# US 11,992,350 B2 · System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 11,992,350 B2
- Document ID: US11992350B2
- Status: Granted
- Kind: B2
- Application number: 18/176,760
- Filed: 2023-03-01
- Published: 2023-09-21
- Granted: 2024-05-28
- Earliest claimed: 2022-03-15
- Assignees: Sigray, Inc.
- Applicants: Sigray, Inc.
- Inventors: Wenbing Yun; David John Vine; Sylvia Jia Yun Lewis; Sheraz Gul; Janos Kirz
- Web page: https://patentgrep.com/patent/US11992350B2

## CPC

- A61B 6/4266: {characterised by using a plurality of detector units (A61B6/4014 takes precedence)}
- G01N 23/044: using laminography or tomosynthesis
- A61B 6/4241: {using energy resolving detectors, e.g. photon counting}
- G01N 2223/6116: semiconductor wafer
- A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D)
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

An x-ray computed laminography imaging system includes a transmission x-ray source configured to generate x-rays, at least some of the x-rays propagate along an x-ray propagation axis through a region of interest of an object. The system further includes a stage assembly configured to rotate the object about a rotation axis extending through the region of interest. The system further includes at least one x-ray detector configured to intercept at least some of the x-rays propagating along the x-ray propagation axis. The at least one x-ray detector includes a scintillator, at least one optical lens, and two-dimensional pixelated imaging circuitry. The scintillator has a thickness that is substantially parallel to the x-ray propagation axis and the at least one optical lens is configured to receive visible light from the scintillator and to focus the visible light into a two-dimensional image. The at least one optical lens has a depth of focus, and the thickness of the scintillator is in a range of 1 to 20 times the depth of focus.

## Claims

### Claim 1

An x-ray computed laminography imaging system configured to generate a transmission image of a region of interest of an object, the system comprising:
a transmission x-ray source configured to generate x-rays at an x-ray source focal spot, at least some of the x-rays propagating along an x-ray propagation axis extending from the x-ray source focal spot through the region of interest of the object;
a stage assembly comprising at least one rotation stage configured to rotate the object about a rotation axis extending through the region of interest, the rotation axis at an angle relative to a normal to the x-ray propagation axis in a range of 10 degrees to 60 degrees;
at least one x-ray detector configured to intercept at least some of the x-rays propagating along the x-ray propagation axis, the at least one x-ray detector comprising at least one optical subsystem and a two-dimensional pixelated imaging circuitry comprising an imaging area configured to receive a two-dimensional image from the at least one optical subsystem, the at least one optical subsystem comprising:
a scintillator having a surface normal and a thickness that are parallel to the x-ray propagation axis within ±10 degrees, the scintillator configured to generate visible light in response to x-rays impinging the scintillator; and
at least one optical lens configured to receive the visible light from the scintillator and to focus the visible light into the two-dimensional image, the at least one optical lens having a depth of focus, the thickness of the scintillator in a range of 1 to 20 times the depth of focus.

### Claim 2 (depends on 1)

The system of claim 1, wherein the thickness of the scintillator is in a range of 1 to 5 times the depth of focus.

### Claim 3 (depends on 1)

The system of claim 1, wherein the at least one optical lens is configured to focus the two-dimensional image on the imaging area of the imaging circuitry.

### Claim 4 (depends on 1)

The system of claim 1, wherein the at least one optical lens comprises an objective lens configured to receive at least a portion of the visible light from the scintillator and a tube lens configured to receive at least a portion of the visible light from the objective lens, the tube lens configured to focus the two-dimensional image on the imaging area of the imaging circuitry.

### Claim 5 (depends on 1)

The system of claim 1, wherein the at least one optical subsystem comprises:
a first optical subsystem comprising a first scintillator and at least one first optical lens configured to be translated into position to intercept the x-rays and to provide a first optical attribute for the two-dimensional image at the imaging area; and
a second optical subsystem comprising a second scintillator and at least one second optical lens configured to be translated into position to intercept the x-rays and to provide a second optical attribute for the two-dimensional image at the imaging area, the second optical attribute different from the first optical attribute.

### Claim 6 (depends on 5)

The system of claim 5, wherein the first and second optical attributes are optical magnifications.

### Claim 7 (depends on 5)

The system of claim 5, wherein the first and second optical attributes are numerical apertures.

### Claim 8 (depends on 1)

The system of claim 1, further comprising at least one linear translation stage configured to move the object relative to the rotation axis.

