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US 11,980,990 B2Granted
Method for machining a workpiece in the production of an optical element
AssigneeCarl Zeiss SMT GmbH
InventorsManfred Matena, Franz-Josef Stickel, Marc Saitner, Robert Fichtl, Hans-Peter Brust
Life of this patent
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Abstract
A method for the zonal polishing of a workpiece includes using a polishing tool to guide a structured polishing pad over the surface of workpiece to remove material from the workpiece. A structured polishing pad includes a structuring adapted to the movement of a polishing tool.
Claims15
A method, comprising:
- using a polishing tool to move a structured polishing pad over a surface of a workpiece to remove material from the workpiece, thereby zonally polishing the workpiece to provide a polished surface of the workpiece;
- after zonally polishing the workpiece, smoothing the polished surface of the workpiece to provide a smoothed surface of the workpiece;
- and
- disposing a reflecting layer on the smoothed surface of the workpiece.
1 more element
Dependencies are inferred from the claim text.