Teaching method
AssigneeTokyo Electron Limited
InventorTakehiro Shindo
Life of this patent
Estimating the term…
Abstract
A teaching method for a transfer mechanism is provided. The teaching method includes (a) placing a first substrate or an edge ring on a fork of the transfer mechanism, transferring the first substrate or the edge ring to a target position, and placing the first substrate or the edge ring onto the target position; (b) placing a second substrate having a position detection sensor on the fork, and transferring the second substrate to a position directly above or below the target position; (c) detecting an amount of deviation between the first substrate or the edge ring and the target position using the position detection sensor of the second substrate; and (d) correcting transfer position data of the transfer mechanism for the first substrate or the edge ring to be transferred next, based on the detected amount of deviation.
Claims12
A teaching method for a transfer mechanism comprising:
- (a) placing a first substrate or an edge ring on a fork of the transfer mechanism, transferring the first substrate or the edge ring to a target position, and placing the first substrate or the edge ring onto the target position;
- (b) placing a second substrate having a position detection sensor on the fork, and transferring the second substrate to a position directly above or below the target position;
- (c) detecting an amount of deviation between the first substrate or the edge ring and the target position, by using the position detection sensor of the second substrate;
- and
- (d) correcting transfer position data of the transfer mechanism for the first substrate or the edge ring to be transferred next, based on the detected amount of deviation.
Dependencies are inferred from the claim text.