### Claim 9 (depends on 1)

The system of claim 1, further comprising a gantry on which the x-ray source and the at least one x-ray detector are mounted, the gantry configured to rotate the x-ray source and the at least one x-ray detector about a rotation pivot point at an intersection of the x-ray propagation axis and the rotation axis.

### Claim 10 (depends on 9)

The system of claim 9, wherein the gantry is configured to adjust an angle of the x-ray propagation axis relative to the rotation axis.

### Claim 11 (depends on 1)

The system of claim 1, further comprising at least one source stage configured to translate the x-ray source relative to the object and relative to the at least one x-ray detector to adjust a magnification of the two-dimensional image relative to the region of interest.

### Claim 12 (depends on 11)

The system of claim 11, wherein the at least one source stage is further configured to adjust an angle of the x-ray propagation axis relative to the rotation axis.

### Claim 13 (depends on 1)

The system of claim 1, further comprising at least one detector stage configured to translate the at least one x-ray detector relative to the object and relative to the at least one x-ray source to adjust a magnification of the two-dimensional image relative to the region of interest.

### Claim 14 (depends on 13)

The system of claim 13, wherein the at least one detector stage is further configured to adjust an angle of the x-ray propagation axis relative to the rotation axis.

### Claim 15 (depends on 1)

The system of claim 1, wherein the at least one x-ray detector further comprises a second x-ray detector configured to be moved in place of the at least one optical subsystem and the two-dimensional pixelated imaging circuitry, such that the second x-ray detector receives the x-rays instead of the at least one optical subsystem and the two-dimensional pixelated imaging circuitry.

### Claim 16 (depends on 15)

The system of claim 15, wherein the second x-ray detector is selected from a group consisting of: an energy discriminating flat panel detector, an amorphous selenium detector, and a photon counting detector.

### Claim 17 (depends on 1)

The system of claim 1, wherein the stage assembly further comprises at least one linear translation stage mounted to the at least one rotation stage.

### Claim 18 (depends on 17)

The system of claim 17, wherein the stage assembly further comprises a support configured to hold the object, the support having greater than 50% transmission to x-rays having x-ray energies greater than 50% of an acceleration voltage of the transmission x-ray source.

### Claim 19

A method of generating at least one two-dimensional image of a region of interest of an object, the method comprising:
emitting diverging x-rays from an x-ray source focal spot;
propagating at least some of the x-rays along an x-ray propagation axis through the region of interest of the object;
positioning the object at a plurality of rotational positions by rotating the object about a rotation axis extending through the region of interest, the rotation axis at an angle relative to a normal of the x-ray propagation axis in a range of 10 degrees to 60 degrees; and
for one or more of the rotational positions of the object, detecting x-rays that have propagated through the region of interest, wherein said detecting comprises:
impinging at least some of the x-rays that have propagated through the region of interest onto a scintillator having a surface normal and a thickness that are parallel to the x-ray propagation axis within ±10 degrees;
guiding the visible light, using at least one optical lens or a magnifying fiber optic plate, at a two-dimensional pixelated imaging area of imaging circuitry; and
generating, using the imaging circuitry, the two-dimensional image of the region of interest.

### Claim 20 (depends on 19)

The method of claim 19, wherein said detecting further comprises moving a flat panel and/or photon counting detector in place of the scintillator and the at least one optical lens or a magnifying fiber optic plate and impinging at least some of the x-rays that have propagated through the region of interest onto the flat panel and/or photon counting detector.

### Claim 21 (depends on 19)

The method of claim 19, wherein said detecting further comprises moving a second scintillator and a second at least one optical lens or a magnifying fiber optic plate in place of the scintillator and the at least one optical lens or a magnifying fiber optic plate and impinging at least some of the x-rays that have propagated through the region of interest onto the second scintillator, using the second scintillator to generate visible light in response to the x-rays impinging the second scintillator, and guiding the visible light, using the second optical assembly, at the two-dimensional pixelated imaging area of the imaging circuitry.

### Claim 22 (depends on 21)

The method of claim 21, wherein the at least one optical lens or a magnifying fiber optic plate has a first depth of focus, the thickness of the scintillator in a range of 1 to 20 times the first depth of focus, and the second at least one optical lens or a magnifying fiber optic plate having a second depth of focus, a second thickness of the second scintillator equal to an integer multiple of the second depth of focus within ±10%, the second depth of focus different from the first depth of focus.

### Claim 23 (depends on 22)

The method of claim 22, wherein the thickness of the scintillator is in a range of 1 to 5 times the first depth of focus.