Manufacturing method of porous glass base material for optical fiber and manufacturing apparatus
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsNaoto Noda, Dai Inoue, Hitoshi Iinuma, Hiromasa Mizukami
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Abstract
In a method of manufacturing porous glass base for optical fiber, a liquid organic siloxane raw material stored in a raw material tank of internal pressure P1 is controlled by a mass flow controller at a predetermined flow rate and pumped through pipe of internal pressure P2 to a vaporizer, the liquid raw material is vaporized in the vaporizer and supplied as a gas raw material to a burner, and the silica fine particles formed by burning the gas raw material in the burner are deposited to form a porous glass base material, where P1≤P2 is satisfied.
Claims6
A manufacturing method of porous glass base material for optical fiber comprising:
- pumping a liquid raw material of an organic siloxane stored in a raw material tank at internal pressure P1 into a vaporizer through a pipe at internal pressure P2, controlled by a mass flow controller at a predetermined flow rate;
- vaporizing the liquid raw material in the vaporizer and supplying the vaporized raw material to a burner as a gas raw material;
- and
- forming a porous glass base material by depositing silica fine particles formed by burning the gas raw material in the burner,
- wherein P1≤P2 is satisfied, and
- wherein the manufacturing method further comprises a step of pumping the liquid raw material in the raw material tank to the mass flow controller using a liquid feed pump, wherein
- a pressure of the liquid raw material supplied to the mass flow controller is P3, and
- in the step of pumping the liquid raw material, the liquid feed pump once pressurizes the pressure of the liquid raw material to P4 and supplies the liquid raw material to the mass flow controller while reducing the pressure to P3 via a pressure loss unit, so that P1≤P2<P3≤0.6 P4 is satisfied.
Dependencies are inferred from the claim text.