Methods for preparing an ingot in an ingot puller apparatus and methods for selecting a side heater length for such apparatus
AssigneeGlobalWafers Co., Ltd.
InventorsMaria Porrini, Sergio Morelli, Mauro Diodá
Life of this patent
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Abstract
Methods for preparing an ingot in an ingot puller apparatus are disclosed. Thermal simulations are performed with the length of the ingot puller apparatus side heater being varied in the thermal simulations. A side heater is selected based on the thermal simulations. An ingot puller apparatus having the selected side heater length is provided. A seed crystal is lowered into a melt within a crucible of the ingot puller apparatus and an ingot is withdrawn from the melt.
Claims20
A method for preparing an ingot in an ingot puller apparatus, the method comprising:
- providing an ingot puller apparatus for preparing ingots comprising:
- a crucible for holding a melt of silicon, the crucible having a floor and a sidewall that extends from the floor, the crucible having a top, the floor comprising a curved portion;
- a growth chamber for pulling a silicon ingot from the melt along a pull axis;
- a lift mechanism for raising and lowering the crucible during crystal growth relative to the pull axis;
- a heat shield having an opening through which the ingot passes during crystal growth, the heat shield being disposed above the crucible;
- and
- a bottom heater disposed below the crucible floor;
- selecting a length of a side heater disposed radially outward to the crucible sidewall, selecting the length of the side heater comprising:
- modeling a temperature profile of the crucible in the ingot puller apparatus including the heat shield while withdrawing an ingot from the silicon melt in two or more thermal simulations, the length of the side heater being varied during the thermal simulations;
- selecting the length of the side heater based on temperatures of the floor of the crucible during the two or more thermal simulations, wherein the length of the side heater is selected based on the length of the side heater during a thermal simulation in which a portion of the floor of the crucible has a temperature of about 1450° C. or less and the top of the crucible has a temperature of at least 1715° K, the crucible having a maximum temperature, the maximum temperature being within the curved portion of the crucible and being at least 1740° K;
- providing a side heater disposed radially outward to the crucible sidewall, the side heater having the selected side heater length;
- forming a melt of silicon in the crucible;
- contacting the melt with a seed crystal;
- and
- withdrawing an ingot from the silicon melt.
A method for selecting a side heater length in an ingot puller apparatus, the ingot puller apparatus comprising a crucible for holding a melt of silicon, the crucible having a floor and a sidewall that extends from the floor, the crucible having a top, the floor comprising a curved portion, the method comprising:
- thermally simulating the temperature of the crucible during ingot growth in the ingot puller apparatus, the ingot puller apparatus comprising a side heater having a first length;
- thermally simulating the temperature of a crucible during ingot growth in the ingot puller apparatus, the ingot puller apparatus comprising a side heater having a second length;
- comparing the temperature of the crucible during the thermal simulation in which the side heater has the first length and the temperature of the crucible during the thermal simulation in which the side heater has the second length;
- and
- selecting a heater length based on the comparison of the temperature of the crucible in the thermal simulation in which the side heater has the first length and the temperature of the crucible in the thermal simulation in which the side heater has the second length, wherein the length of the side heater is selected based on the length of the side heater during a thermal simulation in which a portion of the floor of the crucible has a temperature of about 1450° C. or less and the top of the crucible has a temperature of at least 1715° K, the crucible having a maximum temperature, the maximum temperature being within the curved portion of the crucible and being at least 1740° K.
Dependencies are inferred from the claim text.