# US 11,999,615 B2 · Nitride piezoelectric body and MEMS device using same

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- Number: US 11,999,615 B2
- Document ID: US11999615B2
- Status: Granted
- Kind: B2
- Application number: 17/415,691
- Filed: 2019-12-27
- Published: 2022-03-10
- Granted: 2024-06-04
- Earliest claimed: 2019-02-22
- Assignees: National Institute of Advanced Industrial Science and Technology
- Applicants: National Institute of Advanced Industrial Science and Technology
- Inventors: Kenji Hirata; Hiroshi Yamada; Masato Uehara; Sri Ayu Anggraini; Morito Akiyama
- Web page: https://patentgrep.com/patent/US11999615B2

## CPC

- C01B 21/0602: {with two or more other elements chosen from metals, silicon or boron}
- C01B 21/072: with aluminium
- H10N 30/20: with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N 30/853: Ceramic compositions
- C01B: NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; {METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C}
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

## Abstract

An object is to provide a piezoelectric body having a value indicating a higher performance index (d33, e33, C33, g33, and/or k2) than aluminum nitride not doped with any element. The piezoelectric body is represented by a chemical formula Al1-X-YMgXMYN where X+Y is less than 1, X is in a range of more than 0 and less than 1, and Y is in a range of more than 0 and less than 1.

## Claims

### Claim 1

A nitride material represented by a chemical formula
Al1-X-YMgXMYN
where X+Y is less than 1,
X is in a range of more than 0 and less than 1, and
Y is in a range of more than 0 and less than 1, and wherein
M represents any one of Cr, Mn, Fe, Co, Ni, Mo, Tc, Ru, Rh, Pd, Ag, W, Re, Os, Ir, Pt, and Au.

### Claim 2 (depends on 1)

The nitride material according to claim 1, wherein X+Y is 0.65 or less, X is in a range of more than 0 and less than 0.65, and Y is in a range of more than 0 and less than 0.65.

### Claim 3 (depends on 1)

The nitride material according to claim 1, wherein X+Y is 0.375 or less, X is in a range of more than 0 and 0.1875 or less, and Y is in a range of more than 0 and 0.1875 or less.

### Claim 4 (depends on 1)

The nitride material according to claim 1, wherein X+Y is 0.125 or less, X is in a range of more than 0 and 0.0625 or less, and Y is in a range of more than 0 and 0.0625 or less.

### Claim 5 (depends on 1)

The nitride material according to claim 1, wherein M is any one of Cr, Mn, Fe, Co, Ni, Mo, Tc, Ru, Rh, Pd, Ag, W, Os, Ir, Pt, and Au.

### Claim 6 (depends on 1)

The nitride material according to claim 1, wherein M is Cr or Mn.

### Claim 7 (depends on 1)

A piezoelectric body comprising the nitride material according to claim 1.

### Claim 8 (depends on 7)

A MEMS device using the piezoelectric body according to claim 7.