to prepare a zirconium nitride slurry,
- adding an aluminate coupling agent to the zirconium nitride slurry so that zirconium nitride powder:alumina has a mass ratio of (100:1.5) to (100:15),
- removing a supernatant liquid by decantation to obtain a precipitate,
- obtaining the zirconium nitride coated with alumina by calcining the precipitate in a nitrogen atmosphere at a temperature of 200° C. to 400° C. for 3 hours to 24 hours.
1 more element
Dependencies are inferred from the claim text.