Faraday rotators, optical isolators, driver laser arrangements and EUV radiation generation apparatus

A system for EUV radiation generation, the system comprising:

• a driver laser system comprising:
• a beam source configured to generate at least one laser beam propagating in a first direction;
• an amplifier system comprising at least one optical amplifier configured to amplify the laser beam propagating in the first direction;
• and
• at least one optical isolator configured to suppress laser radiation propagating in a second direction opposite to the first direction,
• wherein the optical isolator comprises:
• at least one Faraday rotator;
• and
• a first polarizer and a second polarizer, between which the Faraday rotator is arranged,
• wherein the Faraday rotator comprises:
• a disk-shaped magneto-optical solid-state medium;
• a magnet generator configured to generate a magnetic field in the magneto-optical solid-state medium;
• a heat sink with a support surface for the magneto-optical solid-state medium;
• a reflector mounted between the heat sink and the magneto-optical solid-state medium and configured to reflect a laser beam entering the magneto-optical solid-state medium in a first impingement region on a first side of the magneto-optical solid-state medium, the first side facing away from the support surface;
• and
• a deflector configured to deflect the laser beam emerging from the magneto-optical solid-state medium back to the first side of the magneto-optical solid-state medium,
• wherein the deflector is configured to deflect the laser beam back to a second impingement region that at least partly overlaps with the first impingement region on the first side of the magneto-optical solid-state medium.