# US 11,993,833 B2 · Soft magnetic metal powder comprising a metal oxide covering, and electronic component

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- Number: US 11,993,833 B2
- Document ID: US11993833B2
- Status: Granted
- Kind: B2
- Application number: 16/939,484
- Filed: 2020-07-27
- Published: 2021-02-04
- Granted: 2024-05-28
- Earliest claimed: 2019-07-31
- Assignees: TDK Corporation
- Applicants: TDK Corporation
- Inventors: Satoko Mori; Kazuhiro Yoshidome; Akito Hasegawa; Hiroyuki Matsumoto
- Web page: https://patentgrep.com/patent/US11993833B2

## CPC

- C22C 38/002: {containing In, Mg, or other elements not provided for in one single group C22C38/001 - C22C38/60}
- B22F 1/08: Metallic powder characterised by particles having an amorphous microstructure
- C22C 33/0257: {characterised by the range of the alloying elements}
- C22C 38/12: containing tungsten, tantalum, molybdenum, vanadium, or niobium
- C22C 38/14: containing titanium or zirconium
- H01F 1/153: Amorphous metallic alloys, e.g. glassy metals {(making ferrous amorphous alloys C22C33/003)}
- H01F 1/33: mixtures of metallic and non-metallic particles; metallic particles having oxide skin
- B22F 1/16: Metallic particles coated with a non-metal (coated with lubricating or binding agents or with organic material B22F1/10)
- B22F 9/082: {atomising using a fluid (using centrifugal force B22F9/10)}
- B22F 2009/0824: {with a specific atomising fluid}
- B22F 2301/35: Iron
- B22F 2998/10: Processes characterised by the sequence of their steps
- B22F 2999/00: Aspects linked to processes or compositions used in powder metallurgy
- C01P 2002/00: Crystal-structural characteristics
- C01P 2002/02: Amorphous compounds
- C01P 2004/80: Particles consisting of a mixture of two or more inorganic phases
- C01P 2004/84: one phase coated with the other
- C01P 2006/42: Magnetic properties
- C22C 2202/02: Magnetic
- H01F 1/15383: {Applying coatings thereon (H01F1/15366 takes precedence)}
- C22C: ALLOYS (treatment of alloys C21D, C22F)
- B22F: WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER (making alloys by powder metallurgy C22C); APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- C01P: INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS

## Abstract

Provided is a soft magnetic metal powder including a plurality of soft magnetic metal particles. Each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle. The metal particle includes at least Fe. The oxidized part includes at least one kind of element of S and an element M. The element M is at least one kind of element selected from the group consisting of Nb, Ta, W, Zr, Hf, and Cr. A unit of a concentration of each of S and the element M in the metal particle and the oxidized part is atom %. The concentration of S or the element M in the metal particle and the oxidized part has a maximum value in the oxidized part.

## Claims

### Claim 1

A soft magnetic metal powder including a plurality of soft magnetic metal particles,
wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
the metal particle includes at least Fe,
the oxidized part includes at least one element M,
the element M is at least one kind of element selected from the group consisting of Nb, Ta, W, Zr, Hf, and Cr,
a unit of a concentration of the element M in the metal particle and the oxidized part is atom %,
the concentration of the element M in the metal particle and the oxidized part has a maximum value in the oxidized part,
wherein an average value of the concentration of the element M in the metal particle is expressed as [M]a,
an average value of the maximum value of the concentration of the element M in the oxidized part is expressed as [M]m, and
wherein [M]m−[M]a is 0.4 atom % or more and 5.0 atom % or less.

### Claim 2 (depends on 1)

An electronic component containing:
the soft magnetic metal powder according to claim 1.

### Claim 3

A soft magnetic metal powder including a plurality of soft magnetic metal particles,
wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
the metal particle includes at least Fe,
the oxidized part includes at least one element M,
the element M is at least one kind of element selected from the group consisting of Nb, Ta, W, Zr, Hf, and Cr,
a unit of a concentration of the element M in the metal particle and the oxidized part is atom %,
the concentration of the element M in the metal particle and the oxidized part has a maximum value in the oxidized part,
wherein an average value of the concentration of the element M in the metal particle is expressed as [M]a,
an average value of the maximum value of the concentration of the element M in the oxidized part is expressed as [M]m,
[M]m−[M]a is 0.4 atom % or more,
wherein [M]a is from 0 atom % to 16.0 atom %, and
[M]m is from 0.4 atom % to 21.0 atom %.

### Claim 4 (depends on 3)

An electronic component containing:
the soft magnetic metal powder according to claim 3.

### Claim 5

A soft magnetic metal powder including a plurality of soft magnetic metal particles,
wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
the metal particle includes at least Fe,
the oxidized part includes at least S,
a unit of a concentration of S in the metal particle and the oxidized part is atom %,
the concentration of S in the metal particle and the oxidized part has a maximum value in the oxidized part,
wherein an average value of the concentration of S in the metal particle is expressed as [S]a,
an average value of the maximum value of the concentration of S in the oxidized part is expressed as [S]m, and
wherein [S]m−[S]a is 0.2 atom % or more and 5.0 atom % or less.

### Claim 6 (depends on 5)

An electronic component containing:
the soft magnetic metal powder according to claim 5.

### Claim 7

A soft magnetic metal powder including a plurality of soft magnetic metal particles,
wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
the metal particle includes at least Fe,
the oxidized part includes at least S,
a unit of a concentration of S in the metal particle and the oxidized part is atom %,
the concentration of S in the metal particle and the oxidized part has a maximum value in the oxidized part,
wherein an average value of the concentration of S in the metal particle is expressed as [S]a,
an average value of the maximum value of the concentration of S in the oxidized part is expressed as [S]m,
[S]m−[S]a is 0.2 atom % or more,
wherein [S]a is from 0 atom % to 5.0 atom %, and
[S]m is from 0.2 atom % to 10.0 atom %.

