Optical MEMS based monitoring system

An optical micro-electro-mechanical system (MEMS) based monitoring system, comprising:

• a broadband light source, a tunable optical filter (TOF), an optical etalon, a plurality of optical receivers, a plurality of optical couplers, and a plurality of optical MEMS sensors;
• wherein the TOF is configured to pass light for generating a spectrum of the optical MEMS sensor, and the spectrum is selected from one of a transmission spectrum, a reflection spectrum and an interference spectrum;
• wherein a peak or depression wavelength in a spectrum corresponds to a parameter to be monitored of a pressure, a temperature or a stress;
• and the peak or depression wavelength can be obtained by comparing the spectrum with a periodic spectrum of the optical etalon, and the optical etalon has an absolute wavelength mark;
• wherein the optical MEMS sensor comprises an optical MEMS resonator;
• and the optical MEMS sensor is an optical pigtail MEMS sensor, comprising a single mode optical fiber, a MEMS membrane and a glass tube;
• the optical MEMS resonator is formed by a tip of the single mode optical fiber and the MEMS membrane;
• the glass tube is configured to support the single mode optical fiber and the MEMS membrane;
• wherein a cavity of the optical MEMS resonator is sealed or provided with an air hole.