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US 11,988,497 B2Granted
Optical unit and film thickness measurement device
AssigneeHamamatsu Photonics K.K.
InventorsIkuo Arata, Satoshi Takimoto, Kenichi Ohtsuka
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Abstract
An optical unit includes an input portion configured to have measurement light having a wavelength extending from an ultraviolet region to a visible region input thereto, an optical system configured to condense the measurement light in a state where a chromatic aberration is caused to occur, and an opening portion configured not to image light having a wavelength in the visible region and to image light having a wavelength in the ultraviolet region of the measurement light having a chromatic aberration having occurred therein.
Claims11
An optical unit comprising:
- an input portion comprising an aperture configured to have light having a wavelength extending from an ultraviolet region to a visible region input thereto;
- an optical system comprising one or more optical elements configured to condense the light in a state where a chromatic aberration is caused to occur;
- and
- an opening portion comprising an input end toward an optical fiber configured not to image light having a wavelength in the visible region and to image light having a wavelength in the ultraviolet region of the light having the chromatic aberration having occurred therein.
1 more element
Dependencies are inferred from the claim text.