### Claim 8 (depends on 7)

An electronic component containing:
the soft magnetic metal powder according to claim 7.

### Claim 9

A soft magnetic metal powder including a plurality of soft magnetic metal particles,
wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
the metal particle includes at least Fe,
the oxidized part includes S and at least one element M,
the element M is at least one kind of element selected from the group consisting of Nb, Ta, W, Zr, Hf, and Cr,
a unit of a concentration of each of S and the element M in the metal particle and the oxidized part is atom %,
the concentration of each of S and the element M in the metal particle and the oxidized part has a maximum value in the oxidized part,
wherein an average value of the concentration of the element M in the metal particle is expressed as [M]a,
an average value of the maximum value of the concentration of the element M in the oxidized part is expressed as [M]m,
wherein [M]m−[M]a is 0.4 atom % or more and 5.0 atom % or less,
an average value of the concentration of S in the metal particle is expressed as [S]a,
an average value of the maximum value of the concentration of S in the oxidized part is expressed as [S]m, and
[S]m−[S]a is 0.2 atom % or more.

### Claim 10 (depends on 9)

An electronic component containing:
the soft magnetic metal powder according to claim 9.

### Claim 11

A soft magnetic metal powder including a plurality of soft magnetic metal particles,
wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
the metal particle includes at least Fe,
the oxidized part includes S and at least one element M,
the element M is at least one kind of element selected from the group consisting of Nb, Ta, W, Zr, Hf, and Cr,
a unit of a concentration of each of S and the element M in the metal particle and the oxidized part is atom %,
the concentration of each of S and the element M in the metal particle and the oxidized part has a maximum value in the oxidized part,
wherein an average value of the concentration of the element M in the metal particle is expressed as [M]a,
an average value of the maximum value of the concentration of the element M in the oxidized part is expressed as [M]m,
[M]m−[M]a is 0.4 atom % or more,
wherein [M]a is from 0 atom % to 16.0 atom %, and
[M]m is from 0.4 atom% to 21.0 atom%,
an average value of the concentration of S in the metal particle is expressed as [S]a,
an average value of the maximum value of the concentration of S in the oxidized part is expressed as [S]m, and
[S]m−[S]a is 0.2 atom % or more.

### Claim 12 (depends on 11)

An electronic component containing:
the soft magnetic metal powder according to claim 11.

### Claim 13

A soft magnetic metal powder including a plurality of soft magnetic metal particles,
wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
the metal particle includes at least Fe,
the oxidized part includes S and at least one element M,
the element M is at least one kind of element selected from the group consisting of Nb, Ta, W, Zr, Hf, and Cr,
a unit of a concentration of each of S and the element M in the metal particle and the oxidized part is atom %,
the concentration of each of S and the element M in the metal particle and the oxidized part has a maximum value in the oxidized part,
wherein an average value of the concentration of the element M in the metal particle is expressed as [M]a,
an average value of the maximum value of the concentration of the element M in the oxidized part is expressed as [M]m,
[M]m−[M]a is 0.4 atom % or more,
an average value of the concentration of S in the metal particle is expressed as [S]a,
an average value of the maximum value of the concentration of S in the oxidized part is expressed as [S]m, and
wherein [S]m−[S]a is 0.2 atom % or more and 5.0 atom % or less.

### Claim 14 (depends on 13)

An electronic component containing:
the soft magnetic metal powder according to claim 13.

### Claim 15

A soft magnetic metal powder including a plurality of soft magnetic metal particles,
wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
the metal particle includes at least Fe,
the oxidized part includes S and at least one element M,
the element M is at least one kind of element selected from the group consisting of Nb, Ta, W, Zr, Hf, and Cr,
a unit of a concentration of each of S and the element M in the metal particle and the oxidized part is atom %,
the concentration of each of S and the element M in the metal particle and the oxidized part has a maximum value in the oxidized part,
wherein an average value of the concentration of the element M in the metal particle is expressed as [M]a,
an average value of the maximum value of the concentration of the element M in the oxidized part is expressed as [M]m,
[M]m−[M]a is 0.4 atom % or more,
an average value of the concentration of S in the metal particle is expressed as [S]a,
an average value of the maximum value of the concentration of S in the oxidized part is expressed as [S]m, and
[S]m−[S]a is 0.2 atom % or more,
wherein [S]a is from 0 atom % to 5.0 atom %, and
[S]m is from 0.2 atom % to 10.0 atom %.

### Claim 16 (depends on 15)

An electronic component containing:
the soft magnetic metal powder according to claim 15.

### Claim 17

A soft magnetic metal powder including a plurality of soft magnetic metal particles,
wherein each of the soft magnetic metal particles includes a metal particle and an oxidized part covering the metal particle,
the metal particle includes at least Fe,
the oxidized part includes at least one element M,
the element M is at least one kind of element selected from the group consisting of Nb, Ta, W, Zr, Hf, and Cr,
a unit of a concentration of the element M in the metal particle and the oxidized part is atom %
the concentration of the element M in the metal particle and the oxidized part has a maximum value in the oxidized part,
wherein an average value of the concentration of the element M in the metal particle is expressed as [M]a,
an average value of the maximum value of the concentration of the element M in the oxidized part is expressed as [M]m, and
[M]m−[M]a is 0.4 atom % or more,
wherein the element M is at least one kind of element M′ selected from the group consisting of Nb, Ta, W, Zr, and Hf, or
the element M consists of Cr and at least one kind of the element M′.

### Claim 18 (depends on 17)

An electronic component containing:
the soft magnetic metal powder according to claim 17.