# US 11,994,566 B2 · Magnetic sensor and its manufacturing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,994,566 B2 - Document ID: US11994566B2 - Status: Granted - Kind: B2 - Application number: 18/091,475 - Filed: 2022-12-30 - Published: 2023-05-04 - Granted: 2024-05-28 - Earliest claimed: 2020-03-27 - Assignees: TDK Corporation - Applicants: TDK Corporation - Inventors: Kenzo Makino; Takafumi Kobayashi - Web page: https://patentgrep.com/patent/US11994566B2 ## CPC - G01R 33/0047: {Housings or packaging of magnetic sensors (packaging of semiconductor devices H10W99/00); Holders} - G01R 33/09: Magnetoresistive devices - G01R 33/091: {Constructional adaptation of the sensor to specific applications} - H10N 50/80: Constructional details - H10N 50/85: Materials of the active region - G01D 5/145: {influenced by the relative movement between the Hall device and magnetic fields (see G01R33/06)} - G01R 33/0052: {Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips (devices based on galvano-magnetic effect or the like H10N50/85)} - H10N 50/01: Manufacture or treatment - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR - G01D: MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR ## Abstract A magnetic sensor includes an MR element and a support member. A top surface of the support member includes an inclined portion. The MR element includes an MR element main body, a lower electrode, and an upper electrode. The lower electrode includes a first end closest to a lower end of the inclined portion and a second end closest to an upper end of the inclined portion. The MR element main body is located at a position closer to the second end than to the first end. ## Claims ### Claim 1 A magnetic sensor comprising: a magnetoresistive element whose resistance changes with an external magnetic field; and a support member that supports the magnetoresistive element, wherein the support member includes a top surface opposed to the magnetoresistive element and a bottom surface located on a side opposite to the top surface, the top surface of the support member includes an inclined portion inclined relative to the bottom surface, the magnetoresistive element includes a main body, and a lower electrode and an upper electrode that supply a current to the main body, the main body is located on the inclined portion, the lower electrode is interposed between the main body and the inclined portion, the upper electrode is located on the main body, the inclined portion includes a lower end closest to the bottom surface and an upper end farthest from the bottom surface, the lower electrode includes a first end closest to the lower end of the inclined portion and a second end closest to the upper end of the inclined portion, and a distance from the upper end of the inclined portion to the first end of the lower electrode is greater than a distance from the upper end of the inclined portion to the lower end of the inclined portion. ### Claim 2 (depends on 1) The magnetic sensor according to claim 1, wherein: the upper electrode includes a third end closest to the lower end of the inclined portion; and a distance from the main body to the third end of the upper electrode is smaller than that from the main body to the first end of the lower electrode. ### Claim 3 (depends on 1) A manufacturing method for a magnetic sensor for manufacturing the magnetic sensor according to claim 1, the manufacturing method comprising: a step of forming the magnetoresistive element; and a step of forming the support member, wherein the step of forming the magnetoresistive element includes a step of forming the main body, a step of forming the lower electrode, and a step of forming the upper electrode, the step of forming the lower electrode includes a step of forming a metal film on the support member, a step of forming an etching mask, and an etching step of etching the metal film by using the etching mask so that the metal film makes the lower electrode, and the etching mask has an undercut that forms a space between the etching mask and an underlayer of the etching mask. ### Claim 4 (depends on 3) The manufacturing method for a magnetic sensor according to claim 3, wherein: the undercut forms a first space closest to the lower end of the inclined portion and a second space closest to the upper end of the inclined portion; a maximum dimension of the first space in a first direction perpendicular to the bottom surface of the support member is greater than a maximum dimension of the second space in the first direction; and a dimension of the first space in a second direction parallel to a direction from the lower end to the upper end of the inclined portion is greater than a dimension of the second space in the second direction. ### Claim 5 (depends on 3) The manufacturing method for a magnetic sensor according to claim 3, wherein: the step of forming the etching mask includes forming the etching mask on the metal film; and the step of forming the main body is performed after the etching step. ### Claim 6 A magnetic sensor comprising: a magnetoresistive element whose resistance changes with an external magnetic field; and a support member that supports the magnetoresistive element, wherein the support member includes a top surface opposed to the magnetoresistive element and a bottom surface located on a side opposite to the top surface, the top surface of the support member includes an inclined portion inclined relative to the bottom surface, the magnetoresistive element includes a main body, and a lower electrode and an upper electrode that supply a current to the main body, the main body is located on the inclined portion, the lower electrode is interposed between the main body and the inclined portion, the upper electrode is located on the main body, the inclined portion includes a lower end closest to the bottom surface and an upper end farthest from the bottom surface, the lower electrode includes a first end closest to the lower end of the inclined portion and a second end closest to the upper end of the inclined portion, the upper electrode includes a third end closest to the lower end of the inclined portion, and a distance from the main body to the third end of the upper electrode is smaller than that from the main body to the first end of the lower electrode. ### Claim 7 A magnetic sensor comprising: a magnetoresistive element whose resistance changes with an external magnetic field; and a support member that supports the magnetoresistive element, wherein the support member includes a top surface opposed to the magnetoresistive element and a bottom surface located on a side opposite to the top surface, the top surface of the support member includes an inclined portion inclined relative to the bottom surface, the magnetoresistive element includes a main body, and a lower electrode and an upper electrode that supply a current to the main body, the main body is located on the inclined portion, the lower electrode is interposed between the main body and the inclined portion, the upper electrode is located on the main body, the inclined portion includes a lower end closest to the bottom surface and an upper end farthest from the bottom surface, the lower electrode includes a first end closest to the lower end of the inclined portion and a second end closest to the upper end of the inclined portion, the upper electrode includes a third end closest to the lower end of the inclined portion, and a distance from the upper end to the third end of the upper electrode is smaller than that from the upper end to the first end of the lower electrode.