Zincating and doping of metal liner for liner passivation and adhesion improvement
AssigneeLam Research Corporation
InventorsAniruddha Joi, Dries Dictus, Yezdi Dordi
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Abstract
A method for forming a self-forming barrier in a feature of a substrate is provided, including the following operations: depositing a metallic liner in the feature of the substrate, the metallic liner being deposited over a dielectric of the substrate; depositing a zinc-containing precursor over the metallic liner; performing a thermal soak of the substrate; repeating the depositing of the zinc-containing precursor and the thermal soak of the substrate for a predefined number of cycles; wherein the method forms a zinc-containing barrier layer at an interface between the metallic liner and the dielectric.
Claims20
A method for forming a self-forming barrier in a feature of a substrate, comprising:
- depositing a metallic liner in the feature of the substrate, the metallic liner being deposited over a dielectric of the substrate;
- depositing a zinc-containing precursor over the metallic liner;
- performing a thermal soak of the substrate;
- repeating the depositing of the zinc-containing precursor and the thermal soak of the substrate for a predefined number of cycles;
- wherein the method forms a zinc-containing barrier layer at an interface between the metallic liner and the dielectric.
A method for forming a self-forming barrier in a feature of a substrate, comprising:
- depositing a metallic liner in the feature of the substrate, the metallic liner being deposited over a dielectric of the substrate;
- depositing an indium-containing precursor over the metallic liner;
- performing a thermal soak of the substrate;
- repeating the depositing of the indium-containing precursor and the thermal soak of the substrate for a predefined number of cycles;
- wherein the method forms a indium-containing barrier layer at an interface between the metallic liner and the dielectric.
Dependencies are inferred from the claim text.