Pneumatic system, imprint apparatus and use thereof

A method of operating an imprinting apparatus with a pneumatic system, wherein the imprinting apparatus comprises a first carrier having a plurality of pneumatically operated apertures, wherein the first carrier is configured to hold a flexible stamp having an imprinting pattern, and wherein the pneumatic system comprises a duct system including a gas entrance opening and a pressure regulator, the method comprising:

• receiving at the gas entrance opening gas from a gas supply at a supply pressure;
• and
• controlling pressure via the duct system for each of the plurality of pneumatically operated apertures, wherein controlling the pressure for each of the plurality of pneumatically operated apertures comprises:
• operating each of the pneumatically operated apertures in a first configuration, wherein in the first configuration a holding pressure is provided to it for holding a part of the flexible stamp relative to the first carrier,
• operating each of the pneumatically operated apertures in a second configuration, wherein in the second configuration a releasing pressure is provided to it for releasing the part of the flexible stamp from the first carrier, and
• a controller controlling the pressure regulator to regulate the releasing pressure for one or more apertures of the array of apertures connected to a section of the duct system to be between a set regulator pressure value and the supply pressure, when the gas supply is attached to the duct system, while at least temporarily allowing a gas flow from the gas supply along the section of the duct system towards the pressure regulator.