Fluidic devices
AssigneeMeta Platforms Technologies, LLC
InventorsDaniel Myers, Serol Turkyilmaz, Ali Darvishian, Robert Manson
Life of this patent
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Abstract
Fluidic devices may include a monolithic gate substrate and a channel substrate coupled to the monolithic gate substrate. The monolithic gate substrate may include a gate chamber and a flexible membrane located adjacent to the gate chamber. The channel substrate may include a source channel and a drain channel that are in fluid communication with the flexible membrane on an opposite side of the flexible membrane from the gate chamber. Various other related devices, systems, and methods are also disclosed.
Claims21
A fluidic device, comprising:
- a monolithic gate substrate, comprising:
- a gate chamber formed in the monolithic gate substrate;
- and
- a flexible membrane that is part of the monolithic gate substrate, the flexible membrane located adjacent to the chamber;
- a channel substrate coupled to the monolithic gate substrate, the channel substrate comprising:
- a source channel in fluid communication with the flexible membrane on an opposite side of the flexible membrane from the gate chamber;
- and
- a drain channel in fluid communication with the flexible membrane on the opposite side of the flexible membrane from the gate chamber;
- and
- a standoff material positioned on the flexible membrane between the flexible membrane and the channel substrate, wherein the standoff material causes the flexible membrane to curve away from the channel substrate.
A fluidic device, comprising:
- a monolithic gate substrate, comprising a flexible membrane configured to flex between a closed position and an open position, wherein the flexible membrane has a diameter of about 2 mm or less;
- and
- a channel substrate coupled to the monolithic gate substrate, the channel substrate comprising:
- a source channel in fluid communication with the flexible membrane;
- and
- a drain channel in fluid communication with the flexible membrane,
- wherein the source channel is in fluid communication with the drain channel when the flexible membrane is in the open position and the source channel is not in fluid communication with the drain channel when the flexible membrane is in the closed position.
A fluidic device, comprising:
- a monolithic gate substrate, comprising:
- a gate chamber formed in the monolithic gate substrate;
- and
- a flexible membrane that is part of the monolithic gate substrate, the flexible membrane located adjacent to the gate chamber;
- and
- a channel substrate coupled to the monolithic gate substrate, the channel substrate comprising:
- a source channel in fluid communication with the flexible membrane on an opposite side of the flexible membrane from the gate chamber;
- and
- a drain channel in fluid communication with the flexible membrane on the opposite side of the flexible membrane from the gate chamber,
- wherein the flexible membrane is pre-curved to be biased toward the channel substrate.
Dependencies are inferred from the claim text.