# US 11,999,098 B2 · Parallelized 3D lithography using multi-beam, multi-color light-induced polymerization

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 11,999,098 B2
- Document ID: US11999098B2
- Status: Granted
- Kind: B2
- Application number: 17/413,357
- Filed: 2019-10-21
- Published: 2022-02-24
- Granted: 2024-06-04
- Earliest claimed: 2018-12-17
- Assignees: Karlsruher Institut für Technologie
- Applicants: Karlsruher Institut für Technologie
- Inventors: Vincent Hahn; Patrick Müller; Eva Blasco; Martin Wegener
- Web page: https://patentgrep.com/patent/US11999098B2

## CPC

- B29C 64/124: using layers of liquid which are selectively solidified
- B29C 64/129: characterised by the energy source therefor, e.g. by global irradiation combined with a mask
- B29C 64/245: Platforms or substrates (support structures intended to be sacrificed after manufacture B29C64/40)
- B29C 64/255: Enclosures for the building material, e.g. powder containers
- B29C 64/273: pulsed; frequency modulated
- B29C 64/277: using multiple radiation means, e.g. micromirrors or multiple light-emitting diodes [LED]
- B29C 64/282: of the same type, e.g. using different energy levels
- B33Y 10/00: Processes of additive manufacturing
- B33Y 30/00: Apparatus for additive manufacturing; Details thereof or accessories therefor
- B33Y 70/00: Materials specially adapted for additive manufacturing
- G03F 7/0037: {Production of three-dimensional images}
- G03F 7/031: Organic compounds not covered by group G03F7/029
- G03F 7/095: having more than one photosensitive layer (G03F7/075 takes precedence)
- G03F 7/2012: {using liquid photohardening compositions, e.g. for the production of reliefs such as flexographic plates or stamps}
- G03F 7/2053: {using a laser (ablative removal B41C)}
- B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00)
- B33Y: ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

The present invention relates to a method for additive manufacturing of a 3D-structured form and to a device for additive manufacturing of a 3D-structured form.

## Claims

### Claim 1

A method for additive manufacturing of a 3D-structured form, the method comprising the steps of:
i) providing a liquid photoresist comprising at least one monomer and at least one photoinitiator system comprising an α-diketone or a photochromic compound selected from the group consisting of 2-methoxy naphthalene and spiropyrans; and
ii) irradiating the liquid photoresist with a first light source at a first wavelength Ai and with a second light source at a second wavelength λ2 either simultaneously or sequentially with a time interval of less than 1 ms to harden the liquid photoresist and produce the 3D-structured form,
wherein λ1≠λ2, and
wherein the hardening of the liquid photoresist to produce the 3D-structured form takes place only at the position which is irradiated by the first light source and the second light source either simultaneously or sequentially with the time interval of less than 1 ms.

### Claim 2 (depends on 1)

The method according to claim 1,
wherein in step ii), a single-photon absorption by the at least one photoinitiator system takes place.

### Claim 3 (depends on 1)

The method according to claim 1,
wherein in step ii), the 3D-structured form to be produced is imaged into at least one of the focal planes of the first light source and of the second light source.

### Claim 4 (depends on 1)

The method according to claim 1, wherein the liquid photoresist in step i) is provided in a container, wherein a substrate which supports the 3D-structured form is located in the container.

### Claim 5

A device for additive manufacturing of a 3D-structured form, starting from a liquid photoresist, the device comprising:
a first light source with a first wavelength λ1;
a second light source with a second wavelength λ2; and
a substrate configured for providing the liquid photoresist,
the liquid photoresist comprising at least one monomer and at least one photoinitiator system comprising an α-diketone or a photochromic compound selected from the group consisting of 2-methoxy naphthalene and spiropyrans,
wherein λ1≠λ2, and
wherein the first light source and the second light source are configured to be oriented toward the substrate and are configured to irradiate the liquid photoresist either simultaneously or sequentially with a time interval of less than 1 ms in order to harden the liquid photoresist only at the position which is irradiated by the first light source and the second light source either simultaneously or sequentially with the time interval of less than 1 ms.

### Claim 6 (depends on 5)

The device according to claim 5, wherein the substrate is located in a container and the substrate is further configured to support a 3D-structured form fabricated in the device for additive manufacturing.

### Claim 7 (depends on 5)

The device according to claim 5,
wherein a direction of irradiation of the first light source is different from a direction of irradiation of the second light source.

### Claim 8 (depends on 5)

The device according to claim 5,
wherein the first light source and the second light source are lasers.

### Claim 9 (depends on 8)

The device according to claim 8,
wherein at least one of the lasers is a pulsed laser.

### Claim 10 (depends on 1)

The method according to claim 1,
wherein the direction of irradiation of the first light source is different from the direction of irradiation of the second light source.

### Claim 11 (depends on 1)

The method according to claim 1,
wherein the first light source and the second light source are lasers.

### Claim 12 (depends on 11)

The method according to claim 11,
wherein at least one of the lasers is a pulsed laser.

### Claim 13 (depends on 1)

The method according to claim 1, wherein after step ii), further comprising step (iii) removing non-hardened liquid photoresist.
