# US 11,993,854 B2 · Chamber wall polymer protection system and method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,993,854 B2 - Document ID: US11993854B2 - Status: Granted - Kind: B2 - Application number: 17/679,537 - Filed: 2022-02-24 - Published: 2023-05-18 - Granted: 2024-05-28 - Earliest claimed: 2021-11-16 - Assignees: Taiwan Semiconductor Manufacturing Company, Ltd. - Applicants: Taiwan Semiconductor Manufacturing Company, Ltd. - Inventors: Po-Hsun Tseng; Yan-Hong Liu - Web page: https://patentgrep.com/patent/US11993854B2 ## CPC - H01J 37/32862: {In situ cleaning of vessels and/or internal parts} - B01J 19/0053: {Details of the reactor} - B01J 19/10: employing sonic or ultrasonic vibrations - H10P 50/242: {of Group IV materials} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - B01J: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract In an etch process chamber, oscillators are positioned a predetermined distance away from an outer wall and coupled to a microwave generator. An inner wall of the process chamber on which particulates such as polymers adhere from the etch process is vibrated via operations of the oscillators. A gas flows into the cavity defined by the inner wall to collect the displaced particulates, which is then pumped out of the cavity to clean the process chamber. A controller identifies the polymer recipe used during the etch process and selects an oscillation program from memory. A microwave generator, controlled by the controller, is directed to generate microwaves at preselected frequencies determined from the program. The microwave frequencies are communicated to the oscillators, which then vibrate the inner wall at such received frequencies. ## Claims ### Claim 1 A method of removing particulates from an inner wall defining a cavity of an etch process chamber, the method comprising: vibrating the inner wall of the etch process chamber using at least one oscillator driven at a preselected frequency by a microwave generator, the at least one oscillator positioned a predetermined distance from an outer wall of the etch process chamber; enabling a flow of gas into the cavity, the gas collecting particulates removed from the inner wall by the vibration of the inner wall; and activating a pump in fluid communication with the cavity defined by the inner wall of the etch process chamber to remove the gas and collected particulates, wherein the particulates correspond to a polymer resulting from an etch process performed in the etch process chamber, the method further comprising: determining, from a memory in communication with a processor, at least one recipe corresponding to a polymer used during an associated etch process by the chamber; retrieving, from the memory, at least one program associated with the at least one recipe corresponding to an operation of the at least one oscillator at a preselected frequency for a predetermined period of time; and operating at least one of the pump and the at least one oscillator in accordance with the retrieved program. ### Claim 2 (depends on 1) The method of claim 1, further comprising: receiving an output from at least one sensor positioned on the outer wall of the process chamber, the output indicative of the frequency of vibration of the at least one oscillator; and responsive to the output, adjusting the microwave generator to alter a frequency of vibration of the at least one oscillator. ### Claim 3 (depends on 1) The method of claim 1, wherein the pump and the at least one oscillator operate simultaneously in accordance with the retrieved program. ### Claim 4 (depends on 1) The method of claim 1, wherein the at least one oscillator and the pump operate sequentially in accordance with the retrieved program. ### Claim 5 (depends on 1) The method of claim 1, wherein the at least one oscillator comprises a plurality of oscillators positioned around the outer wall, which are operated in accordance with the retrieved program simultaneously, sequentially, or in varying order. ### Claim 6 (depends on 5) The method of claim 5, wherein the plurality of oscillators vibrate at a same frequency or at plurality of different frequencies. ### Claim 7 (depends on 1) The method of claim 1, further comprising generating an alert indicating completion of removal of the collected particulates. ### Claim 8 A method of removing particulates from an inner wall defining a cavity of an etch process chamber, the method comprising: vibrating the inner wall of the etch process chamber using at least one oscillator driven at a preselected frequency by a microwave generator, the at least one oscillator positioned a predetermined distance from an outer wall of the etch process chamber; enabling a flow of gas into the cavity, the gas collecting particulates removed from the inner wall by the vibration of the inner wall; activating a pump in fluid communication with the cavity defined by the inner wall of the etch process chamber to remove the gas and collected particulates; receiving an output from at least one sensor positioned on the outer wall of the process chamber, the output indicative of the frequency of vibration of the at least one oscillator; and responsive to the output, adjusting the microwave generator to alter a frequency of vibration of the at least one oscillator. ### Claim 9 (depends on 8) The method of claim 8, wherein the particulates correspond to a polymer resulting from an etch process performed in the etch process chamber, the method further comprising: determining, from a memory in communication with a processor, at least one recipe corresponding to a polymer used during an associated etch process by the chamber; retrieving, from the memory, at least one program associated with the at least one recipe corresponding to an operation of the at least one oscillator at a preselected frequency for a predetermined period of time; and operating at least one of the pump and the at least one oscillator in accordance with the retrieved program. ### Claim 10 (depends on 9) The method of claim 9, wherein the at least one oscillator comprises a plurality of oscillators positioned around the outer wall, which are operated in accordance with the retrieved program simultaneously, sequentially, or in varying order. ### Claim 11 (depends on 10) The method of claim 10, wherein the plurality of oscillators vibrate at a same frequency or at plurality of different frequencies. ### Claim 12 (depends on 8) The method of claim 8, further comprising generating an alert indicating completion of removal of the collected particulates. ### Claim 13 (depends on 8) The method of claim 8, wherein the predetermined distance defines a gap between the at least one oscillator and the outer wall. ### Claim 14 A method of removing particulates from an inner wall defining a cavity of an etch process chamber, the method comprising: determining, from a memory in communication with a processor, at least one recipe corresponding to a polymer used during an associated etch process by the chamber; retrieving, from the memory, at least one program associated with the at least one recipe corresponding to an operation of at least one oscillator at a preselected frequency for a predetermined period of time; vibrating the inner wall of the etch process chamber using the at least one oscillator driven at the preselected frequency by a microwave generator in accordance with the retrieved at least one program, the at least one oscillator positioned a predetermined distance from an outer wall of the etch process chamber; enabling a flow of gas into the cavity, the gas collecting particulates removed from the inner wall by the vibration of the inner wall; and activating a pump in fluid communication with the cavity defined by the inner wall of the etch process chamber to remove the gas and collected particulates. ### Claim 15 (depends on 14) The method of claim 14, wherein the at least one oscillator comprises a plurality of oscillators positioned around the outer wall, which are operated in accordance with the retrieved program simultaneously, sequentially, or in varying order. ### Claim 16 (depends on 15) The method of claim 15, wherein the plurality of oscillators vibrate at a same frequency or at plurality of different frequencies. ### Claim 17 (depends on 15) The method of claim 15, wherein the predetermined distance defines a gap between the at least one oscillator and the outer wall. ### Claim 18 (depends on 15) The method of claim 15, wherein the pump and the at least one oscillator operate simultaneously in accordance with the retrieved program. ### Claim 19 (depends on 15) The method of claim 15, wherein the at least one oscillator and the pump operate sequentially in accordance with the retrieved program. ### Claim 20 (depends on 15) The method of claim 15, further comprising generating an alert indicating completion of removal of the collected particulates.