# US 11,993,978 B2 · Seal mechanism for load port doors > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,993,978 B2 - Document ID: US11993978B2 - Status: Granted - Kind: B2 - Application number: 17/856,576 - Filed: 2022-07-01 - Published: 2024-01-04 - Granted: 2024-05-28 - Earliest claimed: 2022-07-01 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: James Christopher Hansen; Douglas Brian Baumgarten; Paul Reuter - Web page: https://patentgrep.com/patent/US11993978B2 ## CPC - E06B 7/2307: {with a single sealing-line or -plane between the wing and the part co-operating with the wing} - H10P 72/0441: {Apparatus for sealing, encapsulating, glassing, decapsulating or the like} - H10P 72/0451: {Apparatus for manufacturing or treating in a plurality of work-stations} - E06B: FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES (shades or blinds for greenhouses A01G9/22; curtains A47H; lids for car boots or bonnets B62D25/10; skylights E04B7/18; sunshades, awnings E04F10/00) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract The disclosure describes devices and systems for a seal, and methods for using said seal. A seal includes a base portion configured to couple to a groove formed by an edge surface of a first component. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to create an airtight seal between the first component and a sealing surface of a second component responsive to a threshold sealing force being applied against the sealing portion. The seal further includes a retaining portion substantially perpendicular to the base portion. A surface of the retaining portion is configured to push against the edge surface of the first component responsive to the threshold sealing force being applied against the sealing portion. ## Claims ### Claim 1 A seal comprising: a base portion configured to couple to a groove formed by an edge surface of a first component; a sealing portion extending from the base portion, wherein the sealing portion is configured to create an airtight seal between the first component and a sealing surface of a second component responsive to a threshold sealing force being applied against the sealing portion; and a retaining portion substantially perpendicular to the base portion, wherein a surface of the retaining portion is configured to push against the edge surface of the first component responsive to the threshold sealing force being applied against the sealing portion. ### Claim 2 (depends on 1) The seal of claim 1, wherein the edge surface of the first component is substantially perpendicular relative to the sealing surface of the second component, and wherein the first component is moveable relative to the second component. ### Claim 3 (depends on 1) The seal of claim 1, wherein at least the sealing portion of the seal comprises a flexible elastomer material. ### Claim 4 (depends on 1) The seal of claim 1, wherein the first component is a load port door of a factory interface and the second component is a frame of a load port comprising an opening to receive the load port door, wherein the load port door moves to a closed position responsive to the threshold sealing force being applied against the sealing portion, and wherein the threshold sealing force is applied substantially parallel to a plane of the edge surface of the first component. ### Claim 5 (depends on 1) The seal of claim 1, wherein the threshold sealing force is approximately 50 to 210 Newtons. ### Claim 6 (depends on 1) The seal of claim 1, wherein the retaining portion is configured to create a moment about an axis of the seal responsive to the threshold sealing force being applied against the sealing portion, wherein the base portion is configured such that a reaction force on a surface of the base portion causes the base portion to be retained in the groove. ### Claim 7 (depends on 1) The seal of claim 1, wherein at least a portion of the groove formed by the edge surface of the first component is a dovetail groove having two sidewalls and a bottom wall, wherein a maximum width between the two sidewalls is greater than a depth of the dovetail groove, and wherein at least one sidewall forms an angle of approximately 45 to 80 degrees relative to the bottom wall. ### Claim 8 A load port door comprising: an interior surface; an exterior surface; an edge surface comprising a groove formed in the edge surface; and a seal coupled to the groove, wherein the seal comprises: a base portion configured to couple to the groove; a sealing portion extending from the base portion, wherein the sealing portion is configured to create an airtight seal between the load port door and a sealing surface of a frame of a load port responsive to a threshold sealing force being applied against the sealing portion; and a retaining portion substantially perpendicular to the base portion, wherein a surface of the retaining portion is configured to push against the edge surface responsive to the threshold sealing force being applied against the sealing