# US 11,999,009 B1 · Laser system to drill, cut, or modify an electronic circuit

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 11,999,009 B1
- Document ID: US11999009B1
- Status: Granted
- Kind: B1
- Application number: 18/132,058
- Filed: 2023-04-07
- Granted: 2024-06-04
- Earliest claimed: 2023-04-07
- Assignees: IntraAction Corp.
- Applicants: Khanh Le; John Lekavich; Bao Tran
- Inventors: Khanh Le; John Lekavich; Bao Tran
- Web page: https://patentgrep.com/patent/US11999009B1

## CPC

- H04B 10/503: {Laser transmitters}
- B23K 26/032: {using optical means}
- B23K 26/067: Dividing the beam into multiple beams, e.g. multi-focusing
- B23K 26/082: Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
- B23K 26/359: by providing a line or line pattern, e.g. a dotted break initiation line
- B23K 26/384: of specially shaped holes
- D06M 10/005: {Laser beam treatment}
- G02B 21/0032: {Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers (G02B21/0036 - G02B21/008; means for illumination of specimens in general G02B21/06)}
- G02B 21/0068: {arrangements using polarisation}
- G02B 21/0076: {arrangements using fluorescence or luminescence}
- G02F 1/11: based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves (acousto-optical deflection G02F1/33)
- G02F 1/113: {Circuit or control arrangements}
- G02F 1/292: {by controlled diffraction or phased-array beam steering (controlled diffraction for optical switching G02F1/31)}
- G02F 1/33: Acousto-optical deflection devices {(circuit or control arrangements therefor G02F1/113)}
- G02F 1/332: {comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell}
- H01S 3/0057: {Temporal shaping, e.g. pulse compression, frequency chirping (soliton generation and propagation G02F1/3513, H01S3/063 and H01S3/108)}
- H01S 3/0085: {Modulating the output, i.e. the laser beam is modulated outside the laser cavity}
- H01S 3/1123: Q-switching
- H01S 3/115: using intracavity electro-optic devices
- H01S 3/117: using intracavity acousto-optic devices
- H04B 10/25: Arrangements specific to fibre transmission
- B23K 2103/38: {Fabrics; Fibrous materials}
- B23K 2103/56: {being semiconducting}
- H04B: TRANSMISSION
- B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- D06M: TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL

## Abstract

A laser apparatus includes laser, a beam splitter, a phased array acousto-optic deflector (AOD) with one or more transducers, a damper, a galvano deflection unit, and a condensing lens to generate one or more laser beams directed at the electronic circuit. The Galvano deflection unit works with acousto-optic deflector includes an optical element having a surface with one or more steps formed thereon; a conductive layer formed on the surface with the steps; one or more crystals secured to each step; and electrodes positioned on each surface of each crystal.

## Claims

### Claim 1

A laser apparatus, comprising:
a laser oscillator to generate a laser beam;
a beam splitter;
a phased array acousto-optic deflector (AOD) with multiple frequency responses in one device, wherein the AOD comprises a plurality of transducers electrically coupled in parallel mounted on predetermined stepped positions and where the transducers are controlled by at least two input frequencies to position the laser output;
a galvano deflection unit; and
a condensing lens, wherein the phased array AOD is configured to control the direction and focus of the laser beam at multiple frequencies to deflect the laser beam.

### Claim 2 (depends on 1)

The apparatus of claim 1, comprising a damper.

### Claim 3 (depends on 1)

The apparatus of claim 1, comprising a table driving unit for guiding the laser beam over a surface of a printed circuit board, wherein the precise control of the laser beam provided by the phased array AOD reduces the risk of heat damage to surrounding materials and components.

### Claim 4 (depends on 1)

The apparatus of claim 1, wherein the AOD comprises:
an optical element having a surface with one or more steps formed thereon;
a conductive layer formed on the surface with the steps;
one or more crystals secured to each step; and
electrodes positioned on each surface of each crystal.

### Claim 5 (depends on 1)

The apparatus of claim 1, comprising a tuning element to match a predetermined impedance.

### Claim 6 (depends on 1)

The apparatus of claim 1, comprising a tuning element providing an output impedance of 50 ohms.

### Claim 7 (depends on 1)

The apparatus of claim 1, comprising a tuning element including inductive and capacitive passive components.

### Claim 8 (depends on 1)

The apparatus of claim 1, comprising tuning element comprises 1:1 balun, 4:1 transformer, a capacitor, and an inductor.

### Claim 9 (depends on 1)

The apparatus of claim 1, wherein the AOD comprises a slanted end.

### Claim 10 (depends on 9)

The apparatus of claim 9, wherein the slanted end comprises a compound angle to move reflected sound field out of a laser beam working range.

### Claim 11 (depends on 1)

The apparatus of claim 1, wherein the slanted end forms a 30 degree angle measured from a long side of the optical element to a short side of the optical element.

### Claim 12 (depends on 1)

The apparatus of claim 1, wherein a surface of the slanted end comprises a 2 degree slope.

### Claim 13 (depends on 1)

The apparatus of claim 1, wherein the AOD comprises germanium, tellurium dioxide (TeO2), lithium niobate, PZT, fused silica, chalcogenide glasses, glass.

### Claim 14 (depends on 1)

The apparatus of claim 1, wherein the laser beam generates a series of pulses aimed at a hole on the circuit, wherein the hole begins on one side of the circuit but does not exit the other side of the circuit.

### Claim 15

A method to operate on an electronic circuit, comprising:
positioning the electronic circuit on a table driving unit;
applying a laser beam, a beam splitter, a phased array acousto-optic deflector (AOD) with one or more transducers electrically coupled in parallel, a damper, a galvano deflection unit, and a condensing lens to generate one or more laser beams directed at the electronic circuit, wherein the AOD includes transducers electrically coupled in parallel mounted on predetermined stepped positions and where the transducers are controlled by at least two input frequencies to position the laser output;
impedance matching the at least two input frequencies of the transducers to a predetermined load;
generating a sound field in the phased array acousto-optic deflector to deflect a laser beam based the at least two input frequencies;
and
controlling a direction and focus of the laser beam using the phased array AOD to cut or create a hole or a via portion in the electronic circuit.

### Claim 16 (depends on 1)

The method of claim 1, comprising matching the input of the transducers to a predetermined impedance.

### Claim 17 (depends on 15)

The method of claim 15, comprising providing a tuning element coupled to the transducers with an output impedance of 50 ohms.

### Claim 18 (depends on 15)

The method of claim 15, comprising tuning element comprises a 1:1 balun, a 4:1 transformer, a capacitor, and an inductor.

### Claim 19 (depends on 15)

The method of claim 15, wherein the optical element comprises a slanted end, wherein the slanted end comprises a compound angle to move reflected sound field out of a laser beam working range, wherein the slanted end forms a 30 degree angle measured from a long side of the optical element to a short side of the optical element, and wherein a surface of the slanted end comprises a 2 degree slope.

### Claim 20 (depends on 15)

The method of claim 15, comprising generating a series of pulses aimed at a hole on the circuit, wherein the hole begins on one side of the circuit but does not exit the other side of the circuit.