# US 11,992,837 B2 · Fluidic cavities for on-chip layering and sealing of separation arrays

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- Number: US 11,992,837 B2
- Document ID: US11992837B2
- Status: Granted
- Kind: B2
- Application number: 18/165,434
- Filed: 2023-02-07
- Published: 2023-06-22
- Granted: 2024-05-28
- Earliest claimed: 2019-02-13
- Assignees: International Business Machines Corporation
- Applicants: International Business Machines Corporation
- Inventors: Evan Colgan; Joshua T. Smith; Benjamin Wunsch
- Web page: https://patentgrep.com/patent/US11992837B2

## CPC

- B01L 3/502707: {characterised by the manufacture of the container or its components}
- B01L 3/502715: {characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces}
- B01L 3/502761: {specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads or physically stretching molecules}
- B81B 7/0061: {suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound}
- B81C 1/00111: {Tips, pillars, i.e. raised structures (microneedles A61M37/0015)}
- B81C 1/00309: {suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound}
- G01N 15/0255: {with mechanical, e.g. inertial, classification, and investigation of sorted collections (with centrifuges G01N15/042)}
- B01L 3/502723: {characterised by venting arrangements}
- B01L 3/502753: {characterised by bulk separation arrangements on lab-on-a-chip devices, e.g. for filtration or centrifugation}
- B01L 2200/0652: Sorting or classification of particles or molecules
- B01L 2200/0689: Sealing
- B01L 2300/12: Specific details about materials
- B81B 2201/058: Microfluidics not provided for in B81B2201/051 - B81B2201/054
- B81B 2203/0361: Tips, pillars
- G01N 2015/0288: {Sorting the particles}
- B01L: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)
- B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01)
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

A method for fabricating a fluidic device includes depositing a sacrificial material on a pillar array arranged on a substrate. The method also includes removing a portion of the sacrificial material. The method further includes depositing a sealing layer on the pillar array to form a sealed fluidic cavity.

## Claims

### Claim 1

A method of fabricating a fluidic device, the method comprising:
arranging a first pillar array on a substrate, the first pillar array comprising a plurality of pillars and a plurality of extraction columns, each extraction column comprising an access opening, each extraction column further comprising an inverted U-shaped structure defined by a single slit within a sidewall of the respective extraction column that provides unidirectional slit access to an exterior of the respective extraction column;
arranging a sealing layer on the first pillar array to form a sealed fluidic cavity; and
arranging an oxide layer on the sealing layer, the oxide layer having a plurality of vent holes aligned over the plurality of extraction columns.

### Claim 2 (depends on 1)

The method of claim 1, wherein the fluidic device comprises a deterministic lateral displacement (DLD) device.

### Claim 3 (depends on 1)

The method of claim 1, wherein the sealing layer comprises an oxide.

### Claim 4 (depends on 1)

The method of claim 1, further comprising arranging a second pillar array between the first pillar array and the sealing layer.

### Claim 5 (depends on 1)

The method of claim 1, wherein the first pillar array comprises an oxide.

### Claim 6 (depends on 5)

The method of claim 5, wherein the oxide is silicon dioxide.

### Claim 7 (depends on 1)

The method of claim 1, wherein the access opening of the inverted U-shaped structure faces the direction of fluid flow.