portion. ### Claim 9 (depends on 8) The load port door of claim 8, wherein the edge surface of the load port door is configured to be substantially perpendicular relative to the sealing surface of the frame of the load port, and wherein the load port door is configured to be moveable relative to the frame of the load port. ### Claim 10 (depends on 8) The load port door of claim 8, wherein at least the sealing portion of the seal comprises a flexible elastomer material. ### Claim 11 (depends on 8) The load port door of claim 8, wherein the threshold sealing force is approximately 50 to 210 Newtons, and wherein the threshold sealing force is applied substantially parallel to a plane of the edge surface. ### Claim 12 (depends on 8) The load port door of claim 8, wherein the retaining portion of the seal is configured to create a moment about an axis of the seal responsive to the threshold sealing force being applied against the sealing portion of the seal, wherein the base portion of the seal is configured such that a reaction force on a surface of the base portion of the seal causes the base portion to be retained in the groove. ### Claim 13 (depends on 8) The load port door of claim 8, wherein at least a portion of the groove is a dovetail groove having two sidewalls and a bottom wall, wherein a maximum width between the two sidewalls is greater than a depth of the dovetail groove, and wherein at least one sidewall forms an angle of approximately 45 to 80 degrees relative to the bottom wall. ### Claim 14 (depends on 8) The load port door of claim 8, wherein the groove is formed in the edge surface along a perimeter of the load port door, wherein the groove is a dovetail groove along at least a straight portion of the edge surface, and wherein the groove is a substantially rectangular groove along at least a curved portion of the edge surface. ### Claim 15 A load port for receiving a substrate carrier comprising: a frame adapted for connecting the load port to a factory interface, the frame comprising a transport opening through which one or more substrates are transportable between the substrate carrier and the factory interface; a load port door configured to substantially fill the transport opening, wherein the load port door comprises an edge surface forming a groove; and a seal coupled to the groove formed in the edge surface of the load port door, wherein the seal comprises: a base portion, wherein the seal is coupled to the groove of the load port door via the base portion; a sealing portion extending from the base portion, wherein the sealing portion is configured to create an airtight seal between the load port door and a sealing surface of the frame responsive to a threshold sealing force being applied against the sealing portion; and a retaining portion substantially perpendicular to the base portion, wherein a surface of the retaining portion is configured to push against the edge surface of the load port door responsive to the threshold sealing force being applied against the sealing portion. ### Claim 16 (depends on 15) The load port of claim 15, wherein the edge surface of the load port door is configured to be substantially perpendicular relative to the sealing surface of the frame, wherein the load port door is configured to be moveable relative to the frame of the load port, and wherein the seal is configured to engage with the sealing surface of the frame when the load port door is in a closed position. ### Claim 17 (depends on 15) The load port of claim 15, wherein the retaining portion of the seal is configured to create a moment about an axis of the seal responsive to the threshold sealing force being applied against the sealing portion of the seal, wherein the base portion of the seal is configured such that a reaction force on a surface of the base portion of the seal causes the base portion to be retained in the groove of the load port door. ### Claim 18 (depends on 15) The load port of claim 15, wherein at least a portion of the groove of the load port door is a dovetail groove having two sidewalls and a bottom wall, wherein a maximum width between the two sidewalls is greater than a depth of the dovetail groove, and wherein at least one sidewall forms an angle of approximately 45 to 80 degrees relative to the bottom wall. ### Claim 19 (depends on 15) The load port of claim 15, wherein the groove of the load port door is formed in the edge surface of the load port door along a perimeter of the load port door, wherein the groove is a dovetail groove along at least a straight portion of the edge surface of the load port door, and wherein the groove is a substantially rectangular groove along at least a curved portion of the edge surface of the load port door. ### Claim 20 (depends on 15) The load port of claim 15, wherein the threshold sealing force is approximately 50 to 210 Newtons, and wherein the threshold sealing force is applied substantially parallel to a plane of the edge surface of the load port door.