# US 11,992,894 B2 · Method of separating a liquid lens from an array of liquid lenses

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- Number: US 11,992,894 B2
- Document ID: US11992894B2
- Status: Granted
- Kind: B2
- Application number: 16/971,501
- Filed: 2019-02-22
- Published: 2021-03-25
- Granted: 2024-05-28
- Earliest claimed: 2018-02-23
- Assignees: Corning Incorporated
- Applicants: Corning Incorporated
- Inventors: Hasan Fiaz; Jann Paul Kaminski; Raymond Miller Karam; Brian Nilsen; Marie Bernadette O'Regan; Garrett Andrew Piech; Sergio Tsuda; ChuanChe Wang; Ming Ying
- Web page: https://patentgrep.com/patent/US11992894B2

## CPC

- B23K 26/0006: {taking account of the properties of the material involved (B23K26/32, B23K26/40 take precedence)}
- B23K 26/32: taking account of the properties of the material involved
- B23K 26/324: involving non-metallic parts
- B23K 26/38: by boring or cutting
- B23K 26/53: for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
- B28D 5/0011: {with preliminary treatment, e.g. weakening by scoring}
- C03B 33/0222: {Scoring using a focussed radiation beam, e.g. laser}
- C03C 23/0025: {by a laser beam}
- C03C 27/08: with the aid of intervening metal
- G02B 3/14: of variable focal length
- G02B 13/0085: {employing wafer level optics}
- G02B 26/005: {based on electrowetting}
- B23K 2103/52: {Ceramics}
- B23K 2103/54: {Glass}
- B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B28D: WORKING STONE OR STONE-LIKE MATERIALS
- C03B: MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

A method of separating a portion of an object comprising: presenting an object having a thickness; using a laser emission at a wavelength to perforate at least a portion of the thickness of the object sequentially over a length to form a series of perforations between a first portion of the object on one side of the series of perforations and a second portion of the object on the other side of the series of perforations; and applying a stress to the object at the series of perforations to separate the first portion of the object from the second portion of the object, wherein the thickness of the object, at the series of perforations, is transparent to the wavelength of the laser emission.

## Claims

### Claim 1

A method of separating a portion of an object comprising a first layer that is transparent to a wavelength of a laser emission, a second layer that is not transparent to the wavelength of the laser emission, and a third layer that is transparent to the wavelength of the laser emission, the method comprising:
bonding the first layer to the third layer throughout a bonded volume, whereby the bonded volume is transparent to the wavelength of the laser emission;
perforating at least a portion of a thickness of the object sequentially over a length using the laser emission at the wavelength to form a series of perforations between a first portion of the object on one side of the series of perforations and a second portion of the object on the other side of the series of perforations, the series of perforations extending through the bonded volume; and
applying a stress to the object at the series of perforations to separate the first portion of the object from the second portion of the object;
wherein the thickness of the object, at the series of perforations, is transparent to the wavelength of the laser emission; and
wherein the bonding the first layer to the third layer throughout the bonded volume comprises diffusing at least a portion of the second layer into the first layer and into the third layer to form the bonded volume, wherein diffusing the second layer into the first layer and into the third layer renders the bonded volume transparent to the wavelength of the laser emission.

### Claim 2 (depends on 1)

The method of claim 1, wherein the laser emission perforates the entire thickness of the object.

### Claim 3 (depends on 1)

The method of claim 1, wherein the series of perforations comprises perforations that have a diameter of between 3 μm and 7 μm.

### Claim 4 (depends on 1)

The method of claim 1, wherein the series of perforations comprises a first perforation and a second perforation separated by a distance of between 7 μm and 10 μm.

### Claim 5 (depends on 1)

The method of claim 1,
wherein the bonding the first layer to the third layer throughout the bonded volume comprises melting the first layer and the third layer to fuse the first layer and the third layer together.

### Claim 6 (depends on 1)

The method of claim 1, wherein the second layer comprises a metal.

### Claim 7 (depends on 1)

The method of claim 1, wherein the first layer comprises a glass material.

### Claim 8 (depends on 1)

The method of claim 1, wherein:
the object is an array of lens devices; and
the stress comprises bending the object at the series of perforations.

### Claim 9 (depends on 8)

The method of claim 8, wherein the lens devices are liquid lenses.

### Claim 10

A method of separating liquid lenses, the method comprising:
bonding a first outer layer of a first liquid lens to an intermediate layer of the first liquid lens throughout a first bonded volume, whereby the first bonded volume is transparent to the wavelength of the laser emission;
bonding the intermediate layer to a second outer layer of the first liquid lens throughout a second bonded volume, whereby the second bonded volume is transparent to the wavelength of the laser emission, wherein the first bonded volume is disposed spatially above the second bonded volume;
perforating at least a portion of a thickness of an array of liquid lenses sequentially over a length of the array of liquid lenses using a laser emission at a wavelength to form a series of perforations between the first liquid lens on one side of the series of perforations and a second liquid lens on the other side of the series of perforations; and
applying a stress to the array of liquid lenses at the series of perforations to separate the first liquid lens from the second liquid lens.

### Claim 11 (depends on 10)

The method of claim 10, wherein:
the intermediate layer is between the first outer layer and the second outer layer, the intermediate layer having a through hole, the first outer layer having an external surface and the second outer layer having an external surface;
a cavity disposed between the first outer layer and the second outer layer, and within the through hole; and
a first liquid and a second liquid disposed within the cavity, the first liquid and the second liquid separated at an interface;
the first outer layer, the second outer layer, and the intermediate layer are transparent to the wavelength of the laser emission;
the thickness of the array of liquid lenses is between the external surface of the first outer layer and the external surface of the second outer layer of the first liquid lens; and
the perforating at least a portion of the thickness of the array of liquid lenses comprises perforating through the first outer layer, the second outer layer, and the intermediate layer of the first liquid lens.

### Claim 12 (depends on 10)

The method of claim 10, wherein:
the first liquid lens comprises:
a first conductive layer that is not transparent to the wavelength of the laser emission between the first outer layer and the intermediate layer; and
a second conductive layer that is not transparent to the wavelength of the laser emission between the intermediate layer and the second outer layer.

### Claim 13 (depends on 10)

The method of claim 10,
wherein the perforating at least a portion of the thickness of the array of liquid lenses comprises perforating through the first bonded volume and the second bonded volume of the first liquid lens.

### Claim 14 (depends on 10)

The method of claim 10, wherein:
the first bonded volume has a width;
the second bonded volume has a width;
the width of the first bonded volume and the second bonded volume are different; and
the width of whichever of the first bonded volume or the second bonded volume is closer to the laser emission used to perforate is at least ten percent wider than the other width.

### Claim 15 (depends on 1)

The method of claim 1, wherein the second layer comprise a metal, a metal oxide, or a combination of a metal and a metal oxide.