# US 11,993,843 B2 · Substrate processing apparatus

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- Number: US 11,993,843 B2
- Document ID: US11993843B2
- Status: Granted
- Kind: B2
- Application number: 16/039,817
- Filed: 2018-07-19
- Published: 2019-02-28
- Granted: 2024-05-28
- Earliest claimed: 2017-08-31
- Assignees: ASM IP Holding B.V.
- Applicants: ASM IP Holding B.V.
- Inventors: Seung Wook Kim; JuIll Lee; Won Ki Jeong; Dong Rak Jung; Hong Hyun Kim
- Web page: https://patentgrep.com/patent/US11993843B2

## CPC

- C23C 16/4411: {Cooling of the reaction chamber walls (C23C16/45572 takes precedence)}
- C23C 16/45565: {Shower nozzles}
- C23C 16/45572: {Cooled nozzles}
- H01J 37/32522: {Temperature}
- C23C 16/45551: {for relative movement of the substrate and the gas injectors or half-reaction reactor compartments}
- C23C 16/4586: {Elements in the interior of the support, e.g. electrodes, heating or cooling devices}
- H01J 37/32082: {Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence)}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

Provided is a cooling device capable of controlling the temperature of an upper portion of a reactor, or more particularly, a gas supply device, for example, a shower head. The cooling device includes a separator configured to uniformly and efficiently cool the gas supply device.

## Claims

### Claim 1

A cooling device comprising:
a first partition;
a second partition surrounding the first partition;
a third partition surrounding the second partition; and
an elongated separator extending from the first partition to the third partition by penetrating through the second partition, and separating a space between the second partition and the third partition into a first area and a second area, and separating a space between the second partition and the first partition into a third area and a fourth area,
wherein the elongated separator comprises a body having a first surface and a second surface that are opposite surfaces facing each other in a height direction of the elongated separator, a first channel located on the first surface, a second channel located on the second surface in a lower portion of the elongated separator, a first member located in the upper portion of the elongated separator and between the second partition and the third partition, a second member located in the upper portion of the elongated separator and between the first partition and the second partition, a third member located in the lower portion of the elongated separator and between the second partition and the third partition, and a fourth member located in the lower portion of the elongated separator and between the first partition and the second partition;
wherein at least a portion of the first member is coupled to at least a portion of the third member via the body in the height direction and at least a portion of the second member is coupled to at least a portion of the fourth member via the body in the height direction,
wherein the first channel is formed by the first member and the second member,
wherein the second channel is formed by the third member and the fourth,
wherein the first channel connects the first area and the third area on the upper portion of the elongated separator,
wherein the second channel connects the second area and the fourth area on the lower portion of the elongated separator, and
wherein the first channel and the second channel are in a skew position with respect to each other.

### Claim 2 (depends on 1)

The cooling device of claim 1, wherein one surface of each of the first member, the second member, the third member, and the fourth member contacts the second partition.

### Claim 3 (depends on 1)

The cooling device of claim 1, wherein the first member and the third member contact the third partition, and
the second member and the fourth member contact the first partition.

### Claim 4 (depends on 1)

The cooling device of claim 1, wherein the first member, the second member, the third member, and the fourth member have a same height, and
the first channel and the second channel each have a same uniform width.

### Claim 5 (depends on 1)

The cooling device of claim 1, wherein the cooling device further comprises an inlet for introducing a coolant, and,
when the inlet is located between the second partition and the third partition,
the elongated separator enables the coolant flowing in a clockwise direction between the second partition and the third partition to continue to flow in a clockwise direction between the first partition and the second partition, and
the elongated separator enables the coolant flowing in a counterclockwise direction between the second partition and the third partition to continue to flow in a counterclockwise direction between the first partition and the second partition, and
when the inlet is located between the first partition and the second partition,
the elongated separator enables the coolant flowing in a clockwise direction between the first partition and the second partition to continue to flow in a clockwise direction between the second partition and the third partition, and
the elongated separator enables the coolant flowing in a counterclockwise direction between the first partition and the second partition to continue to flow in a counterclockwise direction between the second partition and the third partition.

### Claim 6 (depends on 1)

The cooling device of claim 1, further comprising one or more grooves arranged between the first partition and the second partition or between the second partition and the third partition.

