Photonic waveguide and method of forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMing Yang Chung, Chewn-Pu Jou, Stefan Rusu, Cheng-Tse Tang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMing Yang Chung, Chewn-Pu Jou, Stefan Rusu, Cheng-Tse Tang
Estimating the term…
A method includes: determining a first material and a second material of a photonic waveguide for propagating light, the photonic waveguide having a first section and a second section arranged in a first layer and a second layer, respectively, of the photonic waveguide; determining a spacing between the first layer and the second layer; determining a parameter set of a crosstalk reduction structure, according to the spacing, the first material and a wavelength of the light, to cause insertion losses of the first section and the second section to be lower than a predetermined threshold; and forming the first and second sections with the first and second materials, respectively, the first section having the crosstalk reduction structure overlapping the second section.
A method, comprising:
A semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.