Processing system, measuring probe, shape measuring device, and program
AssigneeNikon Corporation
InventorTomoaki Yamada
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AssigneeNikon Corporation
InventorTomoaki Yamada
Estimating the term…
A processing system includes a machine tool including a measuring unit which outputs measurement information for calculating a shape of a processing object, a control unit which generates position information related to a position of the measuring unit at the time of measuring the processing object and outputs the generated position information and a generation time signal indicating a time at which the position information is generated, an acquisition unit which acquires the output position information and the generation time signal, an estimation unit which estimates the time at which the position information is generated on the basis of a time at which the acquisition unit acquires the generation time signal, and a shape calculation unit which calculates a shape of the processing object on the basis of the measurement information, the position information, and the time estimated by the estimation unit.
A processing system comprising:
A shape measurement system comprising:
A shape measuring probe attachable to a machine tool, the shape measuring probe comprising:
A non-transitory computer-readable recording medium on which is recorded a program that is executable by a computer to cause the computer to execute:
Dependencies are inferred from the claim text.