Crystal growth doping apparatus and crystal growth doping method
AssigneeGlobalWafers Co., Ltd.
InventorsYu-Chih Chu, Tang-Chi Lin, Han-Sheng Wu, Hsien-Ta Tseng
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AssigneeGlobalWafers Co., Ltd.
InventorsYu-Chih Chu, Tang-Chi Lin, Han-Sheng Wu, Hsien-Ta Tseng
Estimating the term…
A crystal growth doping apparatus and a crystal growth doping method are provided. The crystal growth doping apparatus includes a crystal growth furnace and a doping device that includes a feeding tube inserted to the furnace body along an oblique insertion direction, and a storage cover and a gate tube that are disposed in the feeding tube. The feeding tube extends from an outer surface thereof to form a placement opening, and the placement opening is recessed from an edge thereof to form an upper recessed portion and a lower recessed portion along the oblique insertion direction. The storage cover includes a storage tank and a handle. When the storage cover is disposed in the gate tube body, the gate tube body is configured to isolate an inner space of the feeding tube from the placement opening.
A crystal growth doping apparatus, comprising:
A crystal growth doping method configured to be implemented with a doping device that is inserted in a crystal growth furnace along an oblique insertion direction, wherein the crystal growth furnace includes a crucible therein, and the crucible is configured to accommodate a melting raw material, and wherein the doping device includes a feeding tube, a gate tube body that is disposed in the feeding tube, and a storage cover that is detachably disposed in the gate tube body, and the feeding tube extends from an outer surface thereof to form a placement opening, the crystal growth doping method comprising:
Dependencies are inferred from the claim text.