# US 11,994,625 B2 · LiDAR device and operating method thereof

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- Number: US 11,994,625 B2
- Document ID: US11994625B2
- Status: Granted
- Kind: B2
- Application number: 16/782,779
- Filed: 2020-02-05
- Published: 2021-02-25
- Granted: 2024-05-28
- Earliest claimed: 2019-08-20
- Assignees: Samsung Electronics Co., Ltd.
- Applicants: Samsung Electronics Co., Ltd.
- Inventors: Jisan Lee; Jungwoo Kim
- Web page: https://patentgrep.com/patent/US11994625B2

## CPC

- G01S 7/4866: {by fitting a model or function to the received signal}
- G01S 17/10: using transmission of interrupted, pulse-modulated waves (determination of distance by phase measurements G01S17/32)
- G01S 7/4808: {Evaluating distance, position or velocity data}
- G01S 7/4811: {common to transmitter and receiver}
- G01S 7/4814: {of transmitters alone}
- G01S 7/4817: {relating to scanning}
- G01S 7/4818: {using optical fibres}
- G01S 7/484: Transmitters
- G01S 7/4865: Time delay measurement, e.g. time-of-flight measurement, time of arrival measurement or determining the exact position of a peak (peak detection in noise, signal conditioning G01S7/487)
- G01S 17/26: wherein the transmitted pulses use a frequency-modulated or phase-modulated carrier wave, e.g. for pulse compression of received signals
- G01S 7/4868: {Controlling received signal intensity or exposure of sensor}
- G01S 7/4915: Time delay measurement, e.g. operational details for pixel components (signal extraction and conditioning G01S7/493); Phase measurement
- G01S 17/89: for mapping or imaging
- G01S 17/931: of land vehicles
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES

## Abstract

A light detection and ranging (LiDAR) device may include: an optical phased array configured to modulate a phase of light incident on the optical phased array and emit the light; a first photodetector configured to detect, as a reference light, the light emitted from the optical phased array in a first direction toward the first photodetector, and generate a reference signal based on the reference light; a second photodetector configured to detect, as a target light including information about an object, the light emitted from the optical phased array in a second direction toward the object, and generate a target signal based on the target light; and a processor configured to determine a distance between the LiDAR device and the object based on a cross-correlation between the reference signal and the target signal.

## Claims

### Claim 1

A light detection and ranging (LiDAR) device comprising:
an optical phased array configured to modulate a phase of light incident on the optical phased array and emit the light that is phase-modulated;
a first photodetector configured to detect, as a reference light, the light emitted from the optical phased array in a first direction toward the first photodetector, and generate a reference signal based on the reference light;
a second photodetector configured to detect, as a target light including information about an object, the light emitted from the optical phased array in a second direction toward the object, and generate a target signal based on the target light; and
a processor configured to determine a distance between the LiDAR device and the object based on a cross-correlation between the reference signal and the target signal,
wherein the optical phased array comprises an optical splitter, a phase modulation array, and an antenna array, and
wherein the first photodetector is connected to the antenna array via a waveguide that is in contact with the antenna array and the first photodetector and configured to receive the reference light used to determine the distance from the antenna array via the waveguide, and
wherein the optical splitter, the phase modulation array, the antenna array, the waveguide, and the first photodetector are provided on a same surface of a same substrate.

### Claim 2 (depends on 1)

The LiDAR device of claim 1, wherein the optical splitter is configured to split the light incident on the optical phased array, into a plurality of sub-lights,
the phase modulation array is configured to modulate a phase of each of the plurality of sub-lights, and
the antenna array configured to emit the plurality of sub-lights that are modulated by the phase modulation array.

### Claim 3 (depends on 1)

The LiDAR device of claim 1, further comprising:
a single analog-to-digital converter (ADC) configured to receive the reference light and the target light and convert the reference light and the target light into a digital reference signal and a digital target signal, respectively.

### Claim 4

A light detection and ranging (LiDAR) device comprising:
an optical phased array configured to modulate a phase of light incident on the optical phased array and emit the light that is phase-modulated;
a first photodetector configured to detect, as a reference light, the light emitted from the optical phased array in a first direction toward the first photodetector, and generate a reference signal based on the reference light;
a waveguide comprising an area having a width that decreases from the optical phased array toward the first photodetector, and configured to receive the reference light from the optical phased array and output the reference light to the first photodetector;
a second photodetector configured to detect, as a target light including information about an object, the light emitted from the optical phased array in a second direction toward the object, and generate a target signal based on the target light; and
a processor configured to determine a distance between the LiDAR device and the object based on a cross-correlation between the reference signal and the target signal.

### Claim 5 (depends on 1)

The LiDAR device of claim 1, wherein the waveguide comprises:
an input coupler configured to allow the reference light received from the optical phased array to be coupled with the waveguide; and
an output coupler configured to output the reference light that passed through the waveguide to the first photodetector.

### Claim 6 (depends on 5)

The LiDAR device of claim 5, wherein the input coupler comprises a plurality of sub-input couplers disposed to correspond to respective antennas of the optical phased array.

### Claim 7 (depends on 1)

The LiDAR device of claim 1, wherein the optical phased array comprises:
an electrode layer;
an active layer disposed on the electrode layer;
an insulating layer disposed on the active layer; and
an antenna layer disposed on the insulating layer,
wherein the active layer is disposed between the electrode layer and the antenna layer, and configured to have a resonance characteristic that varies according to a voltage applied between the electrode layer and the antenna layer.

### Claim 8 (depends on 1)

The LiDAR device of claim 1, wherein the processor is configured to determine the distance between the LiDAR device and the object based on a time difference between a first point in time at which the reference signal is detected and a second point in time at which a cross-correlation function value indicating the cross-correlation between the reference signal and the target signal is greater than or equal to a reference value.

### Claim 9 (depends on 8)

The LiDAR device of claim 8, wherein the reference value is a maximum value of the cross-correlation function value.

### Claim 10 (depends on 9)

The LiDAR device of claim 9, wherein, when the target signal is f(t) and the reference signal is g(t), the cross-correlation function value is determined by a mathematical expression ∫−∞∞f(x)g(t+x)dx.

### Claim 11 (depends on 1)

The LiDAR device of claim 1, wherein the processor is configured to convert the reference signal and the target signal into unipolar signals based on an absolute value of at least one of the reference signal and the target signal.

### Claim 12

An operating method of a light detection and ranging (LiDAR) device, the operating method comprising:
emitting light that is phase-modulated by a phase modulation array through an antenna array;
receiving, by a photodetector from the antenna array, the light emitted from the antenna array in a first direction toward the photodetector, as reference light that is used to determine a distance between the LiDAR device and an object, wherein the photodetector is connected to the antenna array via a waveguide that is in contact with the antenna array and the photodetector;
detecting, by the photodetector, the light emitted from the antenna array in a second direction toward the object, as a target light including information about the object;
generating a reference signal based on the reference light, and generating a target signal based on the target light; and
determining the distance between the LiDAR device and the object based on a cross-correlation between the reference signal and the target signal,
wherein the phase modulation array, the antenna array, the waveguide, and the photodetector are provided on a same surface of a same substrate.

### Claim 13 (depends on 12)

The operating method of claim 12, wherein, the determining the distance comprises, determining the distance based on a time difference between a first point in time at which the reference signal is detected and a second point in time at which a cross-correlation function value indicating the cross-correlation between the reference signal and the target signal is greater than or equal to a reference value.

### Claim 14 (depends on 13)

The operating method of claim 13, wherein the reference value is a maximum value of the cross-correlation function value.

### Claim 15 (depends on 12)

The operating method of claim 12, further comprising converting the reference signal and the target signal into a digital reference signal and a digital target signal via a single analog-to-digital converter (ADC).

### Claim 16 (depends on 12)

The operating method of claim 12, further comprising converting the reference signal and the target signal into unipolar signals based on an absolute value of at least one of the reference signal and the target signal.

### Claim 17

A distance sensing device comprising:
a light emitter configured to emit light in a first direction toward an object and in a second direction different from the first direction;
an optical phased array configured to modulate a phase of light incident on the optical phased array and emit the light that is phase-modulated;
a light receiver comprising a first photodetector configured to detect the light emitted to the object and reflected from the object as an analog target signal, and a second photodetector configured to detect, directly from the light emitter, the light emitted in the second direction as an analog reference signal;
a single analog-to-digital converter (ADC) configured to receive the analog target signal and the analog reference signal and convert the analog target signal and the analog reference signal to a digital target signal and a digital reference signal, respectively; and
a processor configured to determine a distance between the distance sensing device and the object based on information of a time point at which a cross-correlation between the digital target signal and the digital reference signal is maximized,
wherein the optical phased array comprises an optical splitter, a phase modulation array, and an antenna array, and
wherein the first photodetector is connected to the antenna array via a waveguide that is in contact with the antenna array and the first photodetector and configured to receive the reference light used to determine the distance from the antenna array via the waveguide, and
wherein the optical splitter, the phase modulation array, the antenna array, the waveguide, and the first photodetector are provided on a same surface of a same substrate.
