Methods of forming parts using laser machining

A method of forming at least one structure, formed from at least one structural material, comprising:

• a) providing at least one structural material comprising a sheet and having a front side and a backside;
• b) depositing one or more layers of a front structural material on the front side and one or more layers of a back structural material on the backside;
• c) depositing one or more layers of a capping sacrificial material on the front structural material and one or more layers of a bridging sacrificial material on the back structural material;
• d) bonding the bridging sacrificial material to a substrate via a bonding material;
• e) cutting into the at least one structure including the capping sacrificial material, the front structural material, the structural material, and the back structural material using a laser beam that scans a first offset path relative to a boundary of the at least one structure to cut into the at least one structure to a depth that is less than a thickness of the at least one structure;
• f) cutting into the at least one structure using the laser beam along a second offset path that is farther from the boundary than the first offset path;
• g) cutting into the at least one structure using the laser beam along a third offset path that is farther from the boundary than the second offset path;
• h) repeating the cutting of at least one of (e), (f), and (g) a plurality of times to cut completely through the thickness of the at least one structure and partially into the bridging sacrificial material while not cutting into the bonding material and the substrate along the first offset path;
• and
• i) removing the bridging sacrificial material, the bonding material, and the substrate,
• wherein each of the first offset path, the second offset path and the third offset path define the boundary around the at least one structure,
• wherein the energy delivered along the first path is greater than the energy delivered along the second path which is greater than the energy delivered along the third path, and wherein exposures along the first and second paths, and second and third paths, that provide for cut regions that partially overlap with each other.