### Claim 7

A cooling device comprising:
a fluid channel through which a coolant circulates, the coolant being introduced through at least one inlet;
a partition separating the fluid channel into a first area and a second area,
an elongated separator penetrating through the partition and extending across the first area and the second area, the elongated separator comprising a body having a first surface, a second surface facing the first surface as an opposite surface of the first surface in a height direction of the elongated separator, a first channel located on the first surface in an upper portion of the elongated separator, and a second channel located on the second surface in a lower portion of the elongated separator, a first member located in the upper portion of the elongated separator and in the first area, a second member located in the upper portion of the elongated separator and in the second area, a third member located in the lower portion of the elongated separator and in the first area, and a fourth member located in the lower portion of the elongated separator and in the second area,
wherein at least a portion of the first member is coupled to at least a portion of the third member via the body in the height direction and at least a portion of the second member is coupled to at least a portion of the fourth member via the body in the height direction;
wherein the first channel is formed by the first member and the second member;
wherein the first channel and the second channel are in a skew position with respect to each other;
wherein the at least one inlet introduces the coolant into the first area such that a first flow of the coolant flowing in a clockwise direction and a second flow of the coolant flowing in a counterclockwise direction are formed in the first area; and
wherein the first channel of the elongated separator forms a pathway in the upper portion of the elongated separator between the first area and the second area such that one of the first flow and the second flow of the coolant is introduced from the first area into the second area and the second channel of the elongated separator forms a pathway in the lower portion of the elongated separator between the first area and the second area such that the other one of the first flow and the second flow of the coolant is introduced from the first area into the second area.

### Claim 8 (depends on 7)

The cooling device of claim 7, wherein the first channel of the elongated separator is configured to cause the flow of the coolant flowing in a clockwise direction in the first area to continue to flow in a clockwise direction in the second area, and
the second channel of the elongated separator is configured to cause the flow of the coolant flowing in a counterclockwise direction in the first area to continue to flow in a counterclockwise direction in the second area.

### Claim 9

A cooling device comprising:
a first partition;
a second partition surrounding the first partition;
a third partition surrounding the second partition; and
an elongated separator extending from the first partition to the third partition by penetrating through the second partition, separating a space between the second partition and the third partition into a first area and a second area, and separating a space between the second partition and the first partition into a third area and a fourth area, the elongated separator further comprising a first member located in an upper portion of the elongated separator and between the second partition and the third partition, a second member located in the upper portion of the elongated separator and between the first partition and the second partition, a third member located in a lower portion of the elongated separator and between the second partition and the third partition, and a fourth member located in the lower portion of the elongated separator and between the first partition and the second partition;
wherein at least a portion of the first member is coupled to at least a portion of the third member via the body in the height direction and at least a portion of the second member is coupled to at least a portion of the fourth member via the body in the height direction,
wherein a first channel is formed by the first member and the second member,
wherein a second channel is formed by the third member and the fourth member,
wherein the elongated separator comprises an area between the second member and the third member that blocks of a fluid in the first area from being mixed with a fluid flowing through the second channel,
wherein the elongated separator comprises a body having a first surface and a second surface that are opposite surfaces facing each other in a height direction of the elongated separator, and
wherein the first channel of the elongated separator connects the first area to the third area and is in a skew position with respect to the second channel.

### Claim 10 (depends on 9)

The cooling device of claim 9, wherein the first member comprises a triangular shape.

### Claim 11 (depends on 9)

The cooling device of claim 9, wherein one surface of each of the first member and the second member contacts the second partition.

### Claim 12 (depends on 9)

The cooling device of claim 9, wherein the first member contacts the third partition, and
the second member contacts the first partition.

### Claim 13 (depends on 9)

The cooling device of claim 9, wherein the first member and the second member have a same height, and
the channel has a uniform width.

### Claim 14 (depends on 9)

The cooling device of claim 9, wherein the first channel of the elongated separator is configured to cause a portion of the coolant flowing in a certain direction in the first area to continue to flow in the certain direction in the third area.

### Claim 15 (depends on 1)

A gas supply device comprising the cooling device of claim 1.

### Claim 16 (depends on 1)

A substrate processing apparatus comprising:
a chamber having an inner space surrounded by a top lid and an outer wall;
at least one reactor located in the top lid and comprising a gas supply device;
at least one substrate support located on a wall of the chamber and facing the reactor;
a reaction space formed between the reactor and the substrate support; and
the cooling device of claim 1,
wherein the cooling device is provided over the reactor or over the gas supply device.