# US 11,994,482 B2 · Driving device provided with piezoelectric element deterioration detection circuit and deterioration detection method

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- Number: US 11,994,482 B2
- Document ID: US11994482B2
- Status: Granted
- Kind: B2
- Application number: 17/604,982
- Filed: 2020-04-20
- Published: 2023-05-18
- Granted: 2024-05-28
- Earliest claimed: 2019-04-25
- Assignees: Fujikin Incorporated
- Applicants: Fujikin Incorporated
- Inventors: Atsushi Hidaka; Katsuyuki Sugita; Takatoshi Nakatani; Kouji Nishino; Nobukazu Ikeda
- Web page: https://patentgrep.com/patent/US11994482B2

## CPC

- F16K 31/007: {Piezoelectric stacks}
- G01N 27/028: {Circuits therefor (measuring impedance per se G01R27/02)}
- F16K 37/0041: {for measuring valve parameters (F16K37/0033 takes precedence)}
- F16K 37/0083: {by measuring valve parameters}
- H02N 2/06: Drive circuits; Control arrangements {or methods}
- F16K: VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING {(devices for emptying and evacuating the excess liquid in valves or conduits F16L55/07)}
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR

## Abstract

The driving device includes a piezoelectric element, a power supply unit, a first resistor, a second resistor, a measuring unit and a control unit, wherein resistance values of the first resistor and the second resistor are smaller than an insulating resistance value of the piezoelectric element, the measuring unit measures, a voltage across the first resistor (voltage between a first terminal and a second terminal), in a state of supplying a predetermined voltage from the power supply unit, and the control unit calculates a resistance value of the piezoelectric element from a voltage value obtained by the measurement of the measuring unit, and determines, whether or not degradation has occurred in the piezoelectric element based on the calculated resistance value.

## Claims

### Claim 1

A driving device comprising:
a piezoelectric element;
a first resistor connected in series with the piezoelectric element;
a voltage supply unit for supplying a DC voltage across the series connection circuit formed by the piezoelectric element and the first resistor;
at least one controller configured to:
control the voltage supply unit,
obtain a plurality of measurements by measuring a voltage of the first resistor a plurality of times, in a state where a predetermined voltage is supplied from the voltage supply unit,
calculate a resistance value of the piezoelectric element from each of a plurality of voltage values obtained by the plurality of measurements,
calculate a representative value of the plurality of calculated resistance values of the piezoelectric element, the representative value being an average or median of the plurality of calculated resistance values of the piezoelectric element, and
determine whether or not deterioration has occurred in the piezoelectric element, based on the representative value, wherein
the resistance value of the first resistor is smaller than an insulation resistance value of the piezoelectric element.

### Claim 2 (depends on 1)

The driving device according to claim 1, wherein
the controller is configured to:
determine whether or not deterioration has occurred in the piezoelectric element by comparing the representative value with a predetermined threshold value.

### Claim 3 (depends on 1)

The driving device according to claim 1, wherein
the controller is configured to determine whether or not deterioration has occurred in the piezoelectric element in response to the fact that a predetermined period of time has elapsed after the voltage is first applied to the piezoelectric element.

### Claim 4 (depends on 1)

The driving device according to claim 1, wherein
the driving device has a mechanism for opening and closing a valve by the piezoelectric element, and
the controller is configured to determine whether or not deterioration has occurred in the piezoelectric element in response to the fact that the number of times of opening and closing the valve has exceeded a predetermined number of times.

### Claim 5 (depends on 1)

The driving device according to claim 1, further comprising a second resistor, wherein
the second resistor is connected in series with the piezoelectric element and the first resistor,
the second resistor is connected between a positive terminal of the voltage supply unit and the first resistor, and
a resistance value of the second resistor is smaller than the insulation resistance value of the piezoelectric element and larger than the resistance value of the first resistor.

### Claim 6 (depends on 1)

The driving device according to claim 1, wherein the representative value is the median of the plurality of calculated resistance values of the piezoelectric element.

### Claim 7 (depends on 1)

The driving device according to claim 1, wherein the representative value is the average of the plurality of calculated resistance values of the piezoelectric element.

### Claim 8 (depends on 1)

The driving device according to claim 1, wherein
the controller is configured to:
repeatedly calculate the representative value of the plurality of calculated resistance values of the piezoelectric element to generate a plurality of calculated representative values,
calculate a slope of the plurality of calculated representative values, and
determine whether or not deterioration has occurred in the piezoelectric element by comparing the slope with a predetermined threshold value.

### Claim 9

A driving device comprising:
a piezoelectric element;
a first resistor connected in series with the piezoelectric element;
a voltage supply unit for supplying a DC voltage across the series connection circuit formed by the piezoelectric element and the first resistor;
a measuring unit for measuring a voltage of the first resistor, and
a control unit for controlling the voltage supply unit and the measuring unit; wherein
the resistance value of the first resistor is smaller than an insulation resistance value of the piezoelectric element,
the measuring unit measures the voltage of the first resistor, in a state where a predetermined voltage is supplied from the voltage supply unit,
the control unit calculates a resistance value of the piezoelectric element from the voltage value obtained by the measurement of the measuring unit and determines whether or not deterioration has occurred in the piezoelectric element, based on the calculated resistance value,
the measuring unit measures the voltage of the first resistor for a plurality of times, in a state where the predetermined voltage is supplied from the voltage supply unit, and
the control unit conducts repeatedly a process of calculating the resistance value of the piezoelectric element from each of a plurality of voltage values obtained by a plurality of measurements, and a process of calculating a representative value of the plurality of calculated resistance values of the piezoelectric element, calculates a slope of the plurality of calculated representative values, and determines whether or not deterioration has occurred in the piezoelectric element by comparing the slope with a predetermined threshold value.

### Claim 10

A deterioration detection method of a piezoelectric element in the driving device including the piezoelectric element, a first resistor connected in series with the piezoelectric element, a voltage supply unit for supplying a DC voltage, and a measuring unit for measuring the voltage, comprising:
a step of supplying, by the voltage supply unit, a predetermined DC voltage across the series connection circuit of the piezoelectric element and the first resistor,
a measurement step of measuring a voltage of the first resistor by the measuring unit, in a state of supplying the predetermined DC voltage,
a calculation step of calculating a resistance value of the piezoelectric element from the voltage value obtained by the measurement step, and
a step of determining whether or not deterioration has occurred in the piezoelectric element, based on the resistance value calculated by the calculation step.

### Claim 11 (depends on 10)

The deterioration detection method of claim 10, further comprising:
obtaining a plurality of measurements by measuring the voltage of the first resistor a plurality of times, in the state where the predetermined voltage is supplied from the voltage supply unit,
calculating the resistance value of the piezoelectric element from each of a plurality of voltage values obtained by the plurality of measurements,
calculating a representative value of the plurality of calculated resistance values of the piezoelectric element, the representative value being an average or median of the plurality of calculated resistance values of the piezoelectric element, and
determining whether or not deterioration has occurred in the piezoelectric element, based on the representative value.

### Claim 12 (depends on 11)

The deterioration detection method of claim 11, wherein the representative value is the median of the plurality of calculated resistance values of the piezoelectric element.

### Claim 13 (depends on 11)

The deterioration detection method of claim 11, wherein the representative value is the average of the plurality of calculated resistance values of the piezoelectric element.

### Claim 14 (depends on 11)

The deterioration detection method according to claim 11, further comprising:
repeatedly calculating the representative value of the plurality of calculated resistance values of the piezoelectric element to generate a plurality of calculated representative values,
calculating a slope of the plurality of calculated representative values, and
determining whether or not deterioration has occurred in the piezoelectric element by comparing the slope with a predetermined threshold value.
