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US 11,977,316 B1Granted
Thin film acousto-optic device and methods of fabrication
AssigneeIntraAction Corp.
InventorsKhanh Le, John Lekavich, Bao Tran
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Abstract
An acousto-optic deflector includes an optical element having a surface with one or more steps formed thereon; a conductive layer formed on the surface with the steps; one or more crystals secured to each step; and electrodes positioned on each surface of each crystal.
Claims17
A method for thin film acousto-optic deflection comprising:
- providing a substrate material suitable for thin film deposition;
- depositing an electrode layer onto the substrate material;
- placing a piezoelectric material layer using a plurality of piezoelectric elements on corresponding steps above the electrode layer;
- applying a voltage to the electrode layer to generate an acoustic wave by the piezoelectric material layer;
- directing a laser beam on the substrate material;
- and
- controlling the voltage applied to the electrode layer to modulate the phase and amplitude of the laser beam based on the generated acoustic wave, thereby deflecting the laser beam.
4 more elements
Method for thin film acousto-optic deflection comprising:
- providing a substrate material suitable for thin film deposition;
- depositing an electrode layer onto the substrate material;
- placing a plurality of piezoelectric elements on corresponding steps above the electrode layer;
- applying a voltage to the electrode layer to generate an acoustic wave by the piezoelectric material layer.
1 more element
Dependencies are inferred from the